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Li L, Chang KC, Lin X, Lai YC, Zhang R, Kuo TP. Variable-temperature activation energy extraction to clarify the physical and chemical mechanisms of the resistive switching process. NANOSCALE 2020; 12:15721-15724. [PMID: 32677652 DOI: 10.1039/d0nr04053c] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/11/2023]
Abstract
This study investigates the physical and chemical mechanisms during the resistive switching process by means of obtaining the activation energy in the reaction procedure. From the electrochemical and electrical measurement analysis results of HfO2-based resistive random access memory (RRAM), it can be observed that the chemical reaction during the reset process is consistent with the first-order reaction law. The activation energy, Ea, is determined from the reaction rate constant k under a varying-temperature environment in the reset process. The whole reset chemical reaction process can be divided into five phases involving N-O bond breaking, O-O bond breaking and triple-step oxygen ion migration. The methodology of the activation energy determination carried out in this study showcases a distinct approach to elucidate the resistive switching mechanism of RRAM and offers insight into RRAM design for future potential application.
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Affiliation(s)
- Lei Li
- School of Electronic and Computer Engineering, Peking University, Shenzhen Graduate School, Shenzhen 518055, China. and Department of Materials Science and Engineering, Research Center for Sustainable Energy and Nanotechnology, National Chung Hsing University, Taichung 40227, Taiwan
| | - Kuan-Chang Chang
- School of Electronic and Computer Engineering, Peking University, Shenzhen Graduate School, Shenzhen 518055, China.
| | - Xinnan Lin
- School of Electronic and Computer Engineering, Peking University, Shenzhen Graduate School, Shenzhen 518055, China.
| | - Ying-Chih Lai
- Department of Materials Science and Engineering, Research Center for Sustainable Energy and Nanotechnology, National Chung Hsing University, Taichung 40227, Taiwan
| | - Rui Zhang
- School of Electronic and Computer Engineering, Peking University, Shenzhen Graduate School, Shenzhen 518055, China.
| | - Tze-Peng Kuo
- Department of Physics, National Sun Yat-sen University, Kaohsiung 804, Taiwan and Institute of Materials and Optoelectronics, National Sun Yat-sen University, Kaohsiung 804, Taiwan
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Resistive Switching Characteristics of HfO 2 Thin Films on Mica Substrates Prepared by Sol-Gel Process. NANOMATERIALS 2019; 9:nano9081124. [PMID: 31382660 PMCID: PMC6723579 DOI: 10.3390/nano9081124] [Citation(s) in RCA: 37] [Impact Index Per Article: 7.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 07/15/2019] [Revised: 07/30/2019] [Accepted: 08/02/2019] [Indexed: 12/02/2022]
Abstract
The resistive switching (RS) characteristics of flexible films deposited on mica substrates have rarely been reported upon, especially flexible HfO2 films. A novel flexible Au/HfO2/Pt/mica resistive random access memory device was prepared by a sol-gel process, and a Au/HfO2/Pt/Ti/SiO2/Si (100) device was also prepared for comparison. The HfO2 thin films were grown into the monoclinic phase by the proper annealing process at 700 °C, demonstrated by grazing-incidence X-ray diffraction patterns. The ratio of high/low resistance (off/on) reached 1000 and 50 for the two devices, respectively, being relatively stable for the former but not for the latter. The great difference in ratios for the two devices may have been caused by different concentrations of the oxygen defect obtained by the X-ray photoelectron spectroscopy spectra indicating composition and chemical state of the HfO2 thin films. The conduction mechanism was dominated by Ohm’s law in the low resistance state, while in high resistance state, Ohmic conduction, space charge limited conduction (SCLC), and trap-filled SCLC conducted together.
