Algamili AS, Khir MHM, Dennis JO, Ahmed AY, Alabsi SS, Ba Hashwan SS, Junaid MM. A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices.
NANOSCALE RESEARCH LETTERS 2021;
16:16. [PMID:
33496852 PMCID:
PMC7838232 DOI:
10.1186/s11671-021-03481-7]
[Citation(s) in RCA: 43] [Impact Index Per Article: 14.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/29/2020] [Accepted: 01/14/2021] [Indexed: 05/14/2023]
Abstract
Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
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