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Sharma S, Mishra UK, Yadav S, Dubey PK. Improved ultrasonic interferometer technique for propagation velocity and attenuation measurement in liquids. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2019; 90:045107. [PMID: 31043022 DOI: 10.1063/1.5088762] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/14/2019] [Accepted: 03/07/2019] [Indexed: 06/09/2023]
Abstract
Propagation velocity and attenuation are the two basic parameters used for the ultrasonic investigations of liquids. An ultrasonic interferometer is a widely used tool as a cost effective solution for propagation velocity measurement. The ultrasonic attenuation measurements are not possible using the existing interferometers commercially available in the market. Ultrasonic attenuation can be measured using the pulse echo method, which is relatively complex and expensive. Generally, in interferometers, a radio frequency voltage of more than 100 V is used to excite the piezoelectric transducer. In this article, an improved design of the ultrasonic interferometer with low (5 V) rf voltage excitation is discussed. The proposed design has several advantages over existing systems. The low voltage excitation reduces heating of the sample under study. Detection of the received signal is done directly at the transducer. The critical effects of a coaxial cable in rf detection are minimized by dc detection at the transducer node. The impedance response of the transducer is used for the detection of nodes and antinodes for attenuation and velocity measurements. The use of an instrumentation amplifier enables one to amplify the extremely small voltage changes across the transducer due to interference. The developed method has the capability to measure attenuation due to high receiver sensitivity. The technique has been validated for the propagation velocity and attenuation measurement in standard samples of water and other liquids. The results thus obtained have been compared with the literature and the conventional pulse echo technique which shows close agreement.
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Affiliation(s)
- Sahil Sharma
- Pressure, Vacuum and Ultrasonic Metrology, Division of Physico-Mechanical Metrology, CSIR-National Physical Laboratory, Dr. K. S. Krishnan Marg, New Delhi 110012, India
| | - Ujjwal K Mishra
- Pressure, Vacuum and Ultrasonic Metrology, Division of Physico-Mechanical Metrology, CSIR-National Physical Laboratory, Dr. K. S. Krishnan Marg, New Delhi 110012, India
| | - Sanjay Yadav
- Pressure, Vacuum and Ultrasonic Metrology, Division of Physico-Mechanical Metrology, CSIR-National Physical Laboratory, Dr. K. S. Krishnan Marg, New Delhi 110012, India
| | - P K Dubey
- Pressure, Vacuum and Ultrasonic Metrology, Division of Physico-Mechanical Metrology, CSIR-National Physical Laboratory, Dr. K. S. Krishnan Marg, New Delhi 110012, India
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Haldren HA, Perey DF, Yost WT, Cramer KE, Gupta MC. A digital, constant-frequency pulsed phase-locked-loop instrument for real-time, absolute ultrasonic phase measurements. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2018; 89:054902. [PMID: 29864851 PMCID: PMC6639803 DOI: 10.1063/1.5022989] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/08/2023]
Abstract
A digitally controlled instrument for conducting single-frequency and swept-frequency ultrasonic phase measurements has been developed based on a constant-frequency pulsed phase-locked-loop (CFPPLL) design. This instrument uses a pair of direct digital synthesizers to generate an ultrasonically transceived tone-burst and an internal reference wave for phase comparison. Real-time, constant-frequency phase tracking in an interrogated specimen is possible with a resolution of 0.000 38 rad (0.022°), and swept-frequency phase measurements can be obtained. Using phase measurements, an absolute thickness in borosilicate glass is presented to show the instrument's efficacy, and these results are compared to conventional ultrasonic pulse-echo time-of-flight (ToF) measurements. The newly developed instrument predicted the thickness with a mean error of -0.04 μm and a standard deviation of error of 1.35 μm. Additionally, the CFPPLL instrument shows a lower measured phase error in the absence of changing temperature and couplant thickness than high-resolution cross-correlation ToF measurements at a similar signal-to-noise ratio. By showing higher accuracy and precision than conventional pulse-echo ToF measurements and lower phase errors than cross-correlation ToF measurements, the new digitally controlled CFPPLL instrument provides high-resolution absolute ultrasonic velocity or path-length measurements in solids or liquids, as well as tracking of material property changes with high sensitivity. The ability to obtain absolute phase measurements allows for many new applications than possible with previous ultrasonic pulsed phase-locked loop instruments. In addition to improved resolution, swept-frequency phase measurements add useful capability in measuring properties of layered structures, such as bonded joints, or materials which exhibit non-linear frequency-dependent behavior, such as dispersive media.
