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Synthesis and Characterization of Gadolinium-Doped Zirconia as a Potential Electrolyte for Solid Oxide Fuel Cells. ENERGIES 2022. [DOI: 10.3390/en15082826] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
Zirconia-based composites with high thermochemical stability and electrochemical activity are the most promising solid electrolytes for manufacturing solid oxide fuel cells (SOFCs). In the present work, nanocrystalline composite powders of gadolinium-doped zirconia (GDZ: Gd2xZr2(1−x)O4−x) with various doping fractions (0.01 ≤ x ≤ 0.16) were synthesized by the Pechini method and applied for the fabrication of several electrolyte pellets to evaluate their physicochemical properties, sinterability, and conductivity. The X-ray diffraction (XRD) patterns and the thermogravimetry/differential thermal analysis (TGA/DTA) of the synthesized powders confirmed the successful formation of nanocrystalline GDZ in the tetragonal phase with complete substitution of gadolinium phase into the zirconia (ZrO2) lattice. The synthesized gadolinium zirconate powders were then shaped into pellet forms using the tape casting method, followed by sintering at 1300 °C (for 2.5 h). The microstructural analysis of the electrolyte pellets showed suitable grain boundary welding at the surface with an acceptable grain growth at the bulk of the T-phase GDZ samples. The impedance measurements indicated that the T-phase GDZ-8 could provide a comparably higher ionic conductivity (with 7.23 × 10−2 S/cm in the air at 800 °C) than the other dopant fractions. The results of this work can help better understand the characteristics and electrochemical performance of the T-phase gadolinium zirconate as a potential electrolyte for the fabrication of SOFCs.
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2
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Liou SC, Oleshko VP, Kuo WCH, Yang TJ, Shu GJ. Investigation of the excitations of plasmons and surface exciton polaritons in monoclinic gadolinium sesquioxide by electron energy-loss spectroscopy and plasmon spectroscopic imaging. RSC Adv 2022; 12:10345-10354. [PMID: 35425011 PMCID: PMC8977844 DOI: 10.1039/d2ra00737a] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/03/2022] [Accepted: 03/16/2022] [Indexed: 11/21/2022] Open
Abstract
The monoclinic gadolinium sesquioxide (denoted as m-Gd2O3) with its lower crystal symmetry exhibits larger dielectric permittivity (κ) than the cubic Gd2O3 (denoted as c-Gd2O3). Recently, a few nanometers thick m-Gd2O3 thin film has been successfully epitaxially grown on a GaN substrate as a promising candidate gate oxide in metal-oxide-semiconductor field-effect transistors (MOSFETs). Thus, it is important to understand the electronic excitations in m-Gd2O3 and investigate them by electron energy loss spectroscopy (EELS) performed with aloof electron beams and electron diffraction to gain the spatial and momentum resolutions. In this study, using scanning transmission electron microscopy combined with EELS (STEM-EELS) in the aloof electron beam setup, we observed low-loss spectral features at 13 eV and 14.5 eV at the specimen edge in a grazing incidence and the material interior, which can be interpreted as a surface plasmon (SP) and a volume plasmon (VP), respectively. Surface exciton polaritons (SEPs), which represents surface resonances associated with excitonic onsets above the bandgap, were also observed at about 7, 10.2, and 36 eV energy loss. Their surface excitation character was confirmed by energy-filtered transmission electron microscopy spectrum imaging (EFTEM-SI) and using relativistic energy versus-momentum (E-k) map calculations. The momentum (q)-dependent EELS indicates that the SEP features near the bandgap represented a function of q and revealed a nondispersive behavior for VP and SEP at 36 eV. The oscillator strengths for VP and SEP at 36 eV dropped at different q values along with different q directions, revealing the anisotropic electronic structures of m-Gd2O3.
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Affiliation(s)
- Sz-Chian Liou
- Advanced Imaging & Microscopy Laboratory, Maryland NanoCenter, Institute for Research in Electronics and Applied Physics, University of Maryland College Park MD 20742 USA
| | - Vladimir P Oleshko
- Material Measurement Laboratory, National Institute of Standards and Technology Gaithersburg MD 20899 USA
| | - W Chun-Hsin Kuo
- Materials Characterization Facility, Texas A&M University College Station TX 77845 USA
| | - Tan-Ju Yang
- Department of Materials and Mineral Resources Engineering, National Taipei University of Technology Taipei 10608 Taiwan
| | - Guo-Jiun Shu
- Department of Materials and Mineral Resources Engineering, National Taipei University of Technology Taipei 10608 Taiwan
- Institute of Mineral Resources Engineering, National Taipei University of Technology Taipei 10608 Taiwan
- Taiwan Consortium of Emergent Crystalline Materials, Ministry of Science and Technology Taipei 10622 Taiwan
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3
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Li L, Lu F, Xiong W, Ding Y, Lu Y, Xiao Y, Tong X, Wang Y, Jia S, Wang J, Mendes RG, Rümmeli MH, Yuan S, Zeng M, Fu L. General synthesis of 2D rare-earth oxide single crystals with tailorable facets. Natl Sci Rev 2021; 9:nwab153. [PMID: 35591917 PMCID: PMC9113103 DOI: 10.1093/nsr/nwab153] [Citation(s) in RCA: 4] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 05/21/2021] [Revised: 07/20/2021] [Accepted: 08/05/2021] [Indexed: 01/12/2023] Open
Abstract
Two-dimensional (2D) rare-earth oxides (REOs) are a large family of materials with various intriguing applications and precise facet control is essential for investigating new properties in the 2D limit. However, a bottleneck remains with regard to obtaining their 2D single crystals with specific facets because of the intrinsic non-layered structure and disparate thermodynamic stability of different facets. Herein, for the first time, we achieve the synthesis of a wide variety of high-quality 2D REO single crystals with tailorable facets via designing a hard-soft-acid-base couple for controlling the 2D nucleation of the predetermined facets and adjusting the growth mode and direction of crystals. Also, the facet-related magnetic properties of 2D REO single crystals were revealed. Our approach provides a foundation for further exploring other facet-dependent properties and various applications of 2D REO, as well as inspiration for the precise growth of other non-layered 2D materials.
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Affiliation(s)
- Linyang Li
- College of Chemistry and Molecular Sciences, Wuhan University, Wuhan 430072, China
| | - Fangyun Lu
- College of Chemistry and Molecular Sciences, Wuhan University, Wuhan 430072, China
| | - Wenqi Xiong
- Key Laboratory of Artificial Micro- and Nano-Structures of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan 430072, China
| | - Yu Ding
- College of Chemistry and Molecular Sciences, Wuhan University, Wuhan 430072, China
| | - Yangyi Lu
- College of Chemistry and Molecular Sciences, Wuhan University, Wuhan 430072, China
| | - Yao Xiao
- The Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
| | - Xin Tong
- College of Chemistry and Molecular Sciences, Wuhan University, Wuhan 430072, China
| | - Yao Wang
- College of Chemistry and Molecular Sciences, Wuhan University, Wuhan 430072, China
| | - Shuangfeng Jia
- Key Laboratory of Artificial Micro- and Nano-Structures of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan 430072, China
| | - Jianbo Wang
- Key Laboratory of Artificial Micro- and Nano-Structures of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan 430072, China
| | - Rafael G Mendes
- College of Physics, Optoelectronics and Energy, and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, China
- Institute for Complex Materials, IFW Dresden, Dresden 01069, Germany
| | - Mark H Rümmeli
- College of Physics, Optoelectronics and Energy, and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, China
- Institute for Complex Materials, IFW Dresden, Dresden 01069, Germany
- Centre of Polymer and Carbon Materials, Polish Academy of Sciences, Zabrze 41-819, Poland
- Institute of Environmental Technology, VSB-Technical University of Ostrava, Ostrava 708 33, Czech Republic
| | - Shengjun Yuan
- Key Laboratory of Artificial Micro- and Nano-Structures of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan 430072, China
| | - Mengqi Zeng
- College of Chemistry and Molecular Sciences, Wuhan University, Wuhan 430072, China
| | - Lei Fu
- College of Chemistry and Molecular Sciences, Wuhan University, Wuhan 430072, China
- The Institute for Advanced Studies, Wuhan University, Wuhan 430072, China
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4
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Shahzad K, Mardare CC, Mardare AI, Hassel AW. Mixed oxide growth on combinatorial aluminium–gadolinium alloys — a thermodynamic and first-principles approach. J Solid State Electrochem 2021. [DOI: 10.1007/s10008-021-05012-x] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/29/2022]
Abstract
AbstractMetal surfaces covered with oxides have attracted considerable scientific attention in various applications. In particular, anodic films fabricated by cost-effective anodizing have been widely used in nano-structured engineering to provide various surface functionalities. However, understanding of alloy film stability, having individual elements with widely varying structures and morphologies, is very limited due to lack of thermodynamic information and effects of electrolyte chemistry. This requires many tedious efforts on a trial and error basis in selecting suitable electrolytes that can produce the protective film at high efficiency on alloys having mixed chemistries. It is, therefore, crucial to develop a combination of high throughput theoretical analysis and automated rapid localized electrochemical probing that provides a fast and simple solution for electrolyte choice and paves the way to the remarkable expansion of industrial applications of oxides. Herein, we demonstrate that combinatorial Al–Gd alloys covering 1.0 to 10.0 at.% Gd can be oxidized into ultra-thin anodic films of controlled thickness through a selection of electrolyte based on thermodynamics (phosphate buffer with a pH of 8.20). We propose that growth of anodic films on alloys at high efficiency is possible if Gibbs free energy minimization criteria would be systematically contemplate.