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Bipolar Cu/HfO 2/p ++ Si Memristors by Sol-Gel Spin Coating Method and Their Application to Environmental Sensing. Sci Rep 2019; 9:9983. [PMID: 31292515 PMCID: PMC6620357 DOI: 10.1038/s41598-019-46443-x] [Citation(s) in RCA: 27] [Impact Index Per Article: 5.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/15/2018] [Accepted: 06/28/2019] [Indexed: 11/12/2022] Open
Abstract
In this paper, the memristive switching behavior of Cu/ HfO2/p++ Si devices fabricated by an organic-polymer-assisted sol-gel spin-coating method, coupled with post-annealing and shadow-mask metal sputtering steps, is examined. HfO2 layers of about 190 nm and 80 nm, are established using cost-effective spin-coating method, at deposition speeds of 2000 and 4000 rotations per minute (RPM), respectively. For two types of devices, the memristive characteristics (Von, Ion, and Vreset) and device-to-device electrical repeatability are primarily discussed in correlation with the oxide layer uniformity and thickness. The devices presented in this work exhibit an electroforming free and bipolar memory-resistive switching behavior that is typical of an Electrochemical Metallization (ECM) I-V fingerprint. The sample devices deposited at 4000 RPM generally show less variation in electrical performance parameters compared to those prepared at halved spin-coating speed. Typically, the samples prepared at 4000 RPM (n = 8) display a mean switching voltage Von of 3.0 V (±0.3) and mean reset voltage Vreset of −1.1 V (±0.5) over 50 consecutive sweep cycles. These devices exhibit a large Roff/Ron window (up to 104), and sufficient electrical endurance and retention properties to be further examined for radiation sensing. As they exhibit less statistical uncertainty compared to the samples fabricated at 2000 RPM, the devices prepared at 4000 RPM are tested for the detection of soft gamma rays (emitted from low-activity Cs-137 and Am-241 radioactive sources), by assessing the variation in the on-state resistance value upon exposure. The analysis of the probability distributions of the logarithmic Ron values measured over repeated ON-OFF cycles, before, during and after exposing the devices to radiation, demonstrate a statistical difference. These results pave the way for the fabrication and development of cost-effective soft-gamma ray detectors.
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Gao Q, Huang A, Hu Q, Zhang X, Chi Y, Li R, Ji Y, Chen X, Zhao R, Wang M, Shi H, Wang M, Cui Y, Xiao Z, Chu PK. Stability and Repeatability of a Karst-like Hierarchical Porous Silicon Oxide-Based Memristor. ACS APPLIED MATERIALS & INTERFACES 2019; 11:21734-21740. [PMID: 31124360 DOI: 10.1021/acsami.9b06855] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/09/2023]
Abstract
A memristor architecture based on porous oxide materials has the potential to be used in artificial synaptic devices. Herein, we present a memristor system employing a karst-like hierarchically porous (KLHP) silicon oxide structure with good stability and repeatability. The KLHP structure prepared by an electrochemical process and thermal oxidation exhibits high ON-OFF ratios up to 105 during the endurance test, and the data can be maintained for 105 s at a small read voltage 0.1 V. The mechanism of lithium ion migration in the porous silicon oxide structure has been discussed by a simulated model. The porous silicon oxide-based memristor is very promising because of the enhanced performance as well as easily accessed neuromorphic computing.
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Affiliation(s)
- Qin Gao
- School of Physics , Beihang University , Beijing 100191 , China
| | - Anping Huang
- School of Physics , Beihang University , Beijing 100191 , China
| | - Qi Hu
- School of Physics , Beihang University , Beijing 100191 , China
| | - Xinjiang Zhang
- School of Physics , Beihang University , Beijing 100191 , China
| | - Yu Chi
- School of Physics , Beihang University , Beijing 100191 , China
| | - Runmiao Li
- School of Physics , Beihang University , Beijing 100191 , China
| | - Yuhang Ji
- School of Physics , Beihang University , Beijing 100191 , China
| | - Xueliang Chen
- School of Physics , Beihang University , Beijing 100191 , China
| | - Rumeng Zhao
- School of Physics , Beihang University , Beijing 100191 , China
| | - Meng Wang
- School of Physics , Beihang University , Beijing 100191 , China
| | - Hongliang Shi
- School of Physics , Beihang University , Beijing 100191 , China
| | - Mei Wang
- School of Physics , Beihang University , Beijing 100191 , China
| | - Yimin Cui
- School of Physics , Beihang University , Beijing 100191 , China
| | - Zhisong Xiao
- School of Physics , Beihang University , Beijing 100191 , China
| | - Paul K Chu
- Department of Physics and Department of Materials Science and Engineering , City University of Hong Kong , Tat Chee Avenue , Kowloon 999077 , Hong Kong , China
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