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Affiliation(s)
- H A Haldren
- Charles L. Brown Department of Electrical and Computer Engineering, University of Virginia, Thornton Hall, 351 McCormick Rd., Charlottesville, Virginia 22904, USA
| | - D F Perey
- Nondestructive Evaluation Sciences Branch, NASA Langley Research Center, 4 Langley Blvd., Building 1230, MS 231, Hampton, Virginia 23681, USA
| | - W T Yost
- Nondestructive Evaluation Sciences Branch, NASA Langley Research Center, 4 Langley Blvd., Building 1230, MS 231, Hampton, Virginia 23681, USA
| | - K E Cramer
- Nondestructive Evaluation Sciences Branch, NASA Langley Research Center, 4 Langley Blvd., Building 1230, MS 231, Hampton, Virginia 23681, USA
| | - M C Gupta
- Charles L. Brown Department of Electrical and Computer Engineering, University of Virginia, Thornton Hall, 351 McCormick Rd., Charlottesville, Virginia 22904, USA
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Ohashi Y, Yokota Y, Kudo T, Kurosawa S, Kamada K, Yoshikawa A. Evaluation of Acoustic Properties for Ca 3Nb(Ga 0.75Al 0.25) 3Si 2O 14 Single Crystal Using the Ultrasonic Microspectroscopy System. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2016; 63:1575-1580. [PMID: 27244736 DOI: 10.1109/tuffc.2016.2573051] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Acoustically related physical constants were experimentally determined for Ca3Nb(Ga0.75Al0.25)3Si2O14 (CNGAS) single crystal for the first time. Several plate specimens of the X-, Y -, Z -, 40.24 ° Y -, and 144.98 ° Y -cut were prepared from a CNGAS single crystal ingot grown by Czochralski technique. Elastic constants, piezoelectric constants, and their temperature coefficients for CNGAS were determined from longitudinal wave and shear wave velocities at around room temperature, measured by the ultrasonic microspectroscopy system. Dielectric constants, density, and coefficients of thermal expansion were also measured. It was demonstrated that the determined constants could provide calculation accuracy within ±0.12% in leaky surface acoustic wave velocity. The piezoelectric constants for CNGAS were a 7.2% increase in e11 and a 1.7% decrease in e14 due to Al-substitution effect, compared with those of Ca3NbGa3Si2O14. The appropriate cut angle for thickness-shear mode resonator with zero temperature coefficient of velocity was estimated to be around 150 ° Y -cut from calculations using the determined constants of CNGAS exhibiting electromechanical coupling factor k2 of 3.19% and power flow angle of -1.70°.
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Samet N, Maréchal P, Duflo H. Ultrasonic characterization of a fluid layer using a broadband transducer. ULTRASONICS 2012; 52:427-434. [PMID: 22071268 DOI: 10.1016/j.ultras.2011.10.004] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/10/2010] [Revised: 10/07/2011] [Accepted: 10/08/2011] [Indexed: 05/31/2023]
Abstract
A measurement method is proposed for the ultrasonic characterization of a fluid layer, corresponding to the resin transfer molding (RTM) manufacturing process. The ultrasonic velocity and attenuation of the silicone oil are measured in three samples having different viscosities. The measurement method is established on the basis of the attenuation of ultrasonic waves in fluids. A correction of the beam diffraction is implemented to improve measurement precision. A single element transducer with central frequency of 15 MHz is used. The tested fluids simulate the industrial resin used to manufacture composite materials. When injecting this resin, its viscosity increases until it reaches a critical state of polymerization. In this paper we focus on ultrasonic characterization of three fluids representing three intermediate cases of fluid resin during its injection before reaching the polymerization state.
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Affiliation(s)
- Naïm Samet
- Laboratoire Ondes et Milieux Complexes, LOMC FRE CNRS 3102, FANO FR CNRS 3110, Université du Havre, Place Robert Schuman, 76610 Le Havre, France.
