Performance of multilayer coated diffraction gratings in the EUV

Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38-nm wavelength

A Sc-Si multilayer coating was applied to a replica of the 3600 groove/mm grating, developed for the SO82A spectroheliograph that flew on the Skylab mission, for the purpose of enhancing the normal-incidence efficiency in the extreme-ultraviolet region. The efficiency, measured at an angle of incidence of 6 degrees with synchrotron radiation, had a maximum value of 7.2% at a wavelength of 38 nm and was a factor of 3 higher than the efficiency of the gold-coated Skylab grating. The measured efficiency of the Sc-Si grating was in good agreement with the efficiency calculated by use of the modified integral method.

On-blaze operation of a Mo/Si multilayer-coated, concave diffraction grating in the 136-142-A wavelength region and near normal incidence

The efficiency and resolving power of a concave, 2400-groove/mm, blazed diffraction grating that had a Mo/Si multilayer coating were determined. The multilayer coating had a peak reflectance of 55% at 140-A near normal incidence. The efficiency of the multilayer grating for wavelengths in the 136-139-A range was 2% near normal incidence. This efficiency was a factor of 150 greater than the efficiency of a sister replica Au-coated grating in the same wavelength region. The resolving power of the multilayercoated grating in the third order of a V viii transition with a first-order wavelength of 140.451 A was 9100. Comparisons with the Au-coated grating indicated that the application of the multilayer coating did not affect the resolving power or the blaze angle.

Dual-waveband operation of a multilayer-coated diffraction grating in the soft x-ray range at near-normal incidence

A concave diffraction grating (2400 grooves/mm) coated with a Si/Mo multilayer has an efficiency of 2.5% at 290 A and a resolving power of 14,000 in third order of 156 A.

Extreme ultraviolet performance of a multilayer coated high density toroidal grating

The performance of a multilayer coated diffraction grating has been evaluated at EUV wavelengths both in terms of absolute efficiency and spectral resolution. The application of a ten-layer Ir/Si multilayer coating to a 3600-lines/mm blazed toroidal replica grating produced a factor of 9 enhancement in peak efficiency near the design wavelength approximately 30 nm in first order, without degrading its excellent quasistigmatic spectral resolution. The measured EUV efficiency peaked at 3.3% and was improved over the full spectral range between 25 and 35 nm compared with the premultilayer replica which had a standard gold coating. In addition, the grating's spectral resolution of >5000 was maintained.