Graphical abstract
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5
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Epitaxy from a Periodic Y-O Monolayer: Growth of Single-Crystal Hexagonal YAlO 3 Perovskite. NANOMATERIALS 2020; 10:nano10081515. [PMID: 32748811 PMCID: PMC7466604 DOI: 10.3390/nano10081515] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/07/2020] [Revised: 07/26/2020] [Accepted: 07/28/2020] [Indexed: 11/24/2022]
Abstract
The role of an atomic-layer thick periodic Y–O array in inducing the epitaxial growth of single-crystal hexagonal YAlO3 perovskite (H-YAP) films was studied using high-angle annular dark-field and annular bright-field scanning transmission electron microscopy in conjunction with a spherical aberration-corrected probe and in situ reflection high-energy electron diffraction. We observed the Y–O array at the interface of amorphous atomic layer deposition (ALD) sub-nano-laminated (snl) Al2O3/Y2O3 multilayers and GaAs(111)A, with the first film deposition being three cycles of ALD-Y2O3. This thin array was a seed layer for growing the H-YAP from the ALD snl multilayers with 900 °C rapid thermal annealing (RTA). The annealed film only contained H-YAP with an excellent crystallinity and an atomically sharp interface with the substrate. The initial Y–O array became the bottom layer of H-YAP, bonding with Ga, the top layer of GaAs. Using a similar ALD snl multilayer, but with the first film deposition of three ALD-Al2O3 cycles, there was no observation of a periodic atomic array at the interface. RTA of the sample to 900 °C resulted in a non-uniform film, mixing amorphous regions and island-like H-YAP domains. The results indicate that the epitaxial H-YAP was induced from the atomic-layer thick periodic Y–O array, rather than from GaAs(111)A.
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Cheng CP, Chen WS, Cheng YT, Wan HW, Yang CY, Pi TW, Kwo J, Hong M. Atomic Nature of the Growth Mechanism of Atomic Layer Deposited High-κ Y 2O 3 on GaAs(001)-4 × 6 Based on in Situ Synchrotron Radiation Photoelectron Spectroscopy. ACS OMEGA 2018; 3:2111-2118. [PMID: 31458518 PMCID: PMC6641429 DOI: 10.1021/acsomega.7b01564] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 10/16/2017] [Accepted: 02/09/2018] [Indexed: 06/10/2023]
Abstract
Y2O3 was in situ deposited on a freshly grown molecular beam epitaxy GaAs(001)-4 × 6 surface by atomic layer deposition (ALD). In situ synchrotron radiation photoemission was used to study the mechanism of the tris(ethylcyclopentadienyl)yttrium [Y(CpEt)3] and H2O process. The exponential attenuation of Ga 3d photoelectrons confirmed the laminar growth of ALD-Y2O3. In the embryo stage of the first ALD half-cycle with only Y(CpEt)3, the precursors reside on the faulted As atoms and undergo a charge transfer to the bonded As atoms. The subsequent ALD half-cycle of H2O molecules removes the bonded As atoms, and the oxygen atoms bond with the underneath Ga atoms. The product of a line of Ga-O-Y bonds stabilizes the Y2O3 films on the GaAs substrate. The resulting coordinatively unsaturated Y-O pairs of Y2O3 open the next ALD series. The absence of Ga2O3, As2O3, and As2O5 states may play an important role in the attainment of low interfacial trap densities (D it) of <1012 cm-2 eV-1 in our established reports.
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Affiliation(s)
- Chiu-Ping Cheng
- Department
of Electrophysics, National Chiayi University, Chiayi 60004, Taiwan, ROC
| | - Wan-Sin Chen
- Graduate
Institute of Applied Physics and Department of Physics, National Taiwan University, Taipei 10617, Taiwan, ROC
| | - Yi-Ting Cheng
- Graduate
Institute of Applied Physics and Department of Physics, National Taiwan University, Taipei 10617, Taiwan, ROC
| | - Hsien-Wen Wan
- Graduate
Institute of Applied Physics and Department of Physics, National Taiwan University, Taipei 10617, Taiwan, ROC
| | - Cheng-Yeh Yang
- Department
of Physics, National Tsing Hua University, Hsinchu 30013, Taiwan, ROC
| | - Tun-Wen Pi
- National
Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan, ROC
| | - Jueinai Kwo
- Department
of Physics, National Tsing Hua University, Hsinchu 30013, Taiwan, ROC
| | - Minghwei Hong
- Graduate
Institute of Applied Physics and Department of Physics, National Taiwan University, Taipei 10617, Taiwan, ROC
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Lee SM, Yum JH, Yoon S, Larsen ES, Lee WC, Kim SK, Shervin S, Wang W, Ryou JH, Bielawski CW, Oh J. Atomic-Layer Deposition of Single-Crystalline BeO Epitaxially Grown on GaN Substrates. ACS APPLIED MATERIALS & INTERFACES 2017; 9:41973-41979. [PMID: 29148718 DOI: 10.1021/acsami.7b13487] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/07/2023]
Abstract
We have grown a single-crystal beryllium oxide (BeO) thin film on a gallium nitride (GaN) substrate by atomic-layer deposition (ALD) for the first time. BeO has a higher thermal conductivity, bandgap energy, and dielectric constant than SiO2. As an electrical insulator, diamond is the only material on earth whose thermal conductivity exceeds that of BeO. Despite these advantages, there is no chemical-vapor-deposition technique for BeO-thin-film deposition, and thus, it is not used in nanoscale-semiconductor-device processing. In this study, the BeO thin films grown on a GaN substrate with a single crystal showed excellent interface and thermal stability. Transmission electron microscopy showed clear diffraction patterns, and the Raman shifts associated with soft phonon modes verified the high thermal conductivity. The X-ray scan confirmed the out-of-plane single-crystal growth direction and the in-plane, 6-fold, symmetrical wurtzite structure. Single-crystalline BeO was grown on GaN despite the large lattice mismatch, which suggested a model that accommodated the strain of hexagonal-on-hexagonal epitaxy with 5/6 and 6/7 domain matching. BeO has a good dielectric constant and good thermal conductivity, bandgap energy, and single-crystal characteristics, so it is suitable for the gate dielectric of power semiconductor devices. The capacitance-voltage (C-V) results of BeO on a GaN-metal-oxide semiconductor exhibited low frequency dispersion, hysteresis, and interface-defect density.
