Microlenses as Amplification for CCD-Based Detection Devices for Screening Applications in Biology, Biochemistry, and Chemistry

Using Micromachined Molds, Partial-curing PDMS Bonding Technique, and Multiple Casting to Create Hybrid Microfluidic Chip for Microlens Array

In a previous study, we presented a novel manufacturing process for the creation of 6 × 6 and 8 × 8 microlens arrays (MLAs) comprising lenses with diameters of 1000 μm, 500 μm, and 200 μm within an area that covers 10 mm × 10 mm. In the current study, we revised the manufacturing process to allow for the fabrication of MLAs of far higher density (15 × 15 and 29 × 29 within the same area). In this paper, we detail the revised manufacturing scheme, including the micromachining of molds, the partial-curing polydimethylsiloxane (PDMS) bonding used to fuse the glass substrate and PDMS, and the multi-step casting process. The primary challenges that are involved in creating MLAs of this density were ensuring uniform membrane thickness and preventing leakage between the PDMS and glass substrate. The experiment results demonstrated that the revised fabrication process is capable of producing high density arrays: Design I produced 15 × 15 MLAs with lens diameter of 0.5 mm and fill factor of 47.94%, while Design II produced 29 × 29 MLAs with lens diameter of 0.25 mm and fill factor of 40.87%. The partial-curing PDMS bonding system also proved to be effective in fusing PDMS with glass (maximum bonding strength of approximately six bars). Finally, the redesigned mold was used to create PDMS membranes of high thickness uniformity (coefficient of variance <0.07) and microlenses of high lens height uniformity (coefficient of variance <0.15).

Optimization method of tool path generation considering the edge of lenslets for a microlens array in FTS diamond turning

Shape accuracy is an important parameter for evaluating the quality of microlens arrays. In fast tool servo (FTS) diamond turning, the generation of tool path has a significant influence on shape accuracy. By analyzing the distribution of the cutting points at the edge of the lenslets and the linearization error of the original tool path generated by the constant-angle method for the microlens array, there is overcut at the edge of the lenslets. Previous tool path planning focused on consideration of the entire surface, and the error on the edge of the lens was rarely considered. Therefore, an optimization method of tool path generation based on interpolation of the lens edge is proposed. Compared to the tool path generated by the conventional constant-angle method, the simulation and experimental results show that the proposed method can effectively reduce the overcut of the lens edge.

New design model for high efficiency cylindrical diffractive microlenses

A new model, i.e., the decreasing thickness model (DTM) is proposed and employed for designing the cylindrical diffractive microlenses (CDMs). Focal performances of the designed CDMs are theoretically investigated by solving Maxwell’s equations with the boundary element method. For comparison, the CDMs designed by the traditional equal thickness model (ETM) are also studied. Theoretical simulations demonstrate that focal performances of the designed CDMs are improved a lot via replacing the traditional ETM with the proposed DTM. Concretely, the focal efficiency is heightened and the focal spot size is shrunk. Experimental measurements verify the theoretical simulations well. Especially, the above-mentioned improvements become more prominent for the CDM with a higher numerical aperture.

Femtosecond Laser Fabrication of Cavity Microball Lens (CMBL) inside a PMMA Substrate for Super-Wide Angle Imaging

Since microlenses have to date been fabricated primarily by surface manufacturing, they are highly susceptible to surface damage, and their microscale size makes it cumbersome to handle. Thus, cavity lenses are preferred, as they alleviate these difficulties associated with the surface-manufactured microlenses. Here, it is shown that a high repetition femtosecond laser can effectively fabricate cavity microball lenses (CMBLs) inside a polymethyl methacrylate slice. Optimal CMBL fabrication conditions are determined by examining the pertinent parameters, including the laser processing time, the average irradiation power, and the pulse repetition rates. In addition, a heat diffusion modeling is developed to better understand the formation of the spherical cavity and the slightly compressed affected zone surrounding the cavity. A micro-telescope consisting of a microscope objective and a CMBL demonstrates a super-wide field-of-view imaging capability. Finally, detailed optical characterizations of CMBLs are elaborated to account for the refractive index variations of the affected zone. The results presented in the current study demonstrate that a femtosecond laser-fabricated CMBL can be used for robust and super-wide viewing micro imaging applications.