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Saito S. Finite amplitude method for measuring the nonlinearity parameter BA in small-volume samples using focused ultrasound. THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 2010; 127:51-61. [PMID: 20058950 DOI: 10.1121/1.3268602] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
On the basis of finite amplitude and comparative methods, the acoustic nonlinearity parameter BA of a liquid sample of as small as 0.1 ml is measured using an 18.6-MHz focused Gaussian beam. The sample fills the space between a polystyrene plate and a tungsten reflector set about 1 mm apart from each other within the focal region. The sound speed c and attenuation coefficient alpha are determined using the time of flight and the insertion loss of the sound passing through the sample, respectively. The density rho is estimated from the reflection coefficient at the interface between the polystyrene plate and the sample, where the transformation from longitudinal to transverse waves is considered. To compensate for the effect of velocity dispersion on the second harmonic generation, the relative phase of the second harmonic sound is also measured using dual-frequency sound. By summarizing all the linear properties and amplitude data of the second harmonic component in the sound transmitted through the sample, the BA value is finally determined. The measurement is validated through the experiments on nondispersive liquids and weakly dispersive biological samples with known BA values.
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Affiliation(s)
- Shigemi Saito
- School of Marine Science and Technology, Tokai University, 3-20-1 Orido, Shimizu-ku, Shizuoka 424-8610, Japan.
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Bjørndal E, Frøysa KE, Engeseth SA. A novel approach to acoustic liquid density measurements using a buffer rod based measuring cell. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2008; 55:1794-1808. [PMID: 18986922 DOI: 10.1109/tuffc.2008.863] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/27/2023]
Abstract
A new method for measuring the pressure reflection coefficient in a buffer rod configuration is presented, together with experimental results for acoustic measurements of the liquid density, based on the measurement of the liquid's acoustic impedance. The method consists of using 2 buffers enclosing the liquid in a symmetrical arrangement with a transducer fixed to each buffer. One of the transducers is used in a pulse-echo mode while the other transducer operates as a receiver. The echo amplitudes leading to the pressure reflection coefficient as found by this method possess advantages such as reduced attenuation due to a shorter liquid transmission path and reduced interference, as compared with the ABC method. Measurements with distilled water and with special density calibration oil qualities have been performed using both the new method and the ABC method and are shown for the new method to give a density span within +/- 0.15% of the reference values. A comparison of the measured densities based on both a time-domain and a l(2)-norm frequency domain integration signal processing approach is given, along with a recommendation as to how the signal processing should be performed.
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Kushibiki JI, Arakawa M, Ohashi Y, Suzuki K. Evaluation method of TiO2-SiO2 ultra-low-expansion glasses with periodic striae using the LFB ultrasonic material characterization system. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2006; 53:1627-36. [PMID: 16964913 DOI: 10.1109/tuffc.2006.1678191] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/11/2023]
Abstract
Experimental procedures and standard specimens for characterizing and evaluating TiO2-SiO2 ultra-low expansion glasses with periodic striae using the line-focus-beam (LFB) ultrasonic material characterization system are discussed. Two types of specimens were prepared, with specimen surfaces parallel and perpendicular to the striae plane using two different grades of glass ingots. The inhomogeneities of each of the specimens were evaluated at 225 MHz. It was clarified that parallel specimens are useful for accurately measuring velocity variations of leaky surface acoustic waves (LSAWs) excited on a water-loaded specimen surface associated with the striae. Perpendicular specimens are useful for obtaining periodicities in the striae for LSAW propagation perpendicular to the striae plane on a surface and for precisely measuring averaged velocities for LSAW propagation parallel to the striae plane. The standard velocity of Rayleigh-type LSAWs traveling parallel to the striae plane for the perpendicular specimens was numerically calculated using the measured velocities of longitudinal and shear waves and density. Consequently, a reliable standard specimen with an LSAW velocity of 3308.18 +/- 0.35 m/s at 23 degrees C and its temperature coefficient of 0.39 (m/s)/degrees C was obtained for a TiO2-SiO2 glass with a TiO2 concentration of 7.09 wt%. A basis for the striae analysis using this ultrasonic method was established.
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Affiliation(s)
- Jun-ichi Kushibiki
- Department of Electrical Engineering, Tohoku University, Sendai 980-8579, Japan.
