LIDAR system with electromagnetic two-axis scanning micromirror based on indirect time-of-flight method

Development of the high angular resolution 360° LiDAR based on scanning MEMS mirror

Light detection and ranging (LiDAR) using various operational principles has been applied in many fields, e.g., robotics navigation, autonomous vehicles, unmanned aerial flyers, land surveying, etc. The multichannel LiDAR system is of great importance in the field of autonomous driving due to its larger field of view (FoV). However, the number of transceivers limits the vertical angular resolution of multichannel LiDAR systems and makes them costly. On the other hand, the emergence of microelectromechanical systems (MEMS) mirrors may provide a highly promising solution to a low-cost, high angular resolution LiDAR system. We have demonstrated a MEMS mirror-based 360° LiDAR system with high angular resolution and will present the detailed design process and obtained experimental results in this paper. With the combination of the MEMS mirror and a rotation platform for the LiDAR system, a 360° × 8.6° (horizontal × vertical) FoV was achieved. Compared with existing commercial multichannel 360° LiDAR systems, our system has 13.8 times better angular resolution than the Velodyne HDL-64 LiDAR sensor. The experimental results verified an excellent performance of 0.07° × 0.027° (horizontal × vertical) angular resolution, which enhances the panoramic scanning and imaging capability of the LiDAR system, potentially providing more accurate 3D scanning applications in areas such as autonomous vehicles, indoor surveying, indoor robotics navigation, etc.