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For: Hong M, Kwo J, Kortan AR, Mannaerts JP, Sergent AM. Epitaxial cubic gadolinium oxide as a dielectric for gallium arsenide passivation. Science 1999;283:1897-900. [PMID: 10082459 DOI: 10.1126/science.283.5409.1897] [Citation(s) in RCA: 375] [Impact Index Per Article: 14.4] [Reference Citation Analysis] [What about the content of this article? (0)] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/02/2022]
Number Cited by Other Article(s)
1
Synthesis and Characterization of Gadolinium-Doped Zirconia as a Potential Electrolyte for Solid Oxide Fuel Cells. ENERGIES 2022. [DOI: 10.3390/en15082826] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
2
Liou SC, Oleshko VP, Kuo WCH, Yang TJ, Shu GJ. Investigation of the excitations of plasmons and surface exciton polaritons in monoclinic gadolinium sesquioxide by electron energy-loss spectroscopy and plasmon spectroscopic imaging. RSC Adv 2022;12:10345-10354. [PMID: 35425011 PMCID: PMC8977844 DOI: 10.1039/d2ra00737a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/03/2022] [Accepted: 03/16/2022] [Indexed: 11/21/2022]  Open
3
Li L, Lu F, Xiong W, Ding Y, Lu Y, Xiao Y, Tong X, Wang Y, Jia S, Wang J, Mendes RG, Rümmeli MH, Yuan S, Zeng M, Fu L. General synthesis of 2D rare-earth oxide single crystals with tailorable facets. Natl Sci Rev 2021;9:nwab153. [PMID: 35591917 PMCID: PMC9113103 DOI: 10.1093/nsr/nwab153] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/21/2021] [Revised: 07/20/2021] [Accepted: 08/05/2021] [Indexed: 01/12/2023]  Open
4
Shahzad K, Mardare CC, Mardare AI, Hassel AW. Mixed oxide growth on combinatorial aluminium–gadolinium alloys — a thermodynamic and first-principles approach. J Solid State Electrochem 2021. [DOI: 10.1007/s10008-021-05012-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
5
Epitaxy from a Periodic Y-O Monolayer: Growth of Single-Crystal Hexagonal YAlO3 Perovskite. NANOMATERIALS 2020;10:nano10081515. [PMID: 32748811 PMCID: PMC7466604 DOI: 10.3390/nano10081515] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/07/2020] [Revised: 07/26/2020] [Accepted: 07/28/2020] [Indexed: 11/24/2022]
6
Cheng CP, Chen WS, Cheng YT, Wan HW, Yang CY, Pi TW, Kwo J, Hong M. Atomic Nature of the Growth Mechanism of Atomic Layer Deposited High-κ Y2O3 on GaAs(001)-4 × 6 Based on in Situ Synchrotron Radiation Photoelectron Spectroscopy. ACS OMEGA 2018;3:2111-2118. [PMID: 31458518 PMCID: PMC6641429 DOI: 10.1021/acsomega.7b01564] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/16/2017] [Accepted: 02/09/2018] [Indexed: 06/10/2023]
7
Lee SM, Yum JH, Yoon S, Larsen ES, Lee WC, Kim SK, Shervin S, Wang W, Ryou JH, Bielawski CW, Oh J. Atomic-Layer Deposition of Single-Crystalline BeO Epitaxially Grown on GaN Substrates. ACS APPLIED MATERIALS & INTERFACES 2017;9:41973-41979. [PMID: 29148718 DOI: 10.1021/acsami.7b13487] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
8
Maidul Haque S, De R, Tripathi S, Mukherjee C, Yadav AK, Bhattacharyya D, Jha SN, Sahoo NK. Effect of oxygen partial pressure in deposition ambient on the properties of RF magnetron sputter deposited Gd2O3 thin films. APPLIED OPTICS 2017;56:6114-6125. [PMID: 29047804 DOI: 10.1364/ao.56.006114] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/21/2017] [Accepted: 06/16/2017] [Indexed: 06/07/2023]
9
Liu H, Cheng X, Valanoor N. Universal Approach for Predicting Crystallography of Heterogeneous Epitaxial Nanocrystals with Multiple Orientation Relationships. ACS APPLIED MATERIALS & INTERFACES 2016;8:34844-34853. [PMID: 27998128 DOI: 10.1021/acsami.6b10701] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
10
Kumar P, Maikap S, Qiu JT, Jana S, Roy A, Singh K, Cheng HM, Chang MT, Mahapatra R, Chiu HC, Yang JR. Detection of pH and Enzyme-Free H2O2 Sensing Mechanism by Using GdO x Membrane in Electrolyte-Insulator-Semiconductor Structure. NANOSCALE RESEARCH LETTERS 2016;11:434. [PMID: 27680740 PMCID: PMC5040652 DOI: 10.1186/s11671-016-1657-5] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/13/2016] [Accepted: 09/22/2016] [Indexed: 06/06/2023]
