Effect of transport of growing nanoparticles on capacitively coupled rf discharge dynamics

Time-Resolved Analysis of the Electron Temperature in RF Magnetron Discharges with a Pulsed Gas Injection

Pulsed gas injection in a plasma can affect many fundamentals, including electron heating and losses. The case of an asymmetric RF magnetron plasma with a pulsed argon injection is analyzed by optical emission spectroscopy of argon 2p-to-1s transitions coupled with collisional-radiative modeling. For a fully detailed population model of argon 2p levels accounting for direct and stepwise electron-impact excitation in optically thick conditions, a rapid decrease in the electron temperature, Te, is observed during each gas injection with the sudden pressure rise. The opposite trend, with unrealistic Te values before and after each pulse, is observed for analysis based on simple corona models, thus emphasizing the importance of stepwise excitation processes and radiation trapping. Time-resolved electron temperature variations are directly linked to the operating parameters of the pulsed gas injection, in particular the injection frequency. Based on the complete set of data, it is shown that the instantaneous electron temperature monotonously decreases with increasing pressure, with values consistent with those expected for plasmas in which charged species are produced by electron-impact ionization of ground state argon atoms and lost by diffusion and recombination on plasma reactor walls.

Dust-void formation in a dc glow discharge

Experimental investigations of dusty plasma parameters of a dc glow discharge were performed in a vertically oriented discharge tube. Under certain conditions, dust-free regions (voids) were formed in the center of the dust particle clouds that levitated in the strong electric field of a stratified positive column. A model for radial distribution of dusty plasma parameters of a dc glow discharge in inert gases was developed. The behavior of void formation was investigated for different discharge conditions (type of gas, discharge pressure, and discharge current) and dust particle parameters (particle radii and particle total number). It was shown that it is the ion drag force radial component that leads to the formation of voids. Both experimental and calculated results show that the higher the discharge current the wider dust-free region (void). The calculations also show that more pronounced voids are formed for dust particles with larger radii and under lower gas pressures.

Discharging of dust particles in the afterglow of plasma with large dust density

The discharging of dust particles in the afterglow of plasma with large dust density is studied. We used measured electron and metastable dependencies to calculate the rate describing collection of electrons by dust particles by solving the electron balance equation. This rate is compared with the rate calculated using the orbital motion limited (OML) theory. It is found that the OML theory may not be applied for description of dust charging at large afterglow times, and the energetic electrons generated in metastable-metastable collisions significantly affect charging of dust particles. The time dependence for dust charge is calculated by two different approaches: first, the "standard" approach is used, which assumes that ion and electron fluxes to the dust particles are different in the afterglow. Second, the dust charge is calculated by assuming that desorption of electrons from dust particles is very fast. Both approaches gave similar results for dust charging. In addition, the effects of secondary emission due to ion-dust and metastable-dust collisions on dust discharging are investigated. The main source of dust charging in the late afterglow of plasma with large dust density are the energetic electrons generated in Ar(m) metastable-metastable collisions.

Simulating the dynamics of complex plasmas

Complex plasmas are low-temperature plasmas that contain micrometer-size particles in addition to the neutral gas particles and the ions and electrons that make up the plasma. The microparticles interact strongly and display a wealth of collective effects. Here we report on linked numerical simulations that reproduce many of the experimental results of complex plasmas. We model a capacitively coupled plasma with a fluid code written for the commercial package comsol. The output of this model is used to calculate forces on microparticles. The microparticles are modeled using the molecular dynamics package lammps, which we extended to include the forces from the plasma. Using this method, we are able to reproduce void formation, the separation of particles of different sizes into layers, lane formation, vortex formation, and other effects.

Dust particle radial confinement in a dc glow discharge

A self-consistent nonlocal model of the positive column of a dc glow discharge with dust particles is presented. Radial distributions of plasma parameters and the dust component in an axially homogeneous glow discharge are considered. The model is based on the solution of a nonlocal Boltzmann equation for the electron energy distribution function, drift-diffusion equations for ions, and the Poisson equation for a self-consistent electric field. The radial distribution of dust particle density in a dust cloud was fixed as a given steplike function or was chosen according to an equilibrium Boltzmann distribution. The balance of electron and ion production in argon ionization by an electron impact and their losses on the dust particle surface and on the discharge tube walls is taken into account. The interrelation of discharge plasma and the dust cloud is studied in a self-consistent way, and the radial distributions of the discharge plasma and dust particle parameters are obtained. It is shown that the influence of the dust cloud on the discharge plasma has a nonlocal behavior, e.g., density and charge distributions in the dust cloud substantially depend on the plasma parameters outside the dust cloud. As a result of a self-consistent evolution of plasma parameters to equilibrium steady-state conditions, ionization and recombination rates become equal to each other, electron and ion radial fluxes become equal to zero, and the radial component of electric field is expelled from the dust cloud.

Influence of dust-particle concentration on gas-discharge plasma

A self-consistent kinetic model of a low-pressure dc glow discharge with dust particles based on Boltzmann equation for the electron energy distribution function is presented. The ions and electrons production in ionizing processes as well as their recombination on the dust-particle surface and on the discharge tube wall were taken into account. The influence of dust-particle concentration N(d) on gas discharge and dust particles parameters was investigated. It is shown that the increase of N(d) leads to the increase of an averaged electric field and ion density, and to the decrease of a dust-particle charge and electron density in the dusty cloud. The results were obtained in a wide region of different discharge and dusty plasma parameters: dust particles density 10(2)-10(8) cm(-3), discharge current density 10(-1)-10(1) mA/cm(2), and dust particles radius 1, 2, and 5 microm. The scaling laws for dust-particle surface potential and electric filed dependencies on dust-particle density, particle radius and discharge currents were revealed. It is shown that the absorption of electrons and ions on the dust particles surface does not lead to the electron energy distribution function depletion due to a self-consistent adjustment of dust particles and discharge parameters.