32 Element Piezoelectric Micromachined Ultrasound Transducer (PMUT) Phased Array for Neuromodulation

Thin-Film Piezoelectric Micromachined Ultrasound Transducers in Biomedical Applications: A Review

Thin-film piezoelectric micromachined ultrasound transducers (PMUTs) are an increasingly relevant and well-researched field, and their biomedical importance has been growing as the technology continues to mature. This review article briefly discusses their history in biomedical use, provides a simple explanation of their principles for newer readers, and sheds light on the materials selection for these devices. Primarily, it discusses the significant applications of PMUTs in the biomedical industry and showcases recent progress that has been made in each application. The biomedical applications covered include common historical uses of ultrasound such as ultrasound imaging, ultrasound therapy, and fluid sensing, but additionally new and upcoming applications such as drug delivery, photoacoustic imaging, thermoacoustic imaging, biometrics, and intrabody communication. By including a device comparison chart for different applications, this review aims to assist microelectromechanical systems (MEMS) designers that work with PMUTs by providing a benchmark for recent research works. Furthermore, it puts forth a discussion on the current challenges being faced by PMUTs in the biomedical field, current and likely future research trends, and opportunities for PMUT development areas, as well as sharing the opinions and predictions of the authors on the state of this technology as a whole. The review aims to be a comprehensive introduction to these topics without diving excessively deep into existing literature.

A piezoelectric micromachined ultrasound transducer combined with recording electrodes for acute brain preparations in vitro

BACKGROUND

Ultrasound stimulation is used to noninvasively stimulate the local and deep areas of the brain. However, the detailed cellular mechanisms of neural activation are still unclear because studies on micro-stimulation at the cellular level are lacking.

NEW METHOD

To modulate neural activity at the cellular level, we developed a piezoelectric micromachined ultrasound transducer (PMUT), having circular diaphragms for application on acute brain slice preparations. To monitor neural activities, additionally, we fabricated recording microelectrodes onto the same PMUT device for closed-loop application.

RESULTS

To examine the PMUT-driven cellular responses of a brain slice, intracellular calcium signals in individual cells were measured using two calcium indicators. We successfully observed the intracellular responses triggered by the ultrasound of our novel PMUT. In addition, we performed recordings of local field potentials in a brain slice, demonstrating its usefulness as a simultaneous recording interface.

COMPARISON WITH EXISTING METHOD(S)

Conventional ultrasound stimulators are open-loop systems that risk inducing excessive neural activity because of the absence of neural activity monitoring. In contrast, our PMUT is packaged in a single device with both stimulation and sensor interface for neuromodulation. Further, there are no published reports on in vitro microdevices that can be used for ultrasound stimulation in rodent cortical slices that are several hundred micrometers thick, which maintain the cortical laminar structure and intrinsic neural networks.

CONCLUSIONS

Our findings suggest that this novel PMUT device has the potential for being a powerful tool for in vitro brain slice applications and effective closed loop ultrasound stimulation.

Thin-film PMUTs: a review of over 40 years of research

Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices' design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author's past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.