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Cupertino A, Shin D, Guo L, Steeneken PG, Bessa MA, Norte RA. Centimeter-scale nanomechanical resonators with low dissipation. Nat Commun 2024; 15:4255. [PMID: 38762589 PMCID: PMC11102468 DOI: 10.1038/s41467-024-48183-7] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 08/28/2023] [Accepted: 04/22/2024] [Indexed: 05/20/2024] Open
Abstract
High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the length-to-thickness ratio of these devices, leaving a largely unexplored regime in nano-engineering. We present nanomechanical resonators that extend centimeters in length yet retain nanometer thickness. We explore this expanded design space using an optimization approach which judiciously employs fast millimeter-scale simulations to steer the more computationally intensive centimeter-scale design optimization. By employing delicate nanofabrication techniques, our approach ensures high-yield realization, experimentally confirming room-temperature quality factors close to theoretical predictions. The synergy between nanofabrication, design optimization guided by machine learning, and precision engineering opens a solid-state path to room-temperature quality factors approaching 10 billion at kilohertz mechanical frequencies - comparable to the performance of leading cryogenic resonators and levitated nanospheres, even under significantly less stringent temperature and vacuum conditions.
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Affiliation(s)
- Andrea Cupertino
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Dongil Shin
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
- Department of Materials Science and Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Leo Guo
- Department of Microelectronics, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
| | - Peter G Steeneken
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands
- Department of Quantum Nanoscience, Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands
| | - Miguel A Bessa
- School of Engineering, Brown University, 184 Hope St., Providence, RI, 02912, USA.
| | - Richard A Norte
- Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD, Delft, The Netherlands.
- Department of Quantum Nanoscience, Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ, Delft, The Netherlands.
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Xu M, Shin D, Sberna PM, van der Kolk R, Cupertino A, Bessa MA, Norte RA. High-Strength Amorphous Silicon Carbide for Nanomechanics. ADVANCED MATERIALS (DEERFIELD BEACH, FLA.) 2024; 36:e2306513. [PMID: 37823403 DOI: 10.1002/adma.202306513] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/04/2023] [Revised: 09/25/2023] [Indexed: 10/13/2023]
Abstract
For decades, mechanical resonators with high sensitivity have been realized using thin-film materials under high tensile loads. Although there are remarkable strides in achieving low-dissipation mechanical sensors by utilizing high tensile stress, the performance of even the best strategy is limited by the tensile fracture strength of the resonator materials. In this study, a wafer-scale amorphous thin film is uncovered, which has the highest ultimate tensile strength ever measured for a nanostructured amorphous material. This silicon carbide (SiC) material exhibits an ultimate tensile strength of over 10 GPa, reaching the regime reserved for strong crystalline materials and approaching levels experimentally shown in graphene nanoribbons. Amorphous SiC strings with high aspect ratios are fabricated, with mechanical modes exceeding quality factors 108 at room temperature, the highest value achieves among SiC resonators. These performances are demonstrated faithfully after characterizing the mechanical properties of the thin film using the resonance behaviors of free-standing resonators. This robust thin-film material has significant potential for applications in nanomechanical sensors, solar cells, biological applications, space exploration, and other areas requiring strength and stability in dynamic environments. The findings of this study open up new possibilities for the use of amorphous thin-film materials in high-performance applications.
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Affiliation(s)
- Minxing Xu
- Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, CD, 2628, The Netherlands
- Department of Quantum Nanoscience, Delft University of Technology, Kavli Institute of Nanoscience, Delft, CD, 2628, The Netherlands
| | - Dongil Shin
- Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, CD, 2628, The Netherlands
- Department of Materials Science and Engineering, Delft University of Technology, Delft, CD, 2628, The Netherlands
| | - Paolo M Sberna
- Faculty of Electrical Engineering, Mathematics and Computer Science Delft University of Technology, Else Kooi Laboratory, Delft, CD, 2628, The Netherlands
| | - Roald van der Kolk
- Department of Quantum Nanoscience, Delft University of Technology, Kavli Nanolab, Delft, CD, 2628, The Netherlands
| | - Andrea Cupertino
- Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, CD, 2628, The Netherlands
| | - Miguel A Bessa
- Brown University, School of Engineering, Providence, RI, 02912, USA
| | - Richard A Norte
- Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, CD, 2628, The Netherlands
- Department of Quantum Nanoscience, Delft University of Technology, Kavli Institute of Nanoscience, Delft, CD, 2628, The Netherlands
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