Micropore and nanopore fabrication in hollow antiresonant reflecting optical waveguides

Locally Structured On-Chip Optofluidic Hollow-Core Light Cages for Single Nanoparticle Tracking

Nanoparticle tracking analysis (NTA) is a widely used methodology to investigate nanoscale systems at the single species level. Here, we introduce the locally structured on-chip optofluidic hollow-core light cage, as a novel platform for waveguide-assisted NTA. This hollow waveguide guides light by the antiresonant effect in a sparse array of dielectric strands and includes a local modification to realize aberration-free tracking of individual nano-objects, defining a novel on-chip solution with properties specifically tailored for NTA. The key features of our system are (i) well-controlled nano-object illumination through the waveguide mode, (ii) diffraction-limited and aberration-free imaging at the observation site, and (iii) a high level of integration, achieved by on-chip interfacing to fibers. The present study covers all aspects relevant for NTA including design, simulation, implementation via 3D nanoprinting, and optical characterization. The capabilities of the approach to precisely characterize practically relevant nanosystems have been demonstrated by measuring the solvency-induced collapse of a nanoparticle system which includes polymer brush-based shells that react to changes in the liquid environment. Our study unlocks the advantages of the light cage approach in the context of NTA, suggesting its application in various areas such as bioanalytics, life science, environmental science, or nanoscale material science in general.

Menezes L, Schmidt MA, Maier SA. 3D-Nanoprinted Antiresonant Hollow-Core Microgap Waveguide: An on-Chip Platform for Integrated Photonic Devices and Sensors

Due to their unique capabilities, hollow-core waveguides are playing an increasingly important role, especially in meeting the growing demand for integrated and low-cost photonic devices and sensors. Here, we present the antiresonant hollow-core microgap waveguide as a platform for the on-chip investigation of light-gas interaction over centimeter-long distances. The design consists of hollow-core segments separated by gaps that allow external access to the core region, while samples with lengths up to 5 cm were realized on silicon chips through 3D-nanoprinting using two-photon absorption based direct laser writing. The agreement of mathematical models, numerical simulations and experiments illustrates the importance of the antiresonance effect in that context. Our study shows the modal loss, the effect of gap size and the spectral tuning potential, with highlights including extremely broadband transmission windows (>200 nm), very high contrast resonance (>60 dB), exceptionally high structural openness factor (18%) and spectral control by nanoprinting (control over dimensions with step sizes (i.e., increments) of 60 nm). The application potential was demonstrated in the context of laser scanning absorption spectroscopy of ammonia, showing diffusion speeds comparable to bulk diffusion and a low detection limit. Due to these unique properties, application of this platform can be anticipated in a variety of spectroscopy-related fields, including bioanalytics, environmental sciences, and life sciences.

Recent advances in integrated solid-state nanopore sensors

The advent of single-molecule probing techniques has revolutionized the biomedical and life science fields and has spurred the development of a new class of labs-on-chip based on powerful biosensors. Nanopores represent one of the most recent and most promising single molecule sensing paradigms that is seeing increased chip-scale integration for improved convenience and performance. Due to their physical structure, nanopores are highly sensitive, require low sample volume, and offer label-free, amplification-free, high-throughput real-time detection and identification of biomolecules. Over the last 25 years, nanopores have been extensively employed to detect a variety of biomolecules with a growing range of applicatons ranging from nucleic acid sequencing to ultrasensitive diagnostics to single-molecule biophysics. Nanopores, in particular those in solid-state membranes, also have the potential for integration with other technologies such as optics, plasmonics, microfluidics, and optofluidics to perform more complex tasks for an ever-expanding demand. A number of breakthrough results using integrated nanopore platforms have already been reported, and more can be expected as nanopores remain the focus of innovative research and are finding their way into commercial instruments. This review provides an overview of different aspects and challenges of nanopore technology with a focus on chip-scale integration of solid-state nanopores for biosensing and bioanalytical applications.

On demand delivery and analysis of single molecules on a programmable nanopore-optofluidic device

Nanopore-based single nanoparticle detection has recently emerged as a vibrant research field with numerous high-impact applications. Here, we introduce a programmable optofluidic chip for nanopore-based particle analysis: feedback-controlled selective delivery of a desired number of biomolecules and integration of optical detection techniques on nanopore-selected particles. We demonstrate the feedback-controlled introduction of individual biomolecules, including 70S ribosomes, DNAs and proteins into a fluidic channel where the voltage across the nanopore is turned off after a user-defined number of single molecular insertions. Delivery rates of hundreds/min with programmable off-times of the pore are demonstrated using individual 70S ribosomes. We then use real-time analysis of the translocation signal for selective voltage gating of specific particles from a mixture, enabling selection of DNAs from a DNA-ribosome mixture. Furthermore, we report optical detection of nanopore-selected DNA molecules. These capabilities point the way towards a powerful research tool for high-throughput single-molecule analysis on a chip.

Optofluidic devices with integrated solid-state nanopores

This review (with 90 refs.) covers the state of the art in optofluidic devices with integrated solid-state nanopores for use in detection and sensing. Following an introduction into principles of optofluidics and solid-state nanopore technology, we discuss features of solid-state nanopore based assays using optofluidics. This includes the incorporation of solid-state nanopores into optofluidic platforms based on liquid-core anti-resonant reflecting optical waveguides (ARROWs), methods for their fabrication, aspects of single particle detection and particle manipulation. We then describe the new functionalities provided by solid-state nanopores integrated into optofluidic chips, in particular acting as smart gates for correlated electro-optical detection and discrimination of nanoparticles. This enables the identification of viruses and λ-DNA, particle trajectory simulations, enhancing sensitivity by tuning the shape of nanopores. The review concludes with a summary and an outlook.

Electro-optical detection of single λ-DNA

Single λ-DNA molecules are detected on a nanopore-gated optofluidic chip electrically and optically. Statistical variations in the single particle trajectories are used to predict the intensity distribution of the fluorescence signals.

Effect of fabrication-dependent shape and composition of solid-state nanopores on single nanoparticle detection

Solid-state nanopores can be fabricated in a variety of ways and form the basis for label-free sensing of single nanoparticles: as individual nanoparticles traverse the nanopore, they alter the ionic current across it in a characteristic way. Typically, nanopores are described by the diameter of their limiting aperture, and less attention has been paid to other, fabrication-dependent parameters. Here, we report a comprehensive analysis of the properties and sensing performance of three types of nanopore with identical 50 nm aperture, but fabricated using three different techniques: direct ion beam milling, ion beam sculpting, and electron beam sculpting. The nanopores differ substantially in physical shape and chemical composition as identified by ion-beam assisted cross-sectioning and energy dispersive X-ray spectroscopy. Concomitant differences in electrical sensing of single 30 nm beads, such as variations in blockade depth, duration, and electric field dependence, are observed and modeled using hydrodynamic simulations. The excellent agreement between experiment and physical modeling shows that the physical properties (shape) and not the chemical surface composition determine the sensing performance of a solid-state nanopore in the absence of deliberate surface modification. Consequently, nanoparticle sensing performance can be accurately predicted once the full three-dimensional structure of the nanopore is known.

Optofluidic Microsystems for Chemical and Biological Analysis

Optofluidics - the synergistic integration of photonics and microfluidics - has recently emerged as a new analytical field that provides a number of unique characteristics for enhanced sensing performance and simplification of microsystems. In this review, we describe various optofluidic architectures developed in the past five years, emphasize the mechanisms by which optofluidics enhances bio/chemical analysis capabilities, including sensing and the precise control of biological micro/nanoparticles, and envision new research directions to which optofluidics leads.