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Affiliation(s)
- Seung Min Lee
- School of Integrated Technology, Yonsei University , Incheon 21983, Republic of Korea
- Yonsei Institute of Convergence Technology , Incheon 21983, Republic of Korea
| | - Jung Hwan Yum
- Center for Multidimensional Carbon Materials (CMCM), Institute for Basic Science (IBS) , Ulsan 44919, Republic of Korea
- Department of Chemistry, Ulsan National Institute of Science and Technology (UNIST) , Ulsan 44919, Republic of Korea
| | - Seonno Yoon
- School of Integrated Technology, Yonsei University , Incheon 21983, Republic of Korea
- Yonsei Institute of Convergence Technology , Incheon 21983, Republic of Korea
| | - Eric S Larsen
- Center for Multidimensional Carbon Materials (CMCM), Institute for Basic Science (IBS) , Ulsan 44919, Republic of Korea
- Department of Chemistry, Ulsan National Institute of Science and Technology (UNIST) , Ulsan 44919, Republic of Korea
| | - Woo Chul Lee
- Center for Electronic Materials, Korea Institute of Science and Technology (KIST) , Seoul 20792, Republic of Korea
| | - Seong Keun Kim
- Center for Electronic Materials, Korea Institute of Science and Technology (KIST) , Seoul 20792, Republic of Korea
| | - Shahab Shervin
- Department of Mechanical Engineering, University of Houston , Houston, Texas 77204-4006, United States
| | - Weijie Wang
- Department of Mechanical Engineering, University of Houston , Houston, Texas 77204-4006, United States
| | - Jae-Hyun Ryou
- Department of Mechanical Engineering, University of Houston , Houston, Texas 77204-4006, United States
- Materials Science and Engineering Program and Texas Center for Superconductivity at UH (TcSUH), University of Houston , Houston, Texas 77204, United States
| | - Christopher W Bielawski
- Center for Multidimensional Carbon Materials (CMCM), Institute for Basic Science (IBS) , Ulsan 44919, Republic of Korea
- Department of Chemistry, Ulsan National Institute of Science and Technology (UNIST) , Ulsan 44919, Republic of Korea
- Department of Energy Engineering, UNIST , Ulsan 44919, Republic of Korea
| | - Jungwoo Oh
- School of Integrated Technology, Yonsei University , Incheon 21983, Republic of Korea
- Yonsei Institute of Convergence Technology , Incheon 21983, Republic of Korea
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Maidul Haque S, De R, Tripathi S, Mukherjee C, Yadav AK, Bhattacharyya D, Jha SN, Sahoo NK. Effect of oxygen partial pressure in deposition ambient on the properties of RF magnetron sputter deposited Gd 2O 3 thin films. APPLIED OPTICS 2017; 56:6114-6125. [PMID: 29047804 DOI: 10.1364/ao.56.006114] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/21/2017] [Accepted: 06/16/2017] [Indexed: 06/07/2023]
Abstract
Gadolinium oxide is an excellent optical material that offers high transmission in a wide wavelength range of 200-1600 nm and exhibits a high bulk refractive index of ∼1.80 at 550 nm. In the present study, a set of Gd2O3 thin films has been deposited on fused silica substrates by RF sputtering of a Gd2O3 target under various O2 to Ar flow ratios. The samples have been characterized by grazing incidence x-ray diffraction (GIXRD) to study the long range structural behavior, by GIXR to study density and surface roughness of the films, by atomic force microscopy measurements to study morphological properties, by Rutherford backscattering measurements for compositional studies, and by transmission spectrophotometry and spectroscopic ellipsometry techniques to study their optical properties. It has been observed that the films deposited with 10% oxygen partial pressure have low density, high surface roughness, and high void content, which results in a low value of refractive index of this film, and film quality improves as oxygen partial pressure is further increased. Extended x-ray absorption fine structure measurement with synchrotron radiation has also been employed to extract local structural information around Gd sites, which has in turn been used to explain some of the observed macroscopic properties of the films.
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9
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Liu H, Cheng X, Valanoor N. Universal Approach for Predicting Crystallography of Heterogeneous Epitaxial Nanocrystals with Multiple Orientation Relationships. ACS APPLIED MATERIALS & INTERFACES 2016; 8:34844-34853. [PMID: 27998128 DOI: 10.1021/acsami.6b10701] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Heteroepitaxial nanocrystals are one of the most fundamentally and technologically important classes of materials systems. The correlation between form, dictated by crystallographic features such as growth habit and direction, and function, in terms of the ultimate physio-chemical properties is well established, thus placing an onus on precise synthesis control of nanocrystal morphology. Yet, nanocrystal heteroepitaxy can be a frustrating, time-consuming iterative process, particularly during the initial stages of development. What is desired is a powerful predictive tool that is able to successfully predict not only the interface or habit plane, but also rationalize the occurrence of epitaxial growth complexities such as multiple orientation relationships (MORs) and high-index faceting planes for a diverse range of materials. Here we provide such a powerful approach that is based on an invariant deformation element (IDE) model, and fundamentally founded on the crystallography of diffusional phase transformations. We demonstrate its impact by detailed computations supported by transmission electron microscopy evidence, for an archetypical complex metal oxide nanocrystal system (that has up to five MORs for three differing growth orientations). The method is then applied to successfully explain growth for different materials ranging from metals to metal carbides to transition metal oxides, even in thin film form. Thus, this relatively simple yet powerful predictive guide significantly reduces the systemic inefficiencies of guesswork and blind growth. Ultimately it can be easily integrated with machine learning techniques toward reliable and efficient advanced nanomaterials fabrication.
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Affiliation(s)
- Hongwei Liu
- Australian Centre for Microscopy and Microanalysis, The University of Sydney , Sydney, New South Wales 2006, Australia
| | - Xuan Cheng
- School of Materials Science and Engineering, University of New South Wales , Sydney, New South Wales 2052, Australia
| | - Nagarajan Valanoor
- School of Materials Science and Engineering, University of New South Wales , Sydney, New South Wales 2052, Australia
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Kumar P, Maikap S, Qiu JT, Jana S, Roy A, Singh K, Cheng HM, Chang MT, Mahapatra R, Chiu HC, Yang JR. Detection of pH and Enzyme-Free H2O2 Sensing Mechanism by Using GdO x Membrane in Electrolyte-Insulator-Semiconductor Structure. NANOSCALE RESEARCH LETTERS 2016; 11:434. [PMID: 27680740 PMCID: PMC5040652 DOI: 10.1186/s11671-016-1657-5] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Figures] [Subscribe] [Scholar Register] [Received: 08/13/2016] [Accepted: 09/22/2016] [Indexed: 06/06/2023]
Abstract
A 15-nm-thick GdO x membrane in an electrolyte-insulator-semiconductor (EIS) structure shows a higher pH sensitivity of 54.2 mV/pH and enzyme-free hydrogen peroxide (H2O2) detection than those of the bare SiO2 and 3-nm-thick GdO x membranes for the first time. Polycrystalline grain and higher Gd content of the thicker GdO x films are confirmed by transmission electron microscopy (TEM) and X-ray photo-electron spectroscopy (XPS), respectively. In a thicker GdO x membrane, polycrystalline grain has lower energy gap and Gd(2+) oxidation states lead to change Gd(3+) states in the presence of H2O2, which are confirmed by electron energy loss spectroscopy (EELS). The oxidation/reduction (redox) properties of thicker GdO x membrane with higher Gd content are responsible for detecting H2O2 whereas both bare SiO2 and thinner GdO x membranes do not show sensing. A low detection limit of 1 μM is obtained due to strong catalytic activity of Gd. The reference voltage shift increases with increase of the H2O2 concentration from 1 to 200 μM owing to more generation of Gd(3+) ions, and the H2O2 sensing mechanism has been explained as well.