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Kushibiki JI, Arakawa M, Ohashi Y, Okabe R. Evaluation of glass materials by using the line-focus-beam ultrasonic-material-characterization system. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2005; 52:1152-60. [PMID: 16212254 DOI: 10.1109/tuffc.2005.1504001] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/04/2023]
Abstract
We developed experimental procedures to evaluate glass materials using the line-focus-beam ultrasonic-material-characterization (LFB-UMC) system. We prepared 28 specimens of a commercial borosilicate glass from random lots, and measured the velocities of leaky-surface acoustic waves (LSAWs) and leaky-surface-skimming compressional waves (LSSCWs), VLSAW and VLSSCW, using V(z) curve measurements at 225 MHz and 23 degrees C. The velocities for VLSAW ranged from 3121.83 m/s to 3149.77 m/s, with a maximum deviation of 27.94 m/s. The velocities for VLSSCW ranged from 5547.7 m/s to 5585.0 m/s, with a maximum deviation of 37.3 m/s. To investigate these observed variations in VLSAW and VLSSCW, we measured the bulk acoustic wave (BAW) properties, viz., longitudinal and shear velocities, then the densities and the chemical compositions of 8 of the 28 specimens. The LFB-UMC measurements confirmed that decreases in VLSAW and VLSSCW occur mainly with the B2O3 dopant concentrations, corresponding to the decrease of shear-wave and longitudinal-wave velocities that are caused by the decrease of the stiffness constants c44 and c11, respectively, rather than with decreased densities. The sensitivities are -6.36 x 10(-2) wt%/(m/s) for VLSAW and -4.87 x 10(-2) wt%/(m/s) for VLSSCW. This demonstrates that the LFB-UMC system is effective for evaluating glass materials and controlling production processes, by analyzing variations in chemical composition through the super-accurate velocity measurements of LSAWs and LSSCWs.
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Affiliation(s)
- Jun-ichi Kushibiki
- Department of Electrical Engineering, Tohoku University, Sendai 980-8579, Japan.
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Akashi N, Kushibiki JI, Dunn F. Frequency dependence of acoustic properties of aqueous glucose solutions in the VHF/UHF range. THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 2004; 116:539-544. [PMID: 15296013 DOI: 10.1121/1.1763955] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
The bioultrasonic spectroscopy system was employed for measurements of velocity and attenuation coefficient of glucose solutions in the VHF/UHF range. The relation between the slope of the square of velocity and the relaxation parameters, and the relation between the frequency exponent on attenuation coefficient and the relaxation parameters are investigated. In order to carry out numerical calculations, a model for a single relaxation process is employed, wherein the attenuation coefficient is expressed as (A/( 1 + (f/falpha)2) + B)f2 where falpha is the attenuation relaxation frequency, and A and B are constants. The numerical calculations show that the slope of the square of the velocity is determined uniquely by the velocity relaxation frequency fv and v(infinity)2 - v(0)2 where v0 is the zero-frequency velocity and v(infinity) is the infinite-frequency velocity, and that the frequency exponent on the attenuation coefficient is determined uniquely by falpha and A/B. For experimental considerations, the velocities and the attenuation coefficients of 5, 15, and 25% concentration aqueous solutions of glucose were measured in the frequency range 20 to 700 MHz. The data for the 5 and 15% aqueous solutions can be explained using the single relaxation model. However, the data for the 25% aqueous solution suggest the existence of multirelaxation processes.
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Affiliation(s)
- Naoyuki Akashi
- Ichinoseki National College of Technology, Ichinoseki 021-8511, Japan.
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Kushibiki JI, Okabe R, Arakawa M. Precise measurements of bulk-wave ultrasonic velocity dispersion and attenuation in solid materials in the VHF range. THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 2003; 113:3171-3178. [PMID: 12822789 DOI: 10.1121/1.1568756] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
A general method was established for precisely measuring velocity dispersion and attenuation in solid specimens with acoustic losses in the very high frequency (VHF) range, using the complex-mode measurement method and the diffraction correction method. Experimental procedures were presented for implementing such a method and demonstrated this measurement method in the frequency range of 50-230 MHz, using borosilicate glass (C-7740) as a dispersive specimen and synthetic silica glass (C-7980) as a nondispersive standard specimen. C-7980 exhibited no velocity dispersion; velocity was constant at 5929.14 +/- 0.03 m/s. C-7740 exhibited velocity dispersion, from 5542.27 m/s at 50 MHz to 5544.47 m/s at 230 MHz with an increase of about 2 m/s in the measured frequency range. When frequency dependence of attenuation was expressed as alpha = alpha(0)f(beta), the results were as follows: alpha0 = 1.07 x 10(-16) s2/m and beta = 2 for C-7980 and alpha0 = 5.16 x 10(-9) s(1.25)/m and beta = 1.25 for C-7740.
