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Schlueter K, Nordlund K, Hobler G, Balden M, Granberg F, Flinck O, da Silva TF, Neu R. Absence of a Crystal Direction Regime in which Sputtering Corresponds to Amorphous Material. PHYSICAL REVIEW LETTERS 2020; 125:225502. [PMID: 33315424 DOI: 10.1103/physrevlett.125.225502] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/24/2020] [Accepted: 10/07/2020] [Indexed: 06/12/2023]
Abstract
Erosion of material by energetic ions, i.e., sputtering, is widely used in industry and research. Using experiments and simulations that, independently of each other, obtain the sputter yield of thousands of individual grains, we demonstrate here that the sputter yield for heavy keV ions on metals changes as a continuous function of the crystal direction. Moreover, we show that polycrystalline metals with randomly oriented grains do not sputter with the same yield as the amorphous material. The key reason for this is attributed to linear collision sequences rather than channeling.
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Affiliation(s)
- K Schlueter
- Max-Planck-Institut für Plasmaphysik, Boltzmannstrasse 2, D-85748 Garching, Germany and Fakultät für Maschinenwesen, Technische Universität München, D-85748 Garching, Germany
| | - K Nordlund
- Department of Physics, University of Helsinki, P.O. Box 43, FIN-00014 Helsinki, Finland
| | - G Hobler
- Institute of Solid-State Electronics, TU Wien, Gußhausstraße 25-25a, A-1040 Wien, Austria
| | - M Balden
- Max-Planck-Institut für Plasmaphysik, Boltzmannstrasse 2, D-85748 Garching, Germany
| | - F Granberg
- Department of Physics, University of Helsinki, P.O. Box 43, FIN-00014 Helsinki, Finland
| | - O Flinck
- Department of Physics, University of Helsinki, P.O. Box 43, FIN-00014 Helsinki, Finland
| | - T F da Silva
- Physics Institute of University of São Paulo, Rua do Matão 1371, 05508-090 São Paulo, Brazil
| | - R Neu
- Max-Planck-Institut für Plasmaphysik, Boltzmannstrasse 2, D-85748 Garching, Germany and Fakultät für Maschinenwesen, Technische Universität München, D-85748 Garching, Germany
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Koponen I, Hautala M, Sievänen O. Simulations of submicrometer-scale roughening on ion-bombarded solid surfaces. PHYSICAL REVIEW. B, CONDENSED MATTER 1996; 54:13502-13505. [PMID: 9985258 DOI: 10.1103/physrevb.54.13502] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Peinador JA, Abril I, Jiménez-Rodrguez JJ, Gras-Marti A. Collisional atomic mixing in polyatomic targets. PHYSICAL REVIEW. B, CONDENSED MATTER 1991; 44:2061-2070. [PMID: 9999755 DOI: 10.1103/physrevb.44.2061] [Citation(s) in RCA: 14] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Likonen J, Hautala M. Computer simulations on collision-sequence mechanisms: Bombardment of single-crystalline Cu(100) by Ar ions. PHYSICAL REVIEW. B, CONDENSED MATTER 1990; 42:3838-3852. [PMID: 9995905 DOI: 10.1103/physrevb.42.3838] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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Likonen J. Computer simulations on sputtering mechanisms: Bombardment of single-crystalline Cu(100) by Ar ions. PHYSICAL REVIEW. B, CONDENSED MATTER 1990; 42:3853-3865. [PMID: 9995906 DOI: 10.1103/physrevb.42.3853] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 04/12/2023]
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