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Qu J, Liu X. Recent Advances on SEM-Based In Situ Multiphysical Characterization of Nanomaterials. SCANNING 2021; 2021:4426254. [PMID: 34211620 PMCID: PMC8208868 DOI: 10.1155/2021/4426254] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 04/07/2021] [Revised: 05/18/2021] [Accepted: 05/22/2021] [Indexed: 06/13/2023]
Abstract
Functional nanomaterials possess exceptional mechanical, electrical, and optical properties which have significantly benefited their diverse applications to a variety of scientific and engineering problems. In order to fully understand their characteristics and further guide their synthesis and device application, the multiphysical properties of these nanomaterials need to be characterized accurately and efficiently. Among various experimental tools for nanomaterial characterization, scanning electron microscopy- (SEM-) based platforms provide merits of high imaging resolution, accuracy and stability, well-controlled testing conditions, and the compatibility with other high-resolution material characterization techniques (e.g., atomic force microscopy), thus, various SEM-enabled techniques have been well developed for characterizing the multiphysical properties of nanomaterials. In this review, we summarize existing SEM-based platforms for nanomaterial multiphysical (mechanical, electrical, and electromechanical) in situ characterization, outline critical experimental challenges for nanomaterial optical characterization in SEM, and discuss potential demands of the SEM-based platforms to characterizing multiphysical properties of the nanomaterials.
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Affiliation(s)
- Juntian Qu
- State Key Laboratory of Tribology & Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China
- Beijing Key Laboratory of Precision/Ultra-Precision Manufacturing Equipments and Control, Tsinghua University, Beijing 100084, China
- Department of Mechanical Engineering, McGill University, Montreal, H3A 0G4, Canada
| | - Xinyu Liu
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, M5S 3G8, Canada
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Ellery A. How to Build a Biological Machine Using Engineering Materials and Methods. Biomimetics (Basel) 2020; 5:biomimetics5030035. [PMID: 32722540 PMCID: PMC7558640 DOI: 10.3390/biomimetics5030035] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/02/2020] [Revised: 07/14/2020] [Accepted: 07/19/2020] [Indexed: 01/09/2023] Open
Abstract
We present work in 3D printing electric motors from basic materials as the key to building a self-replicating machine to colonise the Moon. First, we explore the nature of the biological realm to ascertain its essence, particularly in relation to the origin of life when the inanimate became animate. We take an expansive view of this to ascertain parallels between the biological and the manufactured worlds. Life must have emerged from the available raw material on Earth and, similarly, a self-replicating machine must exploit and leverage the available resources on the Moon. We then examine these lessons to explore the construction of a self-replicating machine using a universal constructor. It is through the universal constructor that the actuator emerges as critical. We propose that 3D printing constitutes an analogue of the biological ribosome and that 3D printing may constitute a universal construction mechanism. Following a description of our progress in 3D printing motors, we suggest that this engineering effort can inform biology, that motors are a key facet of living organisms and illustrate the importance of motors in biology viewed from the perspective of engineering (in the Feynman spirit of “what I cannot create, I cannot understand”).
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Affiliation(s)
- Alex Ellery
- Space Exploration Engineering Group, Department of Mechanical & Aerospace Engineering, Carleton University, Ottawa, ON K1S 5B6, Canada
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Garnica B. SA, Knaust M, Fatikow S. Automatic Micro-Robotic Identification and Electrical Characterization of Graphene. MICROMACHINES 2019; 10:mi10120870. [PMID: 31835719 PMCID: PMC6952813 DOI: 10.3390/mi10120870] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/30/2019] [Revised: 11/27/2019] [Accepted: 12/06/2019] [Indexed: 06/10/2023]
Abstract
Micromechanically exfoliating graphene on S i / S i O 2 substrates is commonplace for graphene researchers, but locating actual graphene flakes on these substrates is a high-effort and tiresome task. The main purpose of this work was to establish a completely automated procedure to identify those graphene flakes with as little human interaction as possible, improving on the limitations of current methods. Furthermore, automatic electrical characterization of the identified flakes was performed. The proposed micro-robotic automation sequence consists of three main steps. To start, a sample surface plane is calculated, based on multiple foci points across the substrate. Secondly, flakes on the substrate are identified in the hue, saturation, and value (HSV) color space, with an implementation to fit the measurement probe, used to avoid undersized samples and adjust the flake orientation. Finally, electrical characterization is performed based on four point probe measurements with the Van der Pauw method. Results of the successfully implemented automation sequence are presented together with flake electrical properties and validation.
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Liu M, Cheng K, Qin X, Wei Z, Borom B, Su W, Chen J, Feng Y, Wang T, Rao J. Interactive Manipulation of Nonconductive Microparticles in Scanning Electron Microscope by a Virtual Nano-hand Strategy. MICROMACHINES 2019; 10:mi10100670. [PMID: 31581655 PMCID: PMC6843255 DOI: 10.3390/mi10100670] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 09/08/2019] [Revised: 09/28/2019] [Accepted: 09/29/2019] [Indexed: 12/04/2022]
Abstract
Micro/nano-manipulation is the fabrication of particular constructs on devices at the micro/nano-scale. Precise manipulation of microparticles is one of the key technological difficulties in manufacturing micro/nano-scale components. Based on scanning electron microscopy and nanomanipulator, this paper adopts a direct push method to operate randomly distributed microparticles into ordered structures. A two-probe interaction strategy is proposed to enable microparticle movements in all directions efficiently and avoid scratching the substrate surface. To overcome the uncertainties in micromanipulation, a virtual nano-hand strategy was also implemented: long-range advance of each microparticle is realized by multiple single-step pushes, whose trajectory is theoretically analyzed. The pushes are well programmed to imitate effects of a more powerful and determined hand. Experimental results show that the theoretical single-step motion trajectory is in line with actual operation, and the proposed strategy can ensure precise operation of the microparticles in all directions and improve reliability and effectiveness of operation.
