Process development for dry etching polydimethylsiloxane for neural electrodes

Laser-patterned metallic interconnections for all stretchable organic electrochemical transistors

We describe a process allowing the patterning of fully stretchable organic electrochemical transistors (OECTs). The device consists of an active stretchable area connected with stretchable metallic interconnections. The current literature does not provide a complete, simple and accurate process using the standard thin film microelectronic techniques allowing the creation of such sensors. An innovative patterning process based on the combination of laser ablation and thermal release tape ensures the fabrication of highly stretchable metallic lines - encapsulated in polydimethylsiloxane - from conventional aluminium tape. State-of-the-art stretchability up to 70% combined with ultra-low mOhms resistance is demonstrated. We present a photolithographic process to pattern the organic active area onto stretchable substrate. Finally the formulation of poly(3,4-ethylenedioxythiophene):poly(styrenesulfonate) is tuned to achieve an OECT with a maximum stretchability of 38% while maintaining transconductance up to 0.35 mS and channel current as high as 0.2 mA.