Design, Modeling, and Experimental Evaluation of a Compact Piezoelectric XY Platform for Large Travel Range

A critical review of piezoelectric ultrasonic transducers for ultrasonic-assisted precision machining

Piezoelectric ultrasonic-assisted precision machining (PUAPM) technology is considered to be an efficient and environmentally friendly machining strategy by virtue of cutting force reduction, ductile cutting promotion, tool wear and machining noise reduction. Piezoelectric ultrasonic transducer (PUT) provides ultrasonic energy for PUAPM system, which is the core component to ensure the normal operation of the system. PUTs for PUAPM devices have emerged endlessly in recent decades and have been successfully applied in many fields, such as MEMS, biomedicine, optoelectronics, aerospace, etc. However, there is no comprehensive classification and analysis of the basic configurations, excitation principles, typical structures, performance analyses and control strategies for PUT. This work gives a critical review of research on PUT in recent years, especially the structural optimization, application expansion and ultrasonic energy stabilization in PUAPM. The influence mechanism of excitation mode, modal type, modal combination, horn structure and ceramic arrangement on the optimization of PUT structure is summarized. The improvement effect and mechanism of PUT vibration dimension, amplitude, frequency and structural characteristics on surface roughness, surface texture and cutting force are discussed. In addition, the causes of PUT amplitude fluctuation, and the influence of sensing and control methods on PUT amplitude regulation and system integration are analyzed. This review will help in understanding the current development and diversified applications of PUT and will promote the application of ultrasonic technology in more fields.

Design and Analysis of XY Large Travel Micro Stage Based on Secondary Symmetric Lever Amplification

This study presents a newly developed piezoelectric drive mechanism for the purpose of designing, analyzing, and testing a micro-positioning platform driven by piezoelectric actuators. The platform incorporates a piezoelectric ceramic actuator and a flexible hinge drive and features a symmetrical two-stage lever (STSL) amplification mechanism and a parallelogram output structure. The implementation of this design has led to notable enhancements in the dynamic properties of the platform, thereby eliminating the undesired parasitic displacement of the mechanism. An analytical model describing the fully elastic deformation of the platform is established, which is further verified by finite element simulation. Finally, the static and dynamic performances of the platform are comprehensively evaluated through experiments. A closed-loop control strategy is adopted to eliminate the nonlinear hysteresis phenomenon of the piezoceramic actuator (PEA). The experimental results show that the piezoelectric micro-actuator platform has a motion range of 97.84 μm × 98.03 μm; the output coupling displacement error is less than 1%; the resolutions of the two axes are 8.1 nm and 8 nm, respectively; and the x-axis and y-axis trajectory tracking errors are both 0.6%. The piezoelectric micromotion platform has good dynamic properties, precision, and stability. The design has a wide application potential in the field of micro-positioning.

Fast and Precise Control for the Vibration Amplitude of an Ultrasonic Transducer Based on Fuzzy PID Control

This work presents a novel constant frequency ultrasonicamplitude control (CFUAC) method based on fuzzy proportional-integral-derivative (FPID) and amplitude direct feedback. The frequency shift and amplitude nonlinearity of the piezoelectric transducer (PT) are measured to determine the optimal constant control frequency of 19.2 kHz. The FPID controller is designed to adapt to the nonlinear changes in different target amplitudes and loads. A direct PT amplitude feedback method is used to improve the signal's anti-interference ability and accuracy. The 5% settling time and steady-state error of FPID can reach 92.22 ms and [Formula: see text] at the step response under 24 [Formula: see text]. The 5% settling time and steady-state error of FPID are less than 131.44 ms and [Formula: see text] at 10 [Formula: see text] under 150 N. The results confirmthat fast and precise control of the vibration amplitude of an ultrasonic transducer can be realized by the proposed method. The new CFUAC method lays a foundation for revealing the ultrasonic welding and metal processing (UWMP) mechanism and helps to expand the application of ultrasonic vibration in the fields of precision machining and high dynamic ultrasonicmedical equipment.

Design of a New XY Flexure Micropositioning Stage With a Large Hollow Platform

This paper presents the design of a new flexure-based xy micropositioning stage with a large hollow platform, which is suitable for practical use with a microscope. The designed mechanism has a parallel-kinematic structure and is actuated by two voice coil motors. By employing multistage compound parallelogram flexures, the stage is designed as a four-layer structure, which produces a motion output platform with a large hollow space and large range of motion. Analytical modeling was carried out for parametric design of the stage. Evaluation results show that the designed xy stage exhibits a large safety factor and high natural frequency. Moreover, the large hollow platform is well-suited for practical applications with a microscope.