Design considerations and performance of MEMS acoustoelectric ultrasound detectors

Sensitivity Enhancement of MEMS Diaphragm Hydrophones Using an Integrated Ring MOSFET Transducer

A high-sensitivity MEMS diaphragm hydrophone has been proposed. The designed hydrophone has a higher sensitivity in comparison with its previous counterparts. Readout electronics includes an integrated MOSFET and an external operational amplifier. An integrated ring MOSFET with a piezoelectric gate has been used as the strain to the electrical current transducer. The drain of the MOSFET has been connected to an operational amplifier that converts the transistor current to the voltage and also amplifies it. An analytical relation for the sensitivity has been derived which is in an outstanding agreement with the finite-element analysis. It has been proven that the changes in the channel length and mobility are negligible, and the transistor current is merely under the influence of the pressure-induced charges on the piezoelectric surface which directly produces the vertical electric field. It has been shown that the ring MOSFET transducer can help designing MEMS hydrophones with smaller dimensions while keeping the sensitivity as much as the larger structures.

Complementary Detection of Multiple Electrical Sources in Tissue Using Acoustoelectric Effects

Accurate 3-D mapping of multiple bioelectric sources in nerve fibers with high spatial resolution is challenging for the diagnosis and treatment of a variety of neural abnormalities. Ultrasound current source density imaging exploits the acoustoelectric (AE) effect, an interaction between electrical current and acoustic pressure waves propagating through a conducting material, and has distinct advantages over conventional electrophysiology (i.e., without ultrasound) for mapping electrical current flow in tissue. Ultrasound current source density imaging and two complementary Wheatstone bridge circuits were used to simultaneously detect two separate current flows induced in tissue phantoms. It has been found that the addition and subtraction of AE signals acquired by two circuits are independent components, regardless of whether the two sources are positioned at the same or different depths. In the ultrasound field, the AE signal from the bridge circuits is stronger, with a higher signal-to-noise ratio, than without a bridge circuit. Both experimental and simulated AE images depend on the magnitude and direction of the current, as well as the geometry (shape and thickness) and location of the current sources in the ultrasound field (2.25-MHz transducer). The experimental results are consistent with simulations consisting of multiple current sources. Real-time 3-D ultrasound current source density images of multiple current flows co-registered with convention pulse echo ultrasound potentially facilitate monitoring of neurologic disorders.

Simulation-based validation for four- dimensional multi-channel ultrasound current source density imaging

Ultrasound current source density imaging (UCSDI), which has application to the heart and brain, exploits the acoustoelectric (AE) effect and Ohm's law to detect and map an electrical current distribution. In this study, we describe 4-D UCSDI simulations of a dipole field for comparison and validation with bench-top experiments. The simulations consider the properties of the ultrasound pulse as it passes through a conductive medium, the electric field of the injected dipole, and the lead field of the detectors. In the simulation, the lead fields of detectors and electric field of the dipole were calculated by the finite element (FE) method, and the convolution and correlation in the computation of the detected AE voltage signal were accelerated using 3-D fast Fourier transforms. In the bench-top experiment, an electric dipole was produced in a bath of 0.9% NaCl solution containing two electrodes, which injected an ac pulse (200 Hz, 3 cycles) ranging from 0 to 140 mA. Stimulating and recording electrodes were placed in a custom electrode chamber made on a rapid prototype printer. Each electrode could be positioned anywhere on an x-y grid (5 mm spacing) and individually adjusted in the depth direction for precise control of the geometry of the current sources and detecting electrodes. A 1-MHz ultrasound beam was pulsed and focused through a plastic film to modulate the current distribution inside the saline-filled tank. AE signals were simultaneously detected at a sampling frequency of 15 MHz on multiple recording electrodes. A single recording electrode is sufficient to form volume images of the current flow and electric potentials. The AE potential is sensitive to the distance from the dipole, but is less sensitive to the angle between the detector and the dipole. Multi-channel UCSDI potentially improves 4-D mapping of bioelectric sources in the body at high spatial resolution, which is especially important for diagnosing and guiding treatment of cardiac and neurologic disorders, including arrhythmia and epilepsy.