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Affiliation(s)
- Pankaj Kumar
- Department of Electronic Engineering, Chang Gung University (CGU), 259 Wen-Hwa 1st Rd., Kwei-Shan, Tao-Yuan, 333 Taiwan
| | - Siddheswar Maikap
- Department of Electronic Engineering, Chang Gung University (CGU), 259 Wen-Hwa 1st Rd., Kwei-Shan, Tao-Yuan, 333 Taiwan
- Bio-Sensor Lab., Biomedical Engineering Research Center, Department of Electronic Engineering, Chang Gung University, Tao-Yuan, 333 Taiwan
- Center for Reliability Science and Technologies (CReST), Department of Electronic Engineering, Chang Gung University, Tao-Yuan, 333 Taiwan
| | - Jian-Tai Qiu
- Department of Biomedical Sciences, School of Medicine, Chang Gung University (CGU), Tao-Yuan, 333 Taiwan
- Division of Gyn-Oncology, Department of Obs/Gyn, Chang Gung Memorial Hospital (CGMH), Tao-Yuan, 333 Taiwan
| | - Surajit Jana
- Department of Electronic Engineering, Chang Gung University (CGU), 259 Wen-Hwa 1st Rd., Kwei-Shan, Tao-Yuan, 333 Taiwan
| | - Anisha Roy
- Department of Electronic Engineering, Chang Gung University (CGU), 259 Wen-Hwa 1st Rd., Kwei-Shan, Tao-Yuan, 333 Taiwan
| | - Kanishk Singh
- Department of Electronic Engineering, Chang Gung University (CGU), 259 Wen-Hwa 1st Rd., Kwei-Shan, Tao-Yuan, 333 Taiwan
| | - Hsin-Ming Cheng
- Material and Chemical Research Laboratories (MRL), Industrial Technology Research Institute (ITRI), Hsinchu, 195 Taiwan
| | - Mu-Tung Chang
- Material and Chemical Research Laboratories (MRL), Industrial Technology Research Institute (ITRI), Hsinchu, 195 Taiwan
| | - Rajat Mahapatra
- Department of Electronics and Communications Engineering, National Institute of Technology (NIT), Durgapur, 713209 India
| | - Hsien-Chin Chiu
- Department of Electronic Engineering, Chang Gung University (CGU), 259 Wen-Hwa 1st Rd., Kwei-Shan, Tao-Yuan, 333 Taiwan
| | - Jer-Ren Yang
- Department of Materials Science and Engineering, National Taiwan University (NTU), Taipei, 106 Taiwan
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11
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Han Y, Meng Q, Rasulev B, May PS, Berry MT, Kilin DS. Photofragmentation of the Gas-Phase Lanthanum Isopropylcyclopentadienyl Complex: Computational Modeling vs Experiment. J Phys Chem A 2015; 119:10838-48. [DOI: 10.1021/acs.jpca.5b07209] [Citation(s) in RCA: 22] [Impact Index Per Article: 2.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Yulun Han
- Department
of Chemistry, University of South Dakota, Vermillion, South Dakota 57069, United States
| | - Qingguo Meng
- Shenyang
Institute of Automation, Guangzhou, Chinese Academy of Sciences, Guangzhou 511458, China
| | - Bakhtiyor Rasulev
- Center
for Computationally Assisted Science and Technology, North Dakota State University, Fargo, North Dakota 58102, United States
| | - P. Stanley May
- Department
of Chemistry, University of South Dakota, Vermillion, South Dakota 57069, United States
| | - Mary T. Berry
- Department
of Chemistry, University of South Dakota, Vermillion, South Dakota 57069, United States
| | - Dmitri S. Kilin
- Department
of Chemistry, University of South Dakota, Vermillion, South Dakota 57069, United States
- Department
of Chemistry and Biochemistry, North Dakota State University, Fargo, North Dakota 58108, United States
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Abstract
Single-crystal atomic-layer-deposited (ALD) Y2O3 films 2 nm thick were epitaxially grown on molecular beam epitaxy (MBE) GaAs(001)-4 × 6 and GaAs(111)A-2 × 2 reconstructed surfaces. The in-plane epitaxy between the ALD-oxide films and GaAs was observed using in-situ reflection high-energy electron diffraction in our uniquely designed MBE/ALD multi-chamber system. More detailed studies on the crystallography of the hetero-structures were carried out using high-resolution synchrotron radiation X-ray diffraction. When deposited on GaAs(001), the Y2O3 films are of a cubic phase and have (110) as the film normal, with the orientation relationship being determined: Y2O3(110)[001][1¯10]//GaAs(001)[110][11¯0]. On GaAs(111)A, the Y2O3 films are also of a cubic phase with (111) as the film normal, having the orientation relationship of Y2O3(111)[21¯1¯][011¯]//GaAs(111)[2¯11][01¯1]. The relevant orientation for the present/future integrated circuit platform is (001). The ALD-Y2O3/GaAs(001)-4 × 6 has shown excellent electrical properties. These include small frequency dispersion in the capacitance-voltage (CV) curves at accumulation of ~7% and ~14% for the respective p- and n-type samples with the measured frequencies of 1 MHz to 100 Hz. The interfacial trap density (Dit) is low of ~1012 cm−2eV−1 as extracted from measured quasi-static CVs. The frequency dispersion at accumulation and the Dit are the lowest ever achieved among all the ALD-oxides on GaAs(001).
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13
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Pi TW, Lin YH, Fanchiang YT, Chiang TH, Wei CH, Lin YC, Wertheim GK, Kwo J, Hong M. In-situ atomic layer deposition of tri-methylaluminum and water on pristine single-crystal (In)GaAs surfaces: electronic and electric structures. NANOTECHNOLOGY 2015; 26:164001. [PMID: 25824203 DOI: 10.1088/0957-4484/26/16/164001] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
The electronic structure of single-crystal (In)GaAs deposited with tri-methylaluminum (TMA) and water via atomic layer deposition (ALD) is presented with high-resolution synchrotron radiation core-level photoemission and capacitance-voltage (CV) characteristics. The interaction of the precursor atoms with (In)GaAs is confined at the topmost surface layer. The Ga-vacant site on the GaAs(111)A-2 × 2 surface is filled with Al, thereby effectively passivating the As dangling bonds. The As-As dimers on the GaAs(001)-2 × 4 surface are entirely passivated by one cycle of TMA and water. The presumed layerwise deposition fails to happen in GaAs(001)-4 × 6. In In0.20Ga0.80As(001)-2 × 4, the edge row As atoms are partially bonded with the Al, and one released methyl then bonds with the In. It is suggested that the unpassivated surface and subsurface atoms cause large frequency dispersions in CV characteristics under the gate bias. We also found that the (In)GaAs surface is immune to water in ALD. However, the momentary exposure of it to air (less than one minute) introduces significant signals of native oxides. This indicates the necessity of in situ works of high κ/(In)GaAs-related experiments in order to know the precise interfacial atomic bonding and thus know the electronic characteristics. The electric CV measurements of the ALD-Al2O3 on these (In)GaAs surfaces are correlated with their electronic properties.
