Krisyuk VV, Samélor D, Turgambaeva AE, Esvan J, Korolkov IV, Maksimovskiy EA, Trubin SV, Shevtsov YV, Vahlas C. MONITORING COMPOSITION AND STRUCTURE OF MOCVD ZrO2-BASED MULTICOMPONENT FILMS BY INNOVATIVE MIXED METAL-ORGANIC PRECURSORS.
J STRUCT CHEM+ 2020. [DOI:
10.1134/s0022476620110074]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/23/2022]