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Hata S, Furukawa H, Gondo T, Hirakami D, Horii N, Ikeda KI, Kawamoto K, Kimura K, Matsumura S, Mitsuhara M, Miyazaki H, Miyazaki S, Murayama MM, Nakashima H, Saito H, Sakamoto M, Yamasaki S. Electron tomography imaging methods with diffraction contrast for materials research. Microscopy (Oxf) 2020; 69:141-155. [PMID: 32115659 PMCID: PMC7240780 DOI: 10.1093/jmicro/dfaa002] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/16/2019] [Revised: 01/08/2020] [Accepted: 02/04/2020] [Indexed: 11/14/2022] Open
Abstract
Transmission electron microscopy (TEM) and scanning transmission electron microscopy (STEM) enable the visualization of three-dimensional (3D) microstructures ranging from atomic to micrometer scales using 3D reconstruction techniques based on computed tomography algorithms. This 3D microscopy method is called electron tomography (ET) and has been utilized in the fields of materials science and engineering for more than two decades. Although atomic resolution is one of the current topics in ET research, the development and deployment of intermediate-resolution (non-atomic-resolution) ET imaging methods have garnered considerable attention from researchers. This research trend is probably not irrelevant due to the fact that the spatial resolution and functionality of 3D imaging methods of scanning electron microscopy (SEM) and X-ray microscopy have come to overlap with those of ET. In other words, there may be multiple ways to carry out 3D visualization using different microscopy methods for nanometer-scale objects in materials. From the above standpoint, this review paper aims to (i) describe the current status and issues of intermediate-resolution ET with regard to enhancing the effectiveness of TEM/STEM imaging and (ii) discuss promising applications of state-of-the-art intermediate-resolution ET for materials research with a particular focus on diffraction contrast ET for crystalline microstructures (superlattice domains and dislocations) including a demonstration of in situ dislocation tomography.
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Affiliation(s)
- Satoshi Hata
- Department of Advanced Materials Science, Kyushu University, Fukuoka 816-8580, Japan
- The Ultramicroscopy Research Center, Kyushu University, Fukuoka 819-0395, Japan
| | - Hiromitsu Furukawa
- TEMography Division, System in Frontier Inc., Tachikawa-shi, Tokyo 190-0012, Japan
| | - Takashi Gondo
- Research Laboratory, Mel-Build Corporation, Fukuoka 819-0025, Japan
| | - Daisuke Hirakami
- Steel Research Laboratories, Nippon Steel Corporation, Chiba 293-8511, Japan
| | - Noritaka Horii
- TEMography Division, System in Frontier Inc., Tachikawa-shi, Tokyo 190-0012, Japan
| | - Ken-Ichi Ikeda
- Division of Materials Science and Engineering, Faculty of Engineering, Hokkaido University, Hokkaido 060-8628, Japan
| | - Katsumi Kawamoto
- TEMography Division, System in Frontier Inc., Tachikawa-shi, Tokyo 190-0012, Japan
| | - Kosuke Kimura
- Morphological Research Laboratory, Toray Research Center, Inc., Shiga 520-8567, Japan
| | - Syo Matsumura
- The Ultramicroscopy Research Center, Kyushu University, Fukuoka 819-0395, Japan
- Department of Applied Quantum Physics and Nuclear Engineering, Kyushu University, Fukuoka 819-0395, Japan
| | - Masatoshi Mitsuhara
- Department of Advanced Materials Science, Kyushu University, Fukuoka 816-8580, Japan
| | - Hiroya Miyazaki
- Research Laboratory, Mel-Build Corporation, Fukuoka 819-0025, Japan
| | - Shinsuke Miyazaki
- Research Laboratory, Mel-Build Corporation, Fukuoka 819-0025, Japan
- Analytical Instruments, Materials and Structural Analysis, Thermo Fisher Scientific, Shinagawa-ku, Tokyo 140-0002, Japan
| | - Mitsu Mitsuhiro Murayama
- Department of Materials Science and Engineering, Virginia Tech, Blacksburg, VA 24061, USA
- Energy and Environmental Directorate, Pacific Northwest National Laboratory, WA 99352, USA
- Institute for Materials Chemistry and Engineering, Kyushu University, Fukuoka 816-8580, Japan
| | - Hideharu Nakashima
- Department of Advanced Materials Science, Kyushu University, Fukuoka 816-8580, Japan
| | - Hikaru Saito
- Department of Advanced Materials Science, Kyushu University, Fukuoka 816-8580, Japan
| | - Masashi Sakamoto
- Steel Research Laboratories, Nippon Steel Corporation, Chiba 293-8511, Japan
| | - Shigeto Yamasaki
- Department of Advanced Materials Science, Kyushu University, Fukuoka 816-8580, Japan
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