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Affiliation(s)
- T W Pi
- National Synchrotron Radiation Research Center, Hsinchu 30076, Taiwan
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14
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Tuominen M, Yasir M, Lång J, Dahl J, Kuzmin M, Mäkelä J, Punkkinen M, Laukkanen P, Kokko K, Schulte K, Punkkinen R, Korpijärvi VM, Polojärvi V, Guina M. Oxidation of the GaAs semiconductor at the Al2O3/GaAs junction. Phys Chem Chem Phys 2015; 17:7060-6. [PMID: 25686555 DOI: 10.1039/c4cp05972g] [Citation(s) in RCA: 11] [Impact Index Per Article: 1.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 12/28/2022]
Abstract
Atomic-scale understanding and processing of the oxidation of III-V compound-semiconductor surfaces are essential for developing materials for various devices (e.g., transistors, solar cells, and light emitting diodes). The oxidation-induced defect-rich phases at the interfaces of oxide/III-V junctions significantly affect the electrical performance of devices. In this study, a method to control the GaAs oxidation and interfacial defect density at the prototypical Al2O3/GaAs junction grown via atomic layer deposition (ALD) is demonstrated. Namely, pre-oxidation of GaAs(100) with an In-induced c(8 × 2) surface reconstruction, leading to a crystalline c(4 × 2)-O interface oxide before ALD of Al2O3, decreases band-gap defect density at the Al2O3/GaAs interface. Concomitantly, X-ray photoelectron spectroscopy (XPS) from these Al2O3/GaAs interfaces shows that the high oxidation state of Ga (Ga2O3 type) decreases, and the corresponding In2O3 type phase forms when employing the c(4 × 2)-O interface layer. Detailed synchrotron-radiation XPS of the counterpart c(4 × 2)-O oxide of InAs(100) has been utilized to elucidate the atomic structure of the useful c(4 × 2)-O interface layer and its oxidation process. The spectral analysis reveals that three different oxygen sites, five oxidation-induced group-III atomic sites with core-level shifts between -0.2 eV and +1.0 eV, and hardly any oxygen-induced changes at the As sites form during the oxidation. These results, discussed within the current atomic model of the c(4 × 2)-O interface, provide insight into the atomic structures of oxide/III-V interfaces and a way to control the semiconductor oxidation.
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Affiliation(s)
- Marjukka Tuominen
- Department of Physics and Astronomy, University of Turku, FI-20014 Turku, Finland.
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15
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Islam SM, Sarkar K, Banerji P, Sarkar KJ, Pal B. Leakage current characteristics in MOCVD grown InAs quantum dot embedded GaAs metal-oxide-semiconductor capacitor. RSC Adv 2015. [DOI: 10.1039/c5ra15642d] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/07/2023] Open
Abstract
Carrier transport vis-a-vis leakage current in GaAs MOS capacitors with various structures; quantum dot embedded devices show the lowest leakage.
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Affiliation(s)
- Sk Masiul Islam
- Materials Science Centre
- Indian Institute of Technology
- Kharagpur 721 302
- India
| | - K. Sarkar
- Materials Science Centre
- Indian Institute of Technology
- Kharagpur 721 302
- India
| | - P. Banerji
- Materials Science Centre
- Indian Institute of Technology
- Kharagpur 721 302
- India
| | - Kalyan Jyoti Sarkar
- Advanced Technology Development Centre
- Indian Institute of Technology
- Kharagpur 721 302
- India
| | - Biswajit Pal
- Materials Science Centre
- Indian Institute of Technology
- Kharagpur 721 302
- India
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16
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Colleoni D, Miceli G, Pasquarello A. Origin of Fermi-level pinning at GaAs surfaces and interfaces. JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2014; 26:492202. [PMID: 25372411 DOI: 10.1088/0953-8984/26/49/492202] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Through first-principles simulation methods, we assign the origin of Fermi-level pinning at GaAs surfaces and interfaces to the bistability between the As-As dimer and two As dangling bonds, which transform into each other upon charge trapping. This defect is shown to be naturally formed both at GaAs surfaces upon oxygen deposition and in the near-interface substoichiometric oxide. Using electron-counting arguments, we infer that the identified defect occurs in opposite charge states. The Fermi-level pinning then results from the amphoteric nature of this defect which drives the Fermi level to its defect level. These results account for the experimental characterization at both GaAs surfaces and interfaces within a unified picture, wherein the role of As antisites is elucidated.
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Affiliation(s)
- Davide Colleoni
- Chaire de Simulation à l'Echelle Atomique (CSEA), Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
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17
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Chiang TH, Wu SY, Huang TS, Hsu CH, Kwo J, Hong M. Single crystal Gd2O3epitaxially on GaAs(111)A. CrystEngComm 2014. [DOI: 10.1039/c4ce00734d] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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18
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Chen J, Hochstatter AM, Kilin D, May PS, Meng Q, Berry MT. Photofragmentation of Gas-Phase Lanthanide Cyclopentadienyl Complexes: Experimental and Time-Dependent Excited-State Molecular Dynamics. Organometallics 2014; 33:1574-1586. [PMID: 24910492 PMCID: PMC4045319 DOI: 10.1021/om400953q] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/25/2013] [Indexed: 01/07/2023]
Abstract
![]()
Unimolecular
gas-phase laser-photodissociation reaction mechanisms of open-shell
lanthanide cyclopentadienyl complexes, Ln(Cp)3 and Ln(TMCp)3, are analyzed from experimental and computational perspectives.
The most probable pathways for the photoreactions are inferred from
photoionization time-of-flight mass spectrometry (PI-TOF-MS), which
provides the sequence of reaction intermediates and the distribution
of final products. Time-dependent excited-state molecular dynamics
(TDESMD) calculations provide insight into the electronic mechanisms
for the individual steps of the laser-driven photoreactions for Ln(Cp)3. Computational analysis correctly predicts several key reaction
products as well as the observed branching between two reaction pathways:
(1) ligand ejection and (2) ligand cracking. Simulations support our
previous assertion that both reaction pathways are initiated via a
ligand-to-metal charge-transfer (LMCT) process. For the more complex
chemistry of the tetramethylcyclopentadienyl complexes Ln(TMCp)3, TMESMD is less tractable, but computational geometry optimization
reveals the structures of intermediates deduced from PI-TOF-MS, including
several classic “tuck-in” structures and products of
Cp ring expansion. The results have important implications for metal–organic
catalysis and laser-assisted metal–organic chemical vapor deposition
(LCVD) of insulators with high dielectric constants.
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Affiliation(s)
- Jiangchao Chen
- Department of Chemistry, University of South Dakota , Vermillion, South Dakota 57069, United States
| | - Andrew M Hochstatter
- Department of Chemistry, University of South Dakota , Vermillion, South Dakota 57069, United States
| | - Dmitri Kilin
- Department of Chemistry, University of South Dakota , Vermillion, South Dakota 57069, United States
| | - P Stanley May
- Department of Chemistry, University of South Dakota , Vermillion, South Dakota 57069, United States
| | - Qingguo Meng
- Department of Chemistry, University of South Dakota , Vermillion, South Dakota 57069, United States
| | - Mary T Berry
- Department of Chemistry, University of South Dakota , Vermillion, South Dakota 57069, United States
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19
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Devi A. ‘Old Chemistries’ for new applications: Perspectives for development of precursors for MOCVD and ALD applications. Coord Chem Rev 2013. [DOI: 10.1016/j.ccr.2013.07.025] [Citation(s) in RCA: 110] [Impact Index Per Article: 9.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/30/2022]
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20
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Hansen PA, Fjellvåg H, Finstad T, Nilsen O. Structural and optical properties of lanthanide oxides grown by atomic layer deposition (Ln = Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, Yb). Dalton Trans 2013; 42:10778-85. [PMID: 23774891 DOI: 10.1039/c3dt51270c] [Citation(s) in RCA: 31] [Impact Index Per Article: 2.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
Abstract
Ln2O3 thin films with optically active f-electrons (Ln = Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, Yb) have been grown on Si(100) and soda lime glass substrates by atomic layer deposition (ALD) using Ln(thd)3 (Hthd = 2,2,6,6-tetramethyl-3,5-heptanedione) and ozone as precursors. The temperature range for depositions was 200-400 °C. Growth rates were measured by spectroscopic ellipsometry and a region with a constant growth rate (ALD window) was found for Ln = Ho and Tm. All the compounds are grown as amorphous films at low temperatures, whereas crystalline films (cubic C-Ln2O3) are obtained above a certain temperature ranging from 300 to 250 °C for Nd2O3 to Yb2O3, respectively. AFM studies show that the films were smooth (rms < 1 nm) except for depositions at the highest temperatures. The refractive index was measured by spectroscopic ellipsometry and was found to depend on the deposition temperature. Optical absorption measurements show that the absorption from the f-f transitions depends strongly on the crystallinity of the material. The clear correlation between the degree of crystallinity, optical absorptions and refractive indices is discussed.
