PZT thin film deposition techniques, properties and its application in ultrasonic MEMS sensors: a review

Lead-Free Perovskite Thin Films for Gas Sensing through Surface Acoustic Wave Device Detection

Thin film technology shows great promise in fabricating electronic devices such as gas sensors. Here, we report the fabrication of surface acoustic wave (SAW) sensors based on thin films of (1 - x) Ba(Ti0.8Zr0.2)O3-x(Ba0.7Ca0.3)TiO3 (BCTZ50, x = 50) and Polyethylenimine (PEI). The layers were deposited by two laser-based techniques, namely pulsed laser deposition (PLD) for the lead-free material and matrix assisted pulsed laser evaporation (MAPLE) for the sensitive polymer. In order to assay the impact of the thickness, the number of laser pulses was varied, leading to thicknesses between 50 and 350 nm. The influence of BCTZ film's crystallographic features on the characteristics and performance of the SAW device was studied by employing substrates with different crystal structures, more precisely cubic Strontium Titanate (SrTiO3) and orthorhombic Gadolinium Scandium Oxide (GdScO3). The SAW sensors were further integrated into a testing system to evaluate the response of the BCTZ thin films with PEI, and then subjected to tests for N2, CO2 and O2 gases. The influence of the MAPLE's deposited PEI layer on the overall performance was demonstrated. For the SAW sensors based on BCTZ/GdScO3 thin films with a PEI polymer, a maximum frequency shift of 39.5 kHz has been obtained for CO2; eight times higher compared to the sensor without the polymeric layer.

Stress-Charge Nonlinear Physical Description and Tensor Symmetries for Piezoelectric Materials

Nonlinear piezoelectric materials are raised as a great replacement for devices that require low power consumption, high sensitivity, and accurate transduction, fitting with the demanding requirements of new technologies such as the Fifth-Generation of telecommunications (5G), the Internet of Things (IoT), and modern radio frequency (RF) applications. In this work, the state equations that correctly predict the nonlinear piezoelectric phenomena observed experimentally are presented. Furthermore, we developed a fast methodology to implement the state equations in the main FEM simulation software, allowing an easy design and characterization of this type of device, as the symmetry structures for high-order tensors are shown and explained. The operation regime of each high-order tensor is discussed and connected with the main nonlinear phenomena reported in the literature. Finally, to demonstrate our theoretical deductions, we used the experimental measurements, which presented the nonlinear effects, which were reproduced through simulations, obtaining maximum percent errors for the effective elasticity constants, relative effective permittivity, and resonance frequencies of 0.79%, 2.9%, and 0.3%, respectively, giving a proof of the potential of the nonlinear state equations presented for the unifying of all nonlinear phenomena observed in the piezoelectric devices.

Temperature Stable Piezoelectric Imprint of Epitaxial Grown PZT for Zero-Bias Driving MEMS Actuator Operation

In piezoelectric transducer applications, it is common to use a unipolar operation signal to avoid switching of the polarisation and the resulting nonlinearities of micro-electromechanical systems. However, semi-bipolar or bipolar operation signals have the advantages of less leakage current, lower power consumption and no additional need of a DC-DC converter for low AC driving voltages. This study investigates the potential of using piezoelectric layers with an imprint for stable bipolar operation on the basis of epitaxially grown lead zirconate titanate cantilevers with electrodes made of a metal and metal oxide stack. Due to the manufacturing process, the samples exhibit high crystallinity, rectangular shaped hysteresis and a high piezoelectric response. Furthermore, the piezoelectric layers have an imprint, indicating a strong built-in field, which shifts the polarisation versus electric field hysteresis. To obtain the stability of the imprint, laser doppler vibrometry and switching current measurements were performed at different temperatures, yielding a stable imprinted electric field of -1.83 MV/m up to at least 100 °C. The deflection of the cantilevers was measured with a constant AC driving voltage while varying the DC bias voltage to examine the influence of the imprint under operation, revealing that the same high deflection and low nonlinearities, quantified by the total harmonic distortion, can be maintained down to low bias voltages compared to unipolar operation. These findings demonstrate that a piezoelectric layer with a strong imprint makes it possible to operate with low DC or even zero DC bias, while still providing strong piezoelectric response and linear behaviour.