11
Han Y, Meng Q, Rasulev B, May PS, Berry MT, Kilin DS. Photofragmentation of the Gas-Phase Lanthanum Isopropylcyclopentadienyl Complex: Computational Modeling vs Experiment. J Phys Chem A 2015;119:10838-48. [DOI: 10.1021/acs.jpca.5b07209] [Citation(s) in RCA: 22] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
12
Single-Crystal Y2O3 Epitaxially on GaAs(001) and (111) Using Atomic Layer Deposition. MATERIALS 2015. [PMCID: PMC5455383 DOI: 10.3390/ma8105364] [Citation(s) in RCA: 16] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Indexed: 12/03/2022]
13
Pi TW, Lin YH, Fanchiang YT, Chiang TH, Wei CH, Lin YC, Wertheim GK, Kwo J, Hong M. In-situ atomic layer deposition of tri-methylaluminum and water on pristine single-crystal (In)GaAs surfaces: electronic and electric structures. NANOTECHNOLOGY 2015;26:164001. [PMID: 25824203 DOI: 10.1088/0957-4484/26/16/164001] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
14
Tuominen M, Yasir M, Lång J, Dahl J, Kuzmin M, Mäkelä J, Punkkinen M, Laukkanen P, Kokko K, Schulte K, Punkkinen R, Korpijärvi VM, Polojärvi V, Guina M. Oxidation of the GaAs semiconductor at the Al2O3/GaAs junction. Phys Chem Chem Phys 2015;17:7060-6. [PMID: 25686555 DOI: 10.1039/c4cp05972g] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/28/2022]
15
Islam SM, Sarkar K, Banerji P, Sarkar KJ, Pal B. Leakage current characteristics in MOCVD grown InAs quantum dot embedded GaAs metal-oxide-semiconductor capacitor. RSC Adv 2015. [DOI: 10.1039/c5ra15642d] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/07/2023]  Open
16
Colleoni D, Miceli G, Pasquarello A. Origin of Fermi-level pinning at GaAs surfaces and interfaces. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2014;26:492202. [PMID: 25372411 DOI: 10.1088/0953-8984/26/49/492202] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
17
Chiang TH, Wu SY, Huang TS, Hsu CH, Kwo J, Hong M. Single crystal Gd2O3epitaxially on GaAs(111)A. CrystEngComm 2014. [DOI: 10.1039/c4ce00734d] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
18
Chen J, Hochstatter AM, Kilin D, May PS, Meng Q, Berry MT. Photofragmentation of Gas-Phase Lanthanide Cyclopentadienyl Complexes: Experimental and Time-Dependent Excited-State Molecular Dynamics. Organometallics 2014;33:1574-1586. [PMID: 24910492 PMCID: PMC4045319 DOI: 10.1021/om400953q] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/25/2013] [Indexed: 01/07/2023]
19
Devi A. ‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications. Coord Chem Rev 2013. [DOI: 10.1016/j.ccr.2013.07.025] [Citation(s) in RCA: 110] [Impact Index Per Article: 9.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
20
Hansen PA, Fjellvåg H, Finstad T, Nilsen O. Structural and optical properties of lanthanide oxides grown by atomic layer deposition (Ln = Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, Yb). Dalton Trans 2013;42:10778-85. [PMID: 23774891 DOI: 10.1039/c3dt51270c] [Citation(s) in RCA: 31] [Impact Index Per Article: 2.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
21
Wang X, Dong L, Zhang J, Liu Y, Ye PD, Gordon RG. Heteroepitaxy of La2O3 and La(2-x)Y(x)O3 on GaAs (111)A by atomic layer deposition: achieving low interface trap density. NANO LETTERS 2013;13:594-599. [PMID: 23294262 DOI: 10.1021/nl3041349] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
22
Chang WH, Wu SY, Lee CH, Lai TY, Lee YJ, Chang P, Hsu CH, Huang TS, Kwo JR, Hong M. Phase transformation of molecular beam epitaxy-grown nanometer-thick Gd₂O₃ and Y₂O₃ on GaN. ACS APPLIED MATERIALS & INTERFACES 2013;5:1436-1441. [PMID: 23360590 DOI: 10.1021/am302881y] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
23