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Affiliation(s)
- Per-Anders Hansen
- Department of Chemistry, Centre for Materials Science and Nanotechnology, University of Oslo, Sem Sælandsvei 26, 0371 Oslo, Norway.
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21
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Wang X, Dong L, Zhang J, Liu Y, Ye PD, Gordon RG. Heteroepitaxy of La2O3 and La(2-x)Y(x)O3 on GaAs (111)A by atomic layer deposition: achieving low interface trap density. NANO LETTERS 2013; 13:594-599. [PMID: 23294262 DOI: 10.1021/nl3041349] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
GaAs metal-oxide-semiconductor devices historically suffer from Fermi-level pinning, which is mainly due to the high trap density of states at the oxide/GaAs interface. In this work, we present a new way of passivating the interface trap states by growing an epitaxial layer of high-k dielectric oxide, La(2-x)Y(x)O(3), on GaAs(111)A. High-quality epitaxial La(2-x)Y(x)O(3) thin films are achieved by an ex situ atomic layer deposition (ALD) process, and GaAs MOS capacitors made from this epitaxial structure show very good interface quality with small frequency dispersion and low interface trap densities (D(it)). In particular, the La(2)O(3)/GaAs interface, which has a lattice mismatch of only 0.04%, shows very low D(it) in the GaAs bandgap, below 3 × 10(11) cm(-2) eV(-1) near the conduction band edge. The La(2)O(3)/GaAs capacitors also show the lowest frequency dispersion of any dielectric on GaAs. This is the first achievement of such low trap densities for oxides on GaAs.
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Affiliation(s)
- Xinwei Wang
- Department of Chemistry and Chemical Biology, Harvard University, Cambridge, Massachusetts 02138, USA
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22
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Chang WH, Wu SY, Lee CH, Lai TY, Lee YJ, Chang P, Hsu CH, Huang TS, Kwo JR, Hong M. Phase transformation of molecular beam epitaxy-grown nanometer-thick Gd₂O₃ and Y₂O₃ on GaN. ACS APPLIED MATERIALS & INTERFACES 2013; 5:1436-1441. [PMID: 23360590 DOI: 10.1021/am302881y] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
High quality nanometer-thick Gd₂O₃ and Y₂O₃ (rare-earth oxide, R₂O₃) films have been epitaxially grown on GaN (0001) substrate by molecular beam epitaxy (MBE). The R₂O₃ epi-layers exhibit remarkable thermal stability at 1100 °C, uniformity, and highly structural perfection. Structural investigation was carried out by in situ reflection high energy electron diffraction (RHEED) and ex-situ X-ray diffraction (XRD) with synchrotron radiation. In the initial stage of epitaxial growth, the R₂O₃ layers have a hexagonal phase with the epitaxial relationship of R₂O₃ (0001)(H)<1120>(H)//GaN(0001)(H)<1120>(H). With the increase in R₂O₃ film thickness, the structure of the R₂O₃ films changes from single domain hexagonal phase to monoclinic phase with six different rotational domains, following the R₂O₃ (201)(M)[020](M)//GaN(0001)(H)<1120>(H) orientational relationship. The structural details and fingerprints of hexagonal and monoclinic phase Gd₂O₃ films have also been examined by using electron energy loss spectroscopy (EELS). Approximate 3-4 nm is the critical thickness for the structural phase transition depending on the composing rare earth element.
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Affiliation(s)
- Wen-Hsin Chang
- Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 30013, Taiwan
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23
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Dalapati GK, Chia CK, Tan CC, Tan HR, Chiam SY, Dong JR, Das A, Chattopadhyay S, Mahata C, Maiti CK, Chi DZ. Surface passivation and interface properties of bulk GaAs and epitaxial-GaAs/Ge using atomic layer deposited TiAlO alloy dielectric. ACS APPLIED MATERIALS & INTERFACES 2013; 5:949-957. [PMID: 23331503 DOI: 10.1021/am302537b] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
High quality surface passivation on bulk-GaAs substrates and epitaxial-GaAs/Ge (epi-GaAs) layers were achieved by using atomic layer deposited (ALD) titanium aluminum oxide (TiAlO) alloy dielectric. The TiAlO alloy dielectric suppresses the formation of defective native oxide on GaAs layers. X-ray photoelectron spectroscopy (XPS) analysis shows interfacial arsenic oxide (As(x)O(y)) and elemental arsenic (As) were completely removed from the GaAs surface. Energy dispersive X-ray diffraction (EDX) analysis and secondary ion mass spectroscopy (SIMS) analysis showed that TiAlO dielectric is an effective barrier layer for reducing the out-diffusion of elemental atoms, enhancing the electrical properties of bulk-GaAs based metal-oxide-semiconductor (MOS) devices. Moreover, ALD TiAlO alloy dielectric on epi-GaAs with AlGaAs buffer layer realized smooth interface between epi-GaAs layers and TiAlO dielectric, yielding a high quality surface passivation on epi-GaAs layers, much sought-after for high-speed transistor applications on a silicon platform. Presence of a thin AlGaAs buffer layer between epi-GaAs and Ge substrates improved interface quality and gate dielectric quality through the reduction of interfacial layer formation (Ga(x)O(y)) and suppression of elemental out-diffusion (Ga and As). The AlGaAs buffer layer and TiAlO dielectric play a key role to suppress the roughening, interfacial layer formation, and impurity diffusion into the dielectric, which in turn largely enhances the electrical property of the epi-GaAs MOS devices.
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Affiliation(s)
- G K Dalapati
- Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology and Research), 3 Research Link, Singapore 117602.
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24
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Sahu PC, Lonappan D, Shekar NVC. High Pressure Structural Studies on Rare-Earth Sesquioxides. ACTA ACUST UNITED AC 2012. [DOI: 10.1088/1742-6596/377/1/012015] [Citation(s) in RCA: 15] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/11/2022]
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25
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Chall S, Saha A, Biswas SK, Datta A, Bhattacharya SC. Single step aqueous synthesis of pure rare earth nanoparticles in biocompatible polymer matrices. ACTA ACUST UNITED AC 2012. [DOI: 10.1039/c2jm30971h] [Citation(s) in RCA: 17] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/03/2023]
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26
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Das T, Bhattacharyya S. Structure and chemistry across interfaces at nanoscale of a Ge quantum well embedded within rare earth oxide layers. MICROSCOPY AND MICROANALYSIS : THE OFFICIAL JOURNAL OF MICROSCOPY SOCIETY OF AMERICA, MICROBEAM ANALYSIS SOCIETY, MICROSCOPICAL SOCIETY OF CANADA 2011; 17:759-765. [PMID: 21729358 DOI: 10.1017/s1431927611000559] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
Structure and chemistry across the rare earth oxide-Ge interfaces of a Gd2O3-Ge-Gd2O3 heterostructure grown on p-Si (111) substrate using encapsulated solid phase epitaxy method have been studied at nanoscale using various transmission electron microscopy methods. The structure across both the interfaces was investigated using reconstructed phase and amplitude at exit plane. Chemistry across the interfaces was explored using elemental mapping, high-angle annular dark-field imaging, electron energy loss spectroscopy, and energy dispersive X-ray spectrometry. Results demonstrate the structural and chemical abruptness of both the interfaces, which is most essential to maintain the desired quantum barrier structure.
