1
|
Khelifi W, Canneson D, Berthe M, Legendre S, Coinon C, Desplanque L, Wallart X, Biadala L, Grandidier B, Capiod P. Ultrahigh vacuum Raman spectroscopy for the preparation of III-V semiconductor surfaces. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2023; 94:123702. [PMID: 38051176 DOI: 10.1063/5.0152031] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/27/2023] [Accepted: 11/09/2023] [Indexed: 12/07/2023]
Abstract
Raman spectroscopy is well-suited for the characterization of semiconductor materials. However, due the weakness of the Raman signal, the studies of thin semiconductor layers in complex environments, such as ultrahigh vacuum, are rather scarce. Here, we have designed a Raman apparatus based on the use of a fiber optic probe, with a lens collecting the backscattered light directly inserted in ultrahigh vacuum. The solution has been tested for the preparation of III-V semiconductor surfaces, which requires the recovery of their atomic reconstruction. The surfaces were either protected with a thin As amorphous layer or covered with a native oxide prior to their treatment. The analysis of the Raman spectra, which was correlated with the study of the surfaces with low temperature scanning tunneling microscopy at the end of the cleaning process, shows the high potential of Raman spectroscopy for monitoring the cleanliness of III-V semiconductor heterostructures in situ.
Collapse
Affiliation(s)
- Wijden Khelifi
- University Lille, CNRS, Centrale Lille, University Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| | - Damien Canneson
- University Lille, CNRS, Centrale Lille, University Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
- HORIBA France SAS, 455 Avenue Eugène Avinée 59120 Loos, Avenue de la Vauve-Passage Jobin Yvon, 91120 Palaiseau, France
| | - Maxime Berthe
- University Lille, CNRS, Centrale Lille, University Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| | - Sébastien Legendre
- HORIBA France SAS, 455 Avenue Eugène Avinée 59120 Loos, Avenue de la Vauve-Passage Jobin Yvon, 91120 Palaiseau, France
| | - Christophe Coinon
- University Lille, CNRS, Centrale Lille, University Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| | - Ludovic Desplanque
- University Lille, CNRS, Centrale Lille, University Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| | - Xavier Wallart
- University Lille, CNRS, Centrale Lille, University Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| | - Louis Biadala
- University Lille, CNRS, Centrale Lille, University Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| | - Bruno Grandidier
- University Lille, CNRS, Centrale Lille, University Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| | - Pierre Capiod
- University Lille, CNRS, Centrale Lille, University Polytechnique Hauts-de-France, Junia-ISEN, UMR 8520 - IEMN, F-59000 Lille, France
| |
Collapse
|
2
|
Hung WH, Chen HC, Chang CC, Hsieh JT, Hwang HL. Adsorption and Decomposition of H2S on InP(100). J Phys Chem B 1999. [DOI: 10.1021/jp984629o] [Citation(s) in RCA: 12] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Affiliation(s)
- Wei-Hsiu Hung
- Synchrotron Radiation Research Center, Science-Based Industrial Park, No.1, R&D Road VI, Hsin-Chu 30077, Taiwan
| | | | | | | | | |
Collapse
|