Dalapati GK, Chia CK, Tan CC, Tan HR, Chiam SY, Dong JR, Das A, Chattopadhyay S, Mahata C, Maiti CK, Chi DZ. Surface passivation and interface properties of bulk GaAs and epitaxial-GaAs/Ge using atomic layer deposited TiAlO alloy dielectric. ACS APPLIED MATERIALS & INTERFACES 2013;5:949-957. [PMID: 23331503 DOI: 10.1021/am302537b] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
24
Sahu PC, Lonappan D, Shekar NVC. High Pressure Structural Studies on Rare-Earth Sesquioxides. ACTA ACUST UNITED AC 2012. [DOI: 10.1088/1742-6596/377/1/012015] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
25
Chall S, Saha A, Biswas SK, Datta A, Bhattacharya SC. Single step aqueous synthesis of pure rare earth nanoparticles in biocompatible polymer matrices. ACTA ACUST UNITED AC 2012. [DOI: 10.1039/c2jm30971h] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/03/2023]
26
Das T, Bhattacharyya S. Structure and chemistry across interfaces at nanoscale of a Ge quantum well embedded within rare earth oxide layers. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2011;17:759-765. [PMID: 21729358 DOI: 10.1017/s1431927611000559] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
27
Laha A, Bugiel E, Jestremski M, Ranjith R, Fissel A, Osten HJ. Encapsulated solid phase epitaxy of a Ge quantum well embedded in an epitaxial rare earth oxide. NANOTECHNOLOGY 2009;20:475604. [PMID: 19875877 DOI: 10.1088/0957-4484/20/47/475604] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
28
Tang S, Cao Z. Density Functional Characterization of Adsorption and Decomposition of 1-Propanethiol on the Ga-Rich GaAs (001) Surface. J Phys Chem A 2009;113:5685-90. [DOI: 10.1021/jp810435c] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
29
Milanov AP, Fischer RA, Devi A. Synthesis, characterization, and thermal properties of homoleptic rare-earth guanidinates: promising precursors for MOCVD and ALD of rare-earth oxide thin films. Inorg Chem 2009;47:11405-16. [PMID: 18989919 DOI: 10.1021/ic801432b] [Citation(s) in RCA: 51] [Impact Index Per Article: 3.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/18/2023]
30
Losovyj YB, Wooten D, Santana JC, An JM, Belashchenko KD, Lozova N, Petrosky J, Sokolov A, Tang J, Wang W, Arulsamy N, Dowben PA. Comparison of n-type Gd(2)O(3) and Gd-doped HfO(2). JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2009;21:045602. [PMID: 21715816 DOI: 10.1088/0953-8984/21/4/045602] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
31
Characteristics of Gadolinium Oxide Nanocrystal Memory with Optimized Rapid Thermal Annealing. ACTA ACUST UNITED AC 2009. [DOI: 10.1149/1.3109573] [Citation(s) in RCA: 33] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/05/2023]
32
Yang JK, Choi SG, Park HH. Epitaxial growth and band alignment of (GdxLa1−x)2O3 films on n-GaAs (001). Micron 2009;40:114-7. [DOI: 10.1016/j.micron.2008.03.002] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/15/2007] [Revised: 01/07/2008] [Accepted: 03/13/2008] [Indexed: 11/25/2022]
33
In[sub 0.53]Ga[sub 0.47]As n-metal-oxide-semiconductor field effect transistors with atomic layer deposited Al[sub 2]O[sub 3], HfO[sub 2], and LaAlO[sub 3] gate dielectrics. ACTA ACUST UNITED AC 2009. [DOI: 10.1116/1.3125284] [Citation(s) in RCA: 25] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
34
Phase control of magnetron sputtering deposited Gd2O3 thin films as high-κ gate dielectrics. J RARE EARTH 2008. [DOI: 10.1016/s1002-0721(08)60098-8] [Citation(s) in RCA: 18] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/22/2022]
35
Dilawar N, Varandani D, Mehrotra S, Poswal HK, Sharma SM, Bandyopadhyay AK. Anomalous high pressure behaviour in nanosized rare earth sesquioxides. NANOTECHNOLOGY 2008;19:115703. [PMID: 21730563 DOI: 10.1088/0957-4484/19/11/115703] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
36
Heiba ZK, Arda L. X-ray diffraction analysis of powder and thin film of (Gd1-xYx)2O3 prepared by sol-gel process. CRYSTAL RESEARCH AND TECHNOLOGY 2008. [DOI: 10.1002/crat.200710997] [Citation(s) in RCA: 21] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
37