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Affiliation(s)
- Tanmay Das
- Department of Condensed Matter Physics and Materials Science, Tata Institute of Fundamental Research, Mumbai 400005, India
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27
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Laha A, Bugiel E, Jestremski M, Ranjith R, Fissel A, Osten HJ. Encapsulated solid phase epitaxy of a Ge quantum well embedded in an epitaxial rare earth oxide. NANOTECHNOLOGY 2009; 20:475604. [PMID: 19875877 DOI: 10.1088/0957-4484/20/47/475604] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
An efficient method based on molecular beam epitaxy has been developed to integrate an epitaxial Ge quantum well buried into a single crystalline rare earth oxide. The monolithic heterostructure comprised of Gd2O3-Ge-Gd2O3 grown on an Si substrate exhibits excellent crystalline quality with atomically sharp interfaces. This heterostructure with unique structural quality could be used for novel nanoelectronic applications in quantum-effect devices such as nanoscale transistors with a high mobility channel, resonant tunneling diode/transistors, etc. A phenomenological model has been proposed to explain the epitaxial growth process of the Ge layer under oxide encapsulation using a solid source molecular beam epitaxy technique.
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Affiliation(s)
- Apurba Laha
- Institute of Electronic Materials and Devices, Leibniz University of Hannover, Appelstrasse 11A, D-30167 Hannover, Germany.
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28
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Tang S, Cao Z. Density Functional Characterization of Adsorption and Decomposition of 1-Propanethiol on the Ga-Rich GaAs (001) Surface. J Phys Chem A 2009; 113:5685-90. [DOI: 10.1021/jp810435c] [Citation(s) in RCA: 8] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Affiliation(s)
- Shaobin Tang
- Department of Chemistry and State Key Laboratory of Physical Chemistry of Solid Surfaces, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 360015, China
| | - Zexing Cao
- Department of Chemistry and State Key Laboratory of Physical Chemistry of Solid Surfaces, College of Chemistry and Chemical Engineering, Xiamen University, Xiamen 360015, China
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29
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Milanov AP, Fischer RA, Devi A. Synthesis, characterization, and thermal properties of homoleptic rare-earth guanidinates: promising precursors for MOCVD and ALD of rare-earth oxide thin films. Inorg Chem 2009; 47:11405-16. [PMID: 18989919 DOI: 10.1021/ic801432b] [Citation(s) in RCA: 51] [Impact Index Per Article: 3.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 01/18/2023]
Abstract
Eight novel homoleptic tris-guanidinato complexes M[(N(i)Pr)(2)CNR(2)](3) [M = Y (a), Gd (b), Dy (c) and R = Me (1), Et (2), (i)Pr (3)] have been synthesized and characterized by NMR, CHN-analysis, mass spectrometry and infrared spectroscopy. Single crystal structure analysis revealed that all the compounds are monomers with the rare-earth metal center coordinated to six nitrogen atoms of the three chelating guanidinato ligands in a distorted trigonal prism geometry. With the use of TGA/DTA and isothermal TGA analysis, the thermal characteristics of all the complexes were studied in detail to evaluate their suitability as precursors for thin film deposition by MOCVD and ALD. The (i)Pr-Me(2)N-guanidinates of Y, Gd and Dy (1a-c) showed excellent thermal characteristics in terms of thermal stability and volatility. Additionally, the thermal stability of the (i)Pr-Me(2)N-guanidinates of Y and Dy (1a, c) in solution was investigated by carrying out NMR decomposition experiments and both the compounds were found to be remarkably stable. All these studies indicate that (i)Pr-Me(2)N-guanidinates of Y, Gd and Dy (1a-c) have the prerequisites for MOCVD and ALD applications which were confirmed by the successful deposition of Gd(2)O(3) and Dy(2)O(3) thin films on Si(100) substrates. The MOCVD grown films of Gd(2)O(3) and Dy(2)O(3) were highly oriented in the cubic phase, while the ALD grown films were amorphous.
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Affiliation(s)
- Andrian P Milanov
- Inorganic Materials Chemistry Group, Lehrstuhl fur Anorganische Chemie II, Ruhr-University Bochum, D-44780, Bochum, Germany
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30
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Losovyj YB, Wooten D, Santana JC, An JM, Belashchenko KD, Lozova N, Petrosky J, Sokolov A, Tang J, Wang W, Arulsamy N, Dowben PA. Comparison of n-type Gd(2)O(3) and Gd-doped HfO(2). JOURNAL OF PHYSICS. CONDENSED MATTER : AN INSTITUTE OF PHYSICS JOURNAL 2009; 21:045602. [PMID: 21715816 DOI: 10.1088/0953-8984/21/4/045602] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
Gd(2)O(3) and Gd-doped HfO(2) films were deposited on p-type silicon substrates in a reducing atmosphere. Gd 4f photoexcitation peaks at roughly 7 and 5 eV below the valence band maximum have been identified using the resonant photoemission of Gd(2)O(3) and Gd-doped HfO(2) films, respectively. In the case of Gd(2)O(3), strong hybridization with the O 2p band is demonstrated, and there is evidence that the Gd 4f weighted band exhibits dispersion in the bulk band structure. The rectifying (diode-like) properties of Gd-doped HfO(2)-silicon and Gd(2)O(3)-silicon heterojunctions are demonstrated.
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Affiliation(s)
- Ya B Losovyj
- Department of Physics and Astronomy and the Nebraska Center for Materials and Nanoscience, University of Nebraska-Lincoln, PO Box 880111, Lincoln, NE 68588-0111, USA. Center for Advanced Microstructures and Devices, Louisiana State University, 6980 Jefferson Highway, Baton Rouge, LA 70806, USA
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31
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Characteristics of Gadolinium Oxide Nanocrystal Memory with Optimized Rapid Thermal Annealing. ACTA ACUST UNITED AC 2009. [DOI: 10.1149/1.3109573] [Citation(s) in RCA: 33] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 02/05/2023]
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32
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Yang JK, Choi SG, Park HH. Epitaxial growth and band alignment of (GdxLa1−x)2O3 films on n-GaAs (001). Micron 2009; 40:114-7. [DOI: 10.1016/j.micron.2008.03.002] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/15/2007] [Revised: 01/07/2008] [Accepted: 03/13/2008] [Indexed: 11/25/2022]
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33
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In[sub 0.53]Ga[sub 0.47]As n-metal-oxide-semiconductor field effect transistors with atomic layer deposited Al[sub 2]O[sub 3], HfO[sub 2], and LaAlO[sub 3] gate dielectrics. ACTA ACUST UNITED AC 2009. [DOI: 10.1116/1.3125284] [Citation(s) in RCA: 25] [Impact Index Per Article: 1.6] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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34
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35
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Dilawar N, Varandani D, Mehrotra S, Poswal HK, Sharma SM, Bandyopadhyay AK. Anomalous high pressure behaviour in nanosized rare earth sesquioxides. NANOTECHNOLOGY 2008; 19:115703. [PMID: 21730563 DOI: 10.1088/0957-4484/19/11/115703] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
We report Raman spectroscopic studies of the nanosized rare earth sesquioxides, namely yttrium sesquioxide (Y(2)O(3)), gadolinium sesquioxide (Gd(2)O(3)) and samarium sesquioxide (Sm(2)O(3)), under high pressure. The samples were characterized using x-ray diffraction, Raman spectroscopy and atomic force microscopy at atmospheric pressures. Y(2)O(3) and Gd(2)O(3) were found to be cubic at ambient, while Sm(2)O(3) was found to be predominantly cubic with a small fraction of monoclinic phase. The strongest Raman peaks are observed at 379, 344 and 363 cm(-1), respectively, for Y(2)O(3), Sm(2)O(3) and Gd(2)O(3). All the samples were found to be nanosized with 50-90 nm particle sizes. The high pressures were generated using a Mao-Bell type diamond anvil cell and a conventional laser Raman spectrometer is used to monitor the pressure-induced changes. Y(2)O(3) seems to undergo a crystalline to partial amorphous transition when pressurized up to about 19 GPa, with traces of hexagonal phase. However, on release of pressure, the hexagonal phase develops into the dominant phase. Gd(2)O(3) is also seen to develop into a mixture of amorphous and hexagonal phases on pressurizing. However, on release of pressure Gd(2)O(3) does not show any change and the transformation is found to be irreversible. On the other hand, Sm(2)O(3) shows a weakening of cubic phase peaks while monoclinic phase peaks gain intensity up to about a pressure of 6.79 GPa. However, thereafter the monoclinic phase peaks also reduce in intensity and mostly disordering sets in which does not show significant reversal as the pressure is released. The results obtained are discussed in detail.
