Nanoscale 2.5-dimensional surface patterning with plasmonic lithography

We report an extension of plasmonic lithography to nanoscale 2.5-dimensional (2.5D) surface patterning. To obtain the impulse response of a plasmonic lithography system, we described the field distribution of a point dipole source generated by a metallic ridge aperture with a theoretical model using the concepts of quasi-spherical waves and surface plasmon-polaritons. We performed deconvolution to construct an exposure map of a target shape for patterning. For practical applications, we fabricated several nanoscale and microscale structures, such as a cone, microlens array, nanoneedle, and a multiscale structure using the plasmonic lithography system. We verified the possibility of applying plasmonic lithography to multiscale structuring from a few tens of nanometres to a few micrometres in the lateral dimension. We obtained a root-mean-square error of 4.7 nm between the target shape and the patterned shape, and a surface roughness of 11.5 nm.

Fabrication, characterization, and applications of microlenses

Microlenses (MLs) and microlens arrays (MLAs) are assuming an increasingly important role in optical devices. In response to this rapid evolution in technology, emphasis is being placed on research into new manufacturing methods for these devices as well as the characterization of their performance. This paper provides an overview of the fabrication of MLs and MLAs by electrical, mechanical, chemical, and optical methods. As each processing method has distinct advantages and limitations, the most significant characteristic parameters and the measurement of these parameters are discussed for each method. These parameters are then used as indices to evaluate and improve each of the processing methods. Some examples of practical applications of MLAs, especially for micromechanical optoelectronic devices, are also given. This paper aims to summarize the present development and the state of the art in processing technology of MLs and MLAs.

Rapid fabrication of thermoplastic polymer refractive microlens array using contactless hot embossing technology

A thermoplastic polymer refractive microlens array has been rapidly fabricated by contactless hot embossing technology through the stainless steel template with micro through-holes array, which has a diameter of 150 µm and a pitch of 185 µm. By optimizing the technical parameters including heating and demoulding temperature, loading pressure, loading and pressure holding time, a series of high quality microlenses arrays of different sags could be obtained. In addition, the sag and the radius of curvature of the microlens are controllable. The geometrical and optical properties of the microlenses are measured and the influence of temperature and pressure duration on the optical properties of the microlenses are analysed. The results show good surface features and optical performances. Unlike previous contactless hot embossing, a low cost and durable stainless steel template was utilized instead of silicon or nickel mold to avoid valuable equipments and complicated fabrication procedure. Besides, the whole contactless hot embossing process was absence of vacuum equipment. We think that the technology could be an attractive high flexibility method for enhancing efficiency and reducing cost.

Fabrication of 3D microstructures from interactions of immiscible liquids with a structured surface

A new lithography technique is presented that exploits the interactions of immiscible liquids with a structured surface. This highly parallel, "low-tech" method requires no dedicated equipment and easily produces curved and/or multi-level structures out of a variety of photoactive and non-photoactive materials.

Modeling and simulation of the retina-like image sensor based on space-variant lens array

A retina-like image sensor based on a space-variant lens array is proposed. First, the mathematical models of the proposed image sensor and its space-variant lens array are developed and verified. Second, the relationships among the parameters of the space-variant lens have been simulated and discussed. Finally, some conclusions are deduced, which will help to result in a retina-like image sensor with the characteristics of high speed, large resolution, high sensitivity, and big planar array, etc.

Fabrication of microlens arrays by localized hydrolysis in water droplet microreactors

We report a facile self-assembly strategy for fabricating TiO2 microlens arrays by localized hydrolysis of TiCl4 precursor in water droplets. Microcontact printing was used to define hydrophilic areas on a substrate for space resolved hydrolytic reaction. The water droplets served as the templates, reactant, and microreactors. Highly ordered TiO2 microlens arrays could be produced, which exhibit excellent ability to focus light. Because both size and shape of the final TiO2 microlens can be controlled by the printed chemical pattern and the precursor concentration, it is possible to define TiO2 microlens arrays with different imaging properties. This new method shows attractive features of simplicity, low cost, and requires no heating process, hence is suitable for a range of applications.

Fabrication of polymer micro-lens array with pneumatically diaphragm-driven drop-on-demand inkjet technology

The paper reports an effective method to fabricate micro-lens arrays with the ultraviolet-curable polymer, using an original pneumatically diaphragm-driven drop-on-demand inkjet system. An array of plano convex micro-lenses can be formed on the glass substrate due to surface tension and hydrophobic effect. The micro-lens arrays have uniform focusing function, smooth and real planar surface. The fabrication process showed good repeatability as well, fifty micro-lenses randomly selected form 9 × 9 miro-lens array with an average diameter of 333.28μm showed 1.1% variations. Also, the focal length, the surface roughness and optical property of the fabricated micro-lenses are measured, analyzed and proved satisfactory. The technique shows great potential for fabricating polymer micro-lens arrays with high flexibility, simple technological process and low production cost.

Analysis of low F-number dual micro-axilens array with binary structures by rigorous electromagnetic theory

We investigate a two-dimensional low F-number dual micro-axilens array with binary structures based on a rigorous electromagnetic theory. The focal characteristics of a binary dual micro-axilens array (BDMA), including axial performances (focal depth and focal shift) and transverse performances (focal spot size and diffraction efficiency), have been analyzed in detail for different F-numbers, different incident polarization (TE and TM) waves, and different distances between micro-axilens. Numerical results reveal that the interference effect of a BDMA is not very evident, which is useful for building a BDMA with a high fill factor, and the focal characteristics of a BDMA are sensitive to the polarization of an incident wave. The comparative results have also shown that the diffraction efficiency of a BDMA will increase and the focal spot size of a BDMS will decrease when the F-number increases, for both TE polarization and TM polarization, respectively. It is expected that this investigation will provide useful insight into the design of micro-optical elements with high integration.