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Gulsaran A, Bastug Azer B, Kocer S, Rahmanian S, Saritas R, Abdel-Rahman EM, Yavuz M. Built-In Packaging for Single Terminal Devices. SENSORS 2022; 22:s22145264. [PMID: 35890942 PMCID: PMC9318481 DOI: 10.3390/s22145264] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 06/09/2022] [Revised: 07/02/2022] [Accepted: 07/12/2022] [Indexed: 12/10/2022]
Abstract
An alternative packaging method, termed built-in packaging, is proposed for single terminal devices, and demonstrated with an actuator application. Built-in packaging removes the requirements of wire bonding, chip carrier, PCB, probe station, interconnection elements, and even wires to drive single terminal devices. Reducing these needs simplifies operation and eliminates possible noise sources. A micro resonator device is fabricated and built-in packaged for demonstration with electrostatic actuation and optical measurement. Identical actuation performances are achieved with the most conventional packaging method, wire bonding. The proposed method offers a compact and cheap packaging for industrial and academic applications.
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Affiliation(s)
- Ahmet Gulsaran
- Mechanical and Mechatronics Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada;
- Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada; (S.K.); (R.S.); (E.M.A.-R.)
- Correspondence: (A.G.); (M.Y.)
| | - Bersu Bastug Azer
- Mechanical and Mechatronics Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada;
- Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada; (S.K.); (R.S.); (E.M.A.-R.)
| | - Samed Kocer
- Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada; (S.K.); (R.S.); (E.M.A.-R.)
- Systems Design Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada;
| | - Sasan Rahmanian
- Systems Design Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada;
| | - Resul Saritas
- Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada; (S.K.); (R.S.); (E.M.A.-R.)
- Systems Design Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada;
| | - Eihab M. Abdel-Rahman
- Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada; (S.K.); (R.S.); (E.M.A.-R.)
- Systems Design Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada;
| | - Mustafa Yavuz
- Mechanical and Mechatronics Engineering Department, University of Waterloo, Waterloo, ON N2L 3G1, Canada;
- Waterloo Institute for Nanotechnology (WIN), University of Waterloo, Waterloo, ON N2L 3G1, Canada; (S.K.); (R.S.); (E.M.A.-R.)
- Correspondence: (A.G.); (M.Y.)
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Friend J, Thompson C, Chitale K, Denis M. Introduction to the special issue on the theory and applications of acoustofluidics. THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA 2021; 150:4558. [PMID: 34972297 DOI: 10.1121/10.0009056] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/24/2021] [Accepted: 11/26/2021] [Indexed: 06/14/2023]
Abstract
Acoustofluidics is a burgeoning field that applies ultrasound to micro-scale to nano-scale fluidic systems. The discovery of the ability to effectively manipulate fluids and particles at small scales has yielded results that are superior to other approaches and has been built into a diverse range of research. Recasting the fundamentals of acoustics from the past to include new phenomena observed in recent years has allowed acoustical systems to impact new areas, such as drug delivery, diagnostics, and enhanced chemical processes. The contributions in this special issue address a diverse range of research topics in acoustofluidics. Topics include acoustic streaming, flows induced by bubbles, manipulation of particles using acoustic radiation forces, fluid and structural interactions, and contributions suggesting a natural limit to the particle velocity, the ability to deliver molecules to human immune T cells, and microdroplet generation via nozzle-based acoustic atomization.
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Affiliation(s)
- James Friend
- Medically Advanced Devices Lab, Center for Medical Devices, Department of Mechanical and Aerospace Engineering, Jacobs School of Engineering and Department of Surgery, School of Medicine, 9500 Gilman Drive MC0411, University of California San Diego, La Jolla, California 92093, USA
| | - Charles Thompson
- Center for Advanced Computation and Telecommunications, Department of Electrical and Computer Engineering, University of Massachusetts Lowell, Lowell, Massachusetts 01854, USA
| | - Kedar Chitale
- Vertex Cell and Gene Therapies, Vertex Pharmaceuticals, 225A Carolina Avenue, Providence, Rhode Island 02905, USA
| | - Max Denis
- Department of Mechanical Engineering, School of Engineering & Applied Sciences, University of the District of Columbia, Washington, D.C. 20008, USA
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