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Affiliation(s)
- Nita Dilawar
- Pressure & Vacuum Standards, National Physical Laboratory, Dr K S Krishnan Road, New Delhi 110012, India
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Heiba ZK, Arda L. X-ray diffraction analysis of powder and thin film of (Gd1-xYx)2O3 prepared by sol-gel process. CRYSTAL RESEARCH AND TECHNOLOGY 2008. [DOI: 10.1002/crat.200710997] [Citation(s) in RCA: 21] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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Kukli K, Hatanpää T, Ritala M, Leskelä M. Atomic Layer Deposition of Gadolinium Oxide Films. ACTA ACUST UNITED AC 2007. [DOI: 10.1002/cvde.200706631] [Citation(s) in RCA: 17] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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Lu HL, Chen W, Ding SJ, Xu M, Zhang DW, Wang LK. Quantum chemical study of adsorption and dissociation of H2S on the gallium-rich GaAs (001)-4 x 2 surface. J Phys Chem B 2007; 110:9529-33. [PMID: 16686499 DOI: 10.1021/jp057267a] [Citation(s) in RCA: 9] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/28/2022]
Abstract
H(2)S adsorption and dissociation on the gallium-rich GaAs(001)-4 x 2 surface is investigated using hybrid density functional theory. Starting from chemisorbed H(2)S on the GaAs(001)-4 x 2 surface, two possible reaction routes have been proposed. We find that H(2)S adsorbs molecularly onto GaAs(001)-4 x 2 via the formation of a dative bond, and this process is exothermic with adsorption energy of 6.6 kcal/mol. For the first reaction route, one of the H atoms from the chemisorbed H(2)S is transferred to a second-layer As atom and the dissociated SH is inserted into the Ga-As bond with an activation barrier of 8.2 kcal/mol, which is found to be 29.3 kcal/mol more stable than the reactants. For the second case, the dissociated species may insert themselves into the Ga-Ga dimer resulting in the Ga-H-Ga and Ga-HS-Ga bridge-bonded states, which are found to be 29.8 and 22.2 kcal/mol more stable than the reactants, respectively. However, the calculations also show that the activation barrier (16.1 kcal/mol) for chemisorbed H(2)S dissociation through the second route is higher than the transfer of one H atom into a second-layer As atom. As a result, we conclude that sulfur insertion into the Ga-As bond is more kinetically favorable.
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Affiliation(s)
- Hong-Liang Lu
- State Key Laboratory of ASIC and System, Department of Microelectronics, Fudan University, Shanghai 200433, People's Republic of China
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Dezelah CL, Myllymäki P, Päiväsaari J, Arstila K, Niinistö L, Winter CH. The growth of ErxGa2−xO3films by atomic layer deposition from two different precursor systems. ACTA ACUST UNITED AC 2007. [DOI: 10.1039/b616443a] [Citation(s) in RCA: 13] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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Song X, Zhang J, Li E, Lu N, Yin F. Preparation and characterization of rare-earth bulks with controllable nanostructures. NANOTECHNOLOGY 2006; 17:5584-5589. [PMID: 21727328 DOI: 10.1088/0957-4484/17/22/010] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/31/2023]
Abstract
The preparation and characterization of pure rare-earth-metal bulks with controllable nanostructures are reported in this paper. A novel 'oxygen-free' in situ synthesis technique that combines inert-gas condensation with spark plasma sintering (SPS) technology is proposed. Taking into account the special mechanisms of SPS consolidation and the scale effects of nanoparticles, we introduced practical procedures for preparing rare-earth bulks of amorphous, mixed amorphous and nanocrystals, and nanocrystalline microstructures, respectively. Compared with the conventional polycrystalline bulk, these nanostructured bulks exhibit substantially improved physical and mechanical properties. This technique enables comprehensive studies on the microstructures and properties of a large variety of nanostructured metallic materials that are highly reactive in the air.
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Affiliation(s)
- Xiaoyan Song
- College of Materials Science and Engineering, Key Laboratory of Advanced Functional Materials, Ministry of Education, Beijing University of Technology, Beijing 100022, People's Republic of China
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Jones A, Aspinall H, Chalker P, Potter R, Manning T, Loo Y, O'Kane R, Gaskell J, Smith L. MOCVD and ALD of High-k Dielectric Oxides Using Alkoxide Precursors. ACTA ACUST UNITED AC 2006. [DOI: 10.1002/cvde.200500023] [Citation(s) in RCA: 54] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/10/2022]
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42
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Characterization of crystalline rare-earth oxide high-K dielectrics grown by molecular beam epitaxy on silicon carbide. ACTA ACUST UNITED AC 2006. [DOI: 10.1116/1.2214702] [Citation(s) in RCA: 25] [Impact Index Per Article: 1.3] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
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Päiväsaari J, Niinistö J, Arstila K, Kukli K, Putkonen M, Niinistö L. High Growth Rate of Erbium Oxide Thin Films in Atomic Layer Deposition from (CpMe)3Er and Water Precursors. ACTA ACUST UNITED AC 2005. [DOI: 10.1002/cvde.200506396] [Citation(s) in RCA: 42] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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Potter RJ, Chalker PR, Manning TD, Aspinall HC, Loo YF, Jones AC, Smith LM, Critchlow GW, Schumacher M. Deposition of HfO2, Gd2O3 and PrOx by Liquid Injection ALD Techniques. ACTA ACUST UNITED AC 2005. [DOI: 10.1002/cvde.200406348] [Citation(s) in RCA: 59] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/07/2022]
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Aspinall H, Gaskell J, Loo Y, Jones A, Chalker P, Potter R, Smith L, Critchlow G. Growth of Neodymium Oxide This Films by Liquid Injection MOCVD Using a New Neodymium Alkoxide Precursor. ACTA ACUST UNITED AC 2004. [DOI: 10.1002/cvde.200306310] [Citation(s) in RCA: 22] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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Loo Y, Potter R, Jones A, Aspinall H, Gaskell J, Chalker P, Smith L, Critchlow G. Growth of Gadolinium Oxide This Films by Liquid Injection MOCVD Using a New Gadolinium Alkoxide Precursor. ACTA ACUST UNITED AC 2004. [DOI: 10.1002/cvde.200406313] [Citation(s) in RCA: 18] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/09/2022]
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47
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Dakhel A. Optical and dielectric properties of gadolinium–indium oxide films prepared on Si (1 0 0) substrate. Chem Phys Lett 2004. [DOI: 10.1016/j.cplett.2004.06.094] [Citation(s) in RCA: 19] [Impact Index Per Article: 0.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/15/2022]
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Niinist� L, Nieminen M, P�iv�saari J, Niinist� J, Putkonen M, Nieminen M. Advanced electronic and optoelectronic materials by Atomic Layer Deposition: An overview with special emphasis on recent progress in processing of high-k dielectrics and other oxide materials. ACTA ACUST UNITED AC 2004. [DOI: 10.1002/pssa.200406798] [Citation(s) in RCA: 291] [Impact Index Per Article: 13.9] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/08/2022]
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49
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Jones AC, Aspinall HC, Chalker PR, Potter RJ, Kukli K, Rahtu A, Ritala M, Leskelä M. Some recent developments in the MOCVD and ALD of high-κ dielectric oxides. ACTA ACUST UNITED AC 2004. [DOI: 10.1039/b405525j] [Citation(s) in RCA: 77] [Impact Index Per Article: 3.7] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022]
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50
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