Dil JG, Greve PF, Mesman W. Measurement of steep aspheric surfaces.
APPLIED OPTICS 1978;
17:553-557. [PMID:
20197829 DOI:
10.1364/ao.17.000553]
[Citation(s) in RCA: 1] [Impact Index Per Article: 0.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/28/2023]
Abstract
A method of measuring the shape of high numerical aperture (NA <0.95), convex or concave, aspheric surfaces is described. The aspheric slope may be as large as 1200 waves/rad. The method is applied in two steps. First, a standard measurement is performed to obtain a reference surface. Second, the reproducibility of the fabrication of aspheric surfaces is tested by means of a holographic comparison method. The measuring error is smaller than 0.1 microm.
Collapse