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Affiliation(s)
- Jun-ichi Kushibiki
- Department of Electrical Engineering, Tohoku University, Sendai 980-8579, Japan.
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Wang L, Lavrentyev AI, Rokhlin SI. Beam and phase effects in angle-beam-through-transmission method of ultrasonic velocity measurement. THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 2003; 113:1551-1559. [PMID: 12656390 DOI: 10.1121/1.1548151] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/24/2023]
Abstract
The accuracy of a plane wave approximation for phase velocity measurements in isotropic and anisotropic material using the angle-beam-through-transmission method has been investigated numerically and experimentally. In this method the velocity is measured in different propagation directions as a function of incidence angle. The effect of two factors on the measurement accuracy have been discussed: intrinsic phase shift of the transmitted signal through a fluid-solid interface and beam diffraction due to the finite beam size of receiver and transmitter. It is shown that the interface-induced phase shift can introduce an error in time delay measurements of the shear wave after the first critical angle and that this time delay error can be accurately corrected for. Numerical results obtained by a time-domain beam model show that except at the critical angles, the finite width of the transmitter and receiver only affects the amplitudes of the transmitted signals and has almost no effect on the measured zero-cross time delay; therefore the plane wave approximation for obtaining phase velocity from the measured time delay data by this method and the plane wave interface-induced phase correction are fully applicable.
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Affiliation(s)
- L Wang
- Ohio State University, Nondestructive Evaluation Program, Edison Joining Technology Center, Columbus, Ohio 43221, USA
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Ruiz A, Nagy PB. Diffraction correction for precision surface acoustic wave velocity measurements. THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 2002; 112:835-842. [PMID: 12243169 DOI: 10.1121/1.1497368] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
Surface wave dispersion measurements can be used to nondestructively characterize shot-peened, laser shock-peened, burnished, and otherwise surface-treated specimens. In recent years, there have been numerous efforts to separate the contribution of surface roughness from those of near-surface material variations, such as residual stress, texture, and increased dislocation density. As the accuracy of the dispersion measurements was gradually increased using state-of-the-art laser-ultrasonic scanning and sophisticated digital signal processing methods, it was recognized that a perceivable dispersive effect, similar to the one found on rough shot-peened specimens, is exhibited by untreated smooth surfaces as well. This dispersion effect is on the order of 0.1%, that is significantly higher than the experimental error associated with the measurements and comparable to the expected velocity change produced by near-surface compressive residual stresses in metals below their yield point. This paper demonstrates that the cause of this apparent dispersion is the diffraction of the surface acoustic wave (SAW) as it travels over the surface of the specimen. The results suggest that a diffraction correction may be introduced to increase the accuracy of surface wave dispersion measurements. A simple diffraction correction model was developed for surface waves and this correction was subsequently validated by laser-interferometric velocity measurements on aluminum specimens.
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Affiliation(s)
- Alberto Ruiz
- Department of Aerospace Engineering and Engineering Mechanics, University of Cincinnati, Ohio 45221-0700, USA
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Takanaga I, Kushibiki JI. A method of determining acoustical physical constants for piezoelectric materials by line-focus-beam acoustic microscopy. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2002; 49:893-904. [PMID: 12152943 DOI: 10.1109/tuffc.2002.1020159] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
We developed a new method of determining acoustical physical constants (elastic constant, piezoelectric constant, dielectric constant, and density) of piezoelectric materials with high accuracy. This method acquires velocities of leaky surface acoustic waves (LSAWs) excited on the water-loaded specimen surface, measured by line-focus-beam (LFB) acoustic microscopy, and bulk velocities of longitudinal and shear waves, measured with plane-wave transducers replacing the LFB device in the same system, together with the dielectric constants and density measured independently, for a small number of specimens. For LiNbO3 and LiTaO3 crystals, we demonstrated that we could accurately determine the constants by choosing proper propagation directions of LSAWs and bulk waves for three principal X-, Y-, and Z-cut specimens and one rotated Y-cut specimen [(104) plate for LiNbO3 and (012) plate for LiTaOa]. The accuracy is nearly the same as that for the constants determined only from the bulk wave velocities.
