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Number Cited by Other Article(s)
1
Yakovkin IN. Hydrogen-induced mitigation of O on Ru(101̄0): a density-functional study. Phys Chem Chem Phys 2009;11:5695-702. [DOI: 10.1039/b903099a] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/24/2023]
2
Dean KR, Debeaux G, Wüest A, Garg R. EUV Resist Outgassing: How Much is Too Much? J PHOTOPOLYM SCI TEC 2007. [DOI: 10.2494/photopolymer.20.393] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
3
Reduction of oxide layer on Ru surface by atomic-hydrogen treatment. ACTA ACUST UNITED AC 2005. [DOI: 10.1116/1.2130356] [Citation(s) in RCA: 39] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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