Large-Displacement Vertical Electrostatic Microactuator Dynamics using Duty-Cycled Softening/Stiffening Parametric Resonance

Miniature side-view dual axes confocal endomicroscope for repetitive in vivo imaging

A side-view dual axes confocal endomicroscope is demonstrated that can be inserted repetitively in hollow organs of genetically engineered mice for in vivo real-time imaging in horizontal and vertical planes. Near infrared (NIR) excitation at λex = 785 nm was used. A monolithic 3-axis parametric resonance scan mirror was fabricated using micro-electro-mechanical systems (MEMS) technology to perform post-objective scanning in the distal end of a 4.19 mm diameter instrument. Torsional and serpentine springs were designed to "switch" the mode of imaging between vertical and horizontal planes by tuning the actuation frequency. This system demonstrated real-time in-vivo images in horizontal and vertical planes with 310 µm depth and 1.75 and 7.5 µm lateral and axial resolution. Individual cells and discrete mucosal structures could be identified.

Capacitive Sensing for 2-D Electrostatic MEMS Scanner in a Clinical Endomicroscope

A flexible fiber-coupled confocal laser endomicroscope has been developed using an electrostatic micro-electromechanical system (MEMS) scanner located in at distal optics to collect in vivo images in human subjects. Long transmission lines are required that deliver drive and sense signals with limited bandwidth. Phase shifts have been observed between orthogonal X and Y scanner axes from environmental perturbations, which impede image reconstruction. Image processing algorithms used for correction depend on image content and quality, while scanner calibration in the clinic can be limited by potential patient exposure to lasers. We demonstrate a capacitive sensing method to track the motion of the electrostatically driven two-dimensional MEMS scanner and to extract phase information needed for image reconstruction. This circuit uses an amplitude modulation envelope detection method on shared drive and sensing electrodes of the scanner. Circuit parameters were optimized for performance given high scan frequencies, transmission line effects, and substantial parasitic coupling of drive signal to circuit output. Extraction of phase information further leverages nonlinear dynamics of the MEMS scanner. The sensing circuit was verified by comparing with data from a position sensing detector measurement. The phase estimation showed an accuracy of 2.18° and 0.79° in X and Y axes for motion sensing, respectively. The results indicate that the sensing circuit can be implemented with feedback control for pre-calibration of the scanner in clinical MEMS-based imaging systems.

Optimization design of two-stage amplification micro-drive system without additional motion based on particle swarm optimization algorithm

With the increasing requirements of precision mechanical systems in electronic packaging, ultra-precision machining, biomedicine and other high-tech fields, it is necessary to study a precision two-stage amplification micro-drive system that can safely provide high precision and a large amplification ratio. In view of the disadvantages of the current two-stage amplification and micro-drive system, such as poor security, low motion accuracy and limited amplification ratio, an optimization design of a precise symmetrical two-stage amplification micro-drive system was completed in this study, and its related performance was studied. Based on the guiding principle of the flexure hinge, a two-stage amplification micro-drive mechanism with no parasitic motion or non-motion direction force was designed. In addition, the structure optimization design of the mechanism was completed using the particle swarm optimization algorithm, which increased the amplification ratio of the mechanism from 5 to 18 times. A precise symmetrical two-stage amplification system was designed using a piezoelectric ceramic actuator and two-stage amplification micro-drive mechanism as the micro-driver and actuator, respectively. The driving, strength, and motion performances of the system were subsequently studied. The results showed that the driving linearity of the system was high, the strength satisfied the design requirements, the motion amplification ratio was high and the motion accuracy was high (relative error was 5.31%). The research in this study can promote the optimization of micro-drive systems.

Confocal laser endomicroscope with distal MEMS scanner for real-time histopathology

Confocal laser endomicroscopy is an emerging methodology to perform real time optical biopsy. Fluorescence images with histology-like quality can be collected instantaneously from the epithelium of hollow organs. Currently, scanning is performed at the proximal end of probe-based instruments used routinely in the clinic, and flexibility to control the focus is limited. We demonstrate use of a parametric resonance scanner packaged in the distal end of the endomicroscope to perform high speed lateral deflections. An aperture was etched in the center of the reflector to fold the optical path. This design reduced the dimensions of the instrument to 2.4 mm diameter and 10 mm length, allowing for forward passage through the working channel of a standard medical endoscope. A compact lens assembly provides lateral and axial resolution of 1.1 and 13.6 μm, respectively. A working distance of 0 μm and field-of-view of 250 μm × 250 μm was achieved at frame rates up to 20 Hz. Excitation at 488 nm was delivered to excite fluorescein, an FDA-approved dye, to generate high tissue contrast. The endomicroscope was reprocessed using a clinically-approved sterilization method for 18 cycles without failure. Fluorescence images were collected during routine colonoscopy from normal colonic mucosa, tubular adenomas, hyperplastic polyps, ulcerative colitis, and Crohn's colitis. Individual cells, including colonocytes, goblet cells, and inflammatory cells, could be identified. Mucosal features, such as crypt structures, crypt lumens, and lamina propria, could be distinguished. This instrument has potential to be used as an accessory during routine medical endoscopy.

Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications

The implementation of electrostatic microactuators is one of the most popular technical solutions in the field of micropositioning due to their versatility and variety of possible operation modes and methods. Nevertheless, such uncertainty in existing possibilities creates the problem of choosing suitable methods. This paper provides an effort to classify electrostatic actuators and create a system in the variety of existing devices. Here is overviewed and classified a wide spectrum of electrostatic actuators developed in the last 5 years, including modeling of different designs, and their application in various devices. The paper provides examples of possible implementations, conclusions, and an extensive list of references.

Image processing metrics for phase identification of a multiaxis MEMS scanner used in single pixel imaging

This paper applies image processing metrics to tracking of perturbations in mechanical phase delay in a multi-axis microelectromechanical system (MEMS) scanner. The compact mirror is designed to scan a laser beam in a Lissajous pattern during the collection of endoscopic confocal fluorescence images, but environmental perturbations to the mirror dynamics can lead to image registration errors and blurry images. A binarized, threshold-based blur metric and variance-based sharpness metric are introduced for detecting scanner phase delay. Accuracy of local optima of the metric for identification of phase delay is examined, and relative advantages for processing accuracy and computational complexity are assessed. Image reconstruction is demonstrated using both generic images and sample tissue images, with significant improvement in image quality for tissue imaging. Implications of non-ideal Lissajous scan effects on phase detection and image reconstruction are discussed.