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For: Ong YY, Chen BT, Tay FEH, Iliescu C. Process Analysis and Optimization on PECVD Amorphous Silicon on Glass Substrate. ACTA ACUST UNITED AC 2006. [DOI: 10.1088/1742-6596/34/1/134] [Citation(s) in RCA: 11] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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