Colaux JL, Jeynes C, Heasman KC, Gwilliam RM. Certified ion implantation fluence by high accuracy RBS.
Analyst 2015;
140:3251-61. [DOI:
10.1039/c4an02316a]
[Citation(s) in RCA: 16] [Impact Index Per Article: 1.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
1% Implanter Performance: RBS/measured fluence ratio for 16 implants (1015 As cm−2) over 2 years.
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