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Affiliation(s)
- Mei Liu
- Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China; (M.L.); (K.C.); (X.Q.); (Z.W.); (W.S.); (J.C.)
| | - Kai Cheng
- Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China; (M.L.); (K.C.); (X.Q.); (Z.W.); (W.S.); (J.C.)
| | - Xiangzheng Qin
- Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China; (M.L.); (K.C.); (X.Q.); (Z.W.); (W.S.); (J.C.)
| | - Zhenzhong Wei
- Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China; (M.L.); (K.C.); (X.Q.); (Z.W.); (W.S.); (J.C.)
| | - Brandon Borom
- Department of Nutrition Science and Dietetics in the College of Agriculture, Biotechnology, and Natural Resources, University of Nevada, Reno, NV 89557, USA;
| | - Weilin Su
- Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China; (M.L.); (K.C.); (X.Q.); (Z.W.); (W.S.); (J.C.)
| | - Jinbo Chen
- Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China; (M.L.); (K.C.); (X.Q.); (Z.W.); (W.S.); (J.C.)
| | - Yunpeng Feng
- Shenzhen Research Institute, Beijing Institute of Technology, Shenzhen 518000, China;
| | - Tao Wang
- Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China; (M.L.); (K.C.); (X.Q.); (Z.W.); (W.S.); (J.C.)
- Correspondence: (T.W.); (J.R.); Tel.: +86-021-66130621
| | - Jinjun Rao
- Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China; (M.L.); (K.C.); (X.Q.); (Z.W.); (W.S.); (J.C.)
- Correspondence: (T.W.); (J.R.); Tel.: +86-021-66130621
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Jiang C, Lu H, Zhang H, Shen Y, Lu Y. Recent Advances on In Situ SEM Mechanical and Electrical Characterization of Low-Dimensional Nanomaterials. SCANNING 2017; 2017:1985149. [PMID: 29209445 PMCID: PMC5676480 DOI: 10.1155/2017/1985149] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 05/18/2017] [Revised: 08/29/2017] [Accepted: 10/01/2017] [Indexed: 06/07/2023]
Abstract
In the past decades, in situ scanning electron microscopy (SEM) has become a powerful technique for the experimental study of low-dimensional (1D/2D) nanomaterials, since it can provide unprecedented details for individual nanostructures upon mechanical and electrical stimulus and thus uncover the fundamental deformation and failure mechanisms for their device applications. In this overview, we summarized recent developments on in situ SEM-based mechanical and electrical characterization techniques including tensile, compression, bending, and electrical property probing on individual nanostructures, as well as the state-of-the-art electromechanical coupling analysis. In addition, the advantages and disadvantages of in situ SEM tests were also discussed with some possible solutions to address the challenges. Furthermore, critical challenges were also discussed for the development and design of robust in situ SEM characterization platform with higher resolution and wider range of samples. These experimental efforts have offered in-depth understanding on the mechanical and electrical properties of low-dimensional nanomaterial components and given guidelines for their further structural and functional applications.
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Affiliation(s)
- Chenchen Jiang
- Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon, Hong Kong
| | - Haojian Lu
- Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon, Hong Kong
| | - Hongti Zhang
- Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon, Hong Kong
- Centre for Advanced Structural Materials (CASM), Shenzhen Research Institute, City University of Hong Kong, Shenzhen 518057, China
| | - Yajing Shen
- Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon, Hong Kong
- Centre for Robotics and Automation (CRA), Shenzhen Research Institute, City University of Hong Kong, Shenzhen 518057, China
| | - Yang Lu
- Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon, Hong Kong
- Centre for Advanced Structural Materials (CASM), Shenzhen Research Institute, City University of Hong Kong, Shenzhen 518057, China
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Shi C, Luu DK, Yang Q, Liu J, Chen J, Ru C, Xie S, Luo J, Ge J, Sun Y. Recent advances in nanorobotic manipulation inside scanning electron microscopes. MICROSYSTEMS & NANOENGINEERING 2016; 2:16024. [PMID: 31057824 PMCID: PMC6444728 DOI: 10.1038/micronano.2016.24] [Citation(s) in RCA: 33] [Impact Index Per Article: 4.1] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/23/2016] [Revised: 04/02/2016] [Accepted: 04/05/2016] [Indexed: 05/27/2023]
Abstract
A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.
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Affiliation(s)
- Chaoyang Shi
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
| | - Devin K Luu
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
| | - Qinmin Yang
- Department of Control Science and Engineering, Zhejiang University, Hangzhou 310058, China
| | - Jun Liu
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
| | - Jun Chen
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
| | - Changhai Ru
- Robotics and Microsystems Center, Soochow University, Suzhou 215021, China
| | - Shaorong Xie
- School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China
| | - Jun Luo
- School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China
| | - Ji Ge
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
| | - Yu Sun
- Department of Mechanical and Industrial Engineering, University of Toronto, Toronto, ON, Canada M5S 3G8
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