Shot-Noise-Limited Nanomechanical Detection and Radiation Pressure Backaction from an Electron Beam

Deep learning in electron microscopy

Deep learning is transforming most areas of science and technology, including electron microscopy. This review paper offers a practical perspective aimed at developers with limited familiarity. For context, we review popular applications of deep learning in electron microscopy. Following, we discuss hardware and software needed to get started with deep learning and interface with electron microscopes. We then review neural network components, popular architectures, and their optimization. Finally, we discuss future directions of deep learning in electron microscopy.

Optical Transduction for Vertical Nanowire Resonators

We describe an optical transduction mechanism to measure the flexural mode vibrations of vertically aligned nanowires on a flat substrate with high sensitivity, linearity, and ease of implementation. We demonstrate that the light reflected from the substrate when a laser beam strikes it parallel to the nanowires is modulated proportionally to their vibration, so that measuring such modulation provides a highly efficient resonance readout. This mechanism is applicable to single nanowires or arrays without specific requirements regarding their geometry or array pattern, and no fabrication process besides the nanowire generation is required. We show how to optimize the performance of this mechanism by characterizing the split flexural modes of vertical silicon nanowires in their full dynamic range and up to the fifth mode order. The presented transduction approach is relevant for any application of nanowire resonators, particularly for integrating nanomechanical sensing in functional substrates based on vertical nanowires for biological applications.

Mass Sensing for the Advanced Fabrication of Nanomechanical Resonators

We report on a nanomechanical engineering method to monitor matter growth in real time via e-beam electromechanical coupling. This method relies on the exceptional mass sensing capabilities of nanomechanical resonators. Focused electron beam-induced deposition (FEBID) is employed to selectively grow platinum particles at the free end of singly clamped nanotube cantilevers. The electron beam has two functions: it allows both to grow material on the nanotube and to track in real time the deposited mass by probing the noise-driven mechanical resonance of the nanotube. On the one hand, this detection method is highly effective as it can resolve mass deposition with a resolution in the zeptogram range; on the other hand, this method is simple to use and readily available to a wide range of potential users because it can be operated in existing commercial FEBID systems without making any modification. The presented method allows one to engineer hybrid nanomechanical resonators with precisely tailored functionalities. It also appears as a new tool for studying the growth dynamics of ultrathin nanostructures, opening new opportunities for investigating so far out-of-reach physics of FEBID and related methods.

Force sensing with nanowire cantilevers

Nanometer-scale structures with high aspect ratios such as nanowires and nanotubes combine low mechanical dissipation with high resonance frequencies, making them ideal force transducers and scanning probes in applications requiring the highest sensitivity. Such structures promise record force sensitivities combined with ease of use in scanning probe microscopes. A wide variety of possible material compositions and functionalizations is available, allowing for the sensing of various kinds of forces. In addition, nanowires possess quasi-degenerate mechanical mode doublets, which allow for sensitive vectorial force and mass detection. These developments have driven researchers to use nanowire cantilevers in various force sensing applications, which include imaging of sample surface topography, detection of optomechanical, electrical, and magnetic forces, and magnetic resonance force microscopy. In this review, we discuss the motivation behind using nanowires as force transducers, explain the methods of force sensing with nanowire cantilevers, and give an overview of the experimental progress so far and future prospects of the field.