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Affiliation(s)
- Izumi Takanaga
- Department of Electrical Engineering, Tohoku University, Sendai, Japan
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Kushibiki JI, Arakawa M, Okabe R. High-accuracy standard specimens for the line-focus-beam ultrasonic material characterization system. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2002; 49:827-835. [PMID: 12075976 DOI: 10.1109/tuffc.2002.1009343] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
We prepared standard specimens for the line-focus-beam ultrasonic material characterization system to obtain absolute values of the propagation characteristics (phase velocity and attenuation) of leaky surface acoustic waves (LSAWs). The characterization system is very useful for evaluating and analyzing specimen surfaces. The calibration accuracy of these acoustic parameters depends on the accuracy of acoustical physical constants (elastic constants, piezoelectric constants, dielectric constants, and density) determined for standard specimens. In this paper, we developed substrates of nonpiezoelectric single crystals (viz., gadolinium gallium garnet [GGG], Si, and Ge) and an isotropic solid (synthetic silica [SiO2] glass) as standard specimens. These specimens can cover the phase velocity range of 2600 to 5100 m/s for Rayleigh-type LSAWs. To determine the elastic constants with high accuracy, we measured velocities by the complex-mode measurement method and corrected diffraction effects. Measurements of bulk acoustic properties (bulk wave velocity and density) were conducted around 23 degrees C, and bulk wave velocities were obtained with an accuracy of within +/-0.004%. We clearly detected differences in acoustic properties by comparing the obtained results with the previously published values; the differences were considered to be due to differences of the specimens used. We also detected differences in acoustic properties among four SiO2 substrates produced by different manufacturers.
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Kushibiki JI, Takanaga I, Nishiyama S. Accurate measurements of the acoustical physical constants of synthetic alpha-quartz for SAW devices. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2002; 49:125-135. [PMID: 11833885 DOI: 10.1109/58.981390] [Citation(s) in RCA: 10] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
Accurate measurements of the acoustical physical constants (elastic constants, piezoelectric constants, dielectric constants, and density) of commercially available and widely used surface acoustic wave (SAW)-grade synthetic a-quartz are reported. The propagation directions and modes of bulk waves optimal for accurately determining the constants were selected through numerical calculations, and three principal X-, Y-, and Z-cut specimens and several rotated Y-cut specimens were prepared from a single crystal ingot to determine the constants and to confirm their accuracy. All of the constants were determined through highly accurate measurements of the longitudinal velocities, shear velocities, dielectric constants, and density. The velocity values measured for the specimens that were not used to determine the constants agreed well with those calculated from the determined constants, within a difference of +/- 0.20 m/s (+/- 0.004%).
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Kushibiki JI, Ono Y, Ohashi Y, Arakawa M. Development of the line-focus-beam ultrasonic material characterization system. IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL 2002; 49:99-113. [PMID: 11833896 DOI: 10.1109/58.981388] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/23/2023]
Abstract
A line-focus-beam ultrasonic material characterization (LFB-UMC) system has been developed to evaluate large diameter crystals and wafers currently used in electronic devices. The system enables highly accurate detection of slight changes in the physical and chemical properties in and among specimens. Material characterization proceeds by measuring the propagation characteristics, viz., phase velocity and attenuation, of Rayleigh-type leaky surface acoustic waves (LSAWs) excited on the water-loaded specimen surface. The measurement accuracy depends mainly upon the translation accuracy of the mechanical stages used in the system and the stability of the temperature environment. New precision mechanical translation stages have been developed, and the mechanical system, including the ultrasonic device and the specimen, has been installed in a temperature-controlled chamber to reduce thermal convection and conduction at the specimen. A method for precisely measuring temperature and longitudinal velocity in the water couplant has been developed, and a measurement procedure for precisely measuring the LSAW velocities has been completed, achieving greater relative accuracy to better than +/- 0.002% at any single chosen point and +/- 0.004% for two-dimensional measurements over a scanning area of a 200-mm diameter silicon single-crystal substrate. The system was developed to address various problems arising in science and industry associated with the development of materials and device fabrication processes.
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