Ultrasound-Powered Implants: A Critical Review of Piezoelectric Material Selection and Applications

Ultrasound-powered implants (UPIs) represent cutting edge power sources for implantable medical devices (IMDs), as their powering strategy allows for extended functional lifetime, decreased size, increased implant depth, and improved biocompatibility. IMDs are limited by their reliance on batteries. While batteries proved a stable power supply, batteries feature relatively large sizes, limited life spans, and toxic material compositions. Accordingly, energy harvesting and wireless power transfer (WPT) strategies are attracting increasing attention by researchers as alternative reliable power sources. Piezoelectric energy scavenging has shown promise for low power applications. However, energy scavenging devices need be located near sources of movement, and the power stream may suffer from occasional interruptions. WPT overcomes such challenges by more stable, on-demand power to IMDs. Among the various forms of WPT, ultrasound powering offers distinct advantages such as low tissue-mediated attenuation, a higher approved safe dose (720 mW cm^-2 ), and improved efficiency at smaller device sizes. This study presents and discusses the state-of-the-art in UPIs by reviewing piezoelectric materials and harvesting devices including lead-based inorganic, lead-free inorganic, and organic polymers. A comparative discussion is also presented of the functional material properties, architecture, and performance metrics, together with an overview of the applications where UPIs are being deployed.

Ultrasound Sensors for Process Monitoring in Injection Moulding

Injection moulding is an extremely important industrial process, being one of the most commonly-used plastic formation techniques. However, the industry faces many current challenges associated with demands for greater product customisation, higher precision and, most urgently, a shift towards more sustainable materials and processing. Accurate real-time sensing of the material and part properties during processing is key to achieving rapid process optimisation and set-up, reducing down-times, and reducing waste material and energy in the production of defective products. While most commercial processes rely on point measurements of pressure and temperature, ultrasound transducers represent a non-invasive and non-destructive source of rich information on the mould, the cavity and the polymer melt, and its morphology, which affect critical quality parameters such as shrinkage and warpage. In this paper the relationship between polymer properties and the propagation of ultrasonic waves is described and the application of ultrasound measurements in injection moulding is evaluated. The principles and operation of both conventional and high temperature ultrasound transducers (HTUTs) are reviewed together with their impact on improving the efficiency of the injection moulding process. The benefits and challenges associated with the recent development of sol-gel methods for HTUT fabrication are described together with a synopsis of further research and development needed to ensure a greater industrial uptake of ultrasonic sensing in injection moulding.

Technique and Circuit for Contactless Readout of Piezoelectric MEMS Resonator Sensors

A technique and electronic circuit for contactless electromagnetic interrogation of piezoelectric micro-electromechanical system (MEMS) resonator sensors are proposed. The adopted resonator is an aluminum-nitride (AlN) thin-film piezoelectric-on-silicon (TPoS) disk vibrating in radial contour mode at about 6.3 MHz. The MEMS resonator is operated in one-port configuration and it is connected to a spiral coil, forming the sensor unit. A proximate electronic interrogation unit is electromagnetically coupled through a readout coil to the sensor unit. The proposed technique exploits interleaved excitation and detection phases of the MEMS resonator. A tailored electronic circuit manages the periodic switching between the excitation phase, where it generates the excitation signal driving the readout coil, and the detection phase, where it senses the transient decaying response of the resonator by measuring through a high-impedance amplifier the voltage induced back across the readout coil. This approach advantageously ensures that the readout frequency of the MEMS resonator is first order independent of the interrogation distance between the readout and sensor coils. The reported experimental results show successful contactless readout of the MEMS resonator independently from the interrogation distance over a range of 12 mm, and the application as a resonant sensor for ambient temperature and as a resonant acoustic-load sensor to detect and track the deposition and evaporation processes of water microdroplets on the MEMS resonator surface.

Design and Analysis of a Turning Dynamometer Embedded in Thin-Film Sensor

This paper proposes a high-strain sensitivity turning dynamometer that combines several thin-film resistor grids into three Wheatstone full-bridge circuits that can measure triaxial cutting forces. This dynamometer can replace different cutter heads using flange connections. In order to improve the strain effect of the dynamometer, the strain film sensor is fixed on the regular octagonal connection plates on both ends of the elastomer by vacuum brazing, and the stepped groove structure is also designed inside the elastomer. The dynamometer model is simplified as a four-segment cantilever beam which has different sections. The measurement mechanism model of the dynamometer system is established by the transformation relationship between deflection and strain, under external force. The standard turning tool of 20 mm square is used as a reference. The influence of the structural dimensions of the dynamometer on its strain sensitivity coefficient K is studied. The applicability of the theoretical model of dynamometer strain is verified by finite element analysis. Finally, the dynamometer with the largest K value is subjected to the bending test and compared with a standard turning tool. The experimental results show that the measurement sensitivity of the dynamometer is 2.32 times greater than that of the standard turning tool. The results also show that this dynamometer can effectively avoid the influence of the pasting process on strain transmission, thus indicating its great potential for measuring cutting force in the future.