Kukli K, Hatanpää T, Ritala M, Leskelä M. Atomic Layer Deposition of Gadolinium Oxide Films. ACTA ACUST UNITED AC 2007. [DOI: 10.1002/cvde.200706631] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
38
Lu HL, Chen W, Ding SJ, Xu M, Zhang DW, Wang LK. Quantum chemical study of adsorption and dissociation of H2S on the gallium-rich GaAs (001)-4 x 2 surface. J Phys Chem B 2007;110:9529-33. [PMID: 16686499 DOI: 10.1021/jp057267a] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
39
Dezelah CL, Myllymäki P, Päiväsaari J, Arstila K, Niinistö L, Winter CH. The growth of ErxGa2−xO3films by atomic layer deposition from two different precursor systems. ACTA ACUST UNITED AC 2007. [DOI: 10.1039/b616443a] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
40
Song X, Zhang J, Li E, Lu N, Yin F. Preparation and characterization of rare-earth bulks with controllable nanostructures. NANOTECHNOLOGY 2006;17:5584-5589. [PMID: 21727328 DOI: 10.1088/0957-4484/17/22/010] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
41
Jones A, Aspinall H, Chalker P, Potter R, Manning T, Loo Y, O'Kane R, Gaskell J, Smith L. MOCVD and ALD of High-k Dielectric Oxides Using Alkoxide Precursors. ACTA ACUST UNITED AC 2006. [DOI: 10.1002/cvde.200500023] [Citation(s) in RCA: 54] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
42
Characterization of crystalline rare-earth oxide high-K dielectrics grown by molecular beam epitaxy on silicon carbide. ACTA ACUST UNITED AC 2006. [DOI: 10.1116/1.2214702] [Citation(s) in RCA: 25] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
43
Päiväsaari J, Niinistö J, Arstila K, Kukli K, Putkonen M, Niinistö L. High Growth Rate of Erbium Oxide Thin Films in Atomic Layer Deposition from (CpMe)3Er and Water Precursors. ACTA ACUST UNITED AC 2005. [DOI: 10.1002/cvde.200506396] [Citation(s) in RCA: 42] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
44
Potter RJ, Chalker PR, Manning TD, Aspinall HC, Loo YF, Jones AC, Smith LM, Critchlow GW, Schumacher M. Deposition of HfO2, Gd2O3 and PrOx by Liquid Injection ALD Techniques. ACTA ACUST UNITED AC 2005. [DOI: 10.1002/cvde.200406348] [Citation(s) in RCA: 59] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
45
Aspinall H, Gaskell J, Loo Y, Jones A, Chalker P, Potter R, Smith L, Critchlow G. Growth of Neodymium Oxide This Films by Liquid Injection MOCVD Using a New Neodymium Alkoxide Precursor. ACTA ACUST UNITED AC 2004. [DOI: 10.1002/cvde.200306310] [Citation(s) in RCA: 22] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
46
Loo Y, Potter R, Jones A, Aspinall H, Gaskell J, Chalker P, Smith L, Critchlow G. Growth of Gadolinium Oxide This Films by Liquid Injection MOCVD Using a New Gadolinium Alkoxide Precursor. ACTA ACUST UNITED AC 2004. [DOI: 10.1002/cvde.200406313] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
47
Dakhel A. Optical and dielectric properties of gadolinium–indium oxide films prepared on Si (1 0 0) substrate. Chem Phys Lett 2004. [DOI: 10.1016/j.cplett.2004.06.094] [Citation(s) in RCA: 19] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
48
Niinist� L, Nieminen M, P�iv�saari J, Niinist� J, Putkonen M, Nieminen M. Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials. ACTA ACUST UNITED AC 2004. [DOI: 10.1002/pssa.200406798] [Citation(s) in RCA: 291] [Impact Index Per Article: 13.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
49
Jones AC, Aspinall HC, Chalker PR, Potter RJ, Kukli K, Rahtu A, Ritala M, Leskelä M. Some recent developments in the MOCVD and ALD of high-κ dielectric oxides. ACTA ACUST UNITED AC 2004. [DOI: 10.1039/b405525j] [Citation(s) in RCA: 77] [Impact Index Per Article: 3.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
50
Leskelä M, Ritala M. Rare-earth oxide thin films as gate oxides in MOSFET transistors. J SOLID STATE CHEM 2003. [DOI: 10.1016/s0022-4596(02)00204-9] [Citation(s) in RCA: 101] [Impact Index Per Article: 4.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/26/2022]
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