Fabrication of embedded microball lens in PMMA with high repetition rate femtosecond fiber laser

Embedded microball lenses with superior optical properties function as convex microball lens (VMBL) and concave microball lens (CMBL) were fabricated inside a PMMA substrate with a high repetition rate femtosecond fiber laser. The VMBL was created by femtosecond laser-induced refractive index change, while the CMBL was fabricated due to the heat accumulation effect of the successive laser pulses irradiation at a high repetition rate. The processing window for both types of the lenses was studied and optimized, and the optical properties were also tested by imaging a remote object with an inverted microscope. In order to obtain the microball lenses with adjustable focal lengths and suppressed optical aberration, a shape control method was thus proposed and examined with experiments and ZEMAX® simulations. Applying the optimized fabrication conditions, two types of the embedded microball lenses arrays were fabricated and then tested with imaging experiments. This technology allows the direct fabrication of microlens inside transparent bulk polymer material which has great application potential in multi-function integrated microfluidic devices.

A doublet microlens array for imaging micron-sized objects

We present a high-numerical aperture, doublet microlens array for imaging micron-sized objects. The proposed doublet architecture consists of glass microspheres trapped on a predefined array of silicon microholes and covered with a thin polymer layer. A standard silicon microfabrication process and a novel fluidic assembly technique were combined to obtain an array of 56 μm diameter microlenses with a numerical aperture of ~0.5. Using such an array, we demonstrated brightfield and fluorescent image formation of objects directly on a CCD sensor without the use of intermediate lenses. The proposed technology is a significant advancement toward the unmet need of inexpensive, miniaturized optical modules which can be further integrated with lab-on-chip microfluidic devices and photonic chips for a variety of high-end imaging/detection applications.

Fabrication of ellipticity-controlled microlens arrays by controlling the parameters of the multiple-exposure two-beam interference technique

We demonstrate a promising method for fabrication of plastic microlens arrays (MLAs) with a controllable ellipticity and structure, by using the combination of multiple-exposure two-beam interference and plastic replication techniques. Multiple exposures of a two-beam interference pattern with a wavelength of 442 nm into a thick positive photoresist (AZ-4620) were used to form different two-dimensional periodic structures. Thanks to the developing effect of the positive photoresist, fabricated structures consisting of hemielliptical- or hemispherical-shaped concave holes were obtained. By controlling the rotation angle between different exposures, both the shape and structure of the holes varied. By adjusting the dosage ratio between different exposures, the shape of the holes was modified while the structure of the holes was unchanged. The photoresist concave microstructures were then transferred to plastic MLAs by employing replication and embossing techniques. The fabricated MLAs were characterized by a scanning electron microscope and atomic force microscope measurements. We show that the ellipticity of the microlenses can be well controlled from 0 (hemispherical) to 0.96 (hemielliptical) by changing the rotation angle or dosage ratio between the two exposures.

Fabrication of microlens array diffuser films with controllable haze distribution by combination of breath figures and replica molding methods

This work demonstrates the fabrication of a simple, low-cost microlens array (MLA) diffuser film with controllable haze distribution (diffusion effect) by a combination of "breath figures" (BFs) and micro-replica molding methods. Polystyrene (PS) molds obtained by BFs method contain concave, hexagonal packed air holes formed by the condensation of water vapor on cooling surfaces in a chamber in which relevant influence factors can be controlled. The sizes of the air holes in the BFs PS molds can be controlled by varying such factors as chamber temperature, chamber relative humidity, substrate temperature and others. The temperature distribution on the substrate affects the distribution of diameters of the air holes formed in a BFs PS mold. Convex PDMS (poly-dimethylsiloxane) MLAs were obtained by molding from the BFs PS molds. The focal lengths of MLAs were measured and compared with theoretical values. The diffusion effect of the diffuser films with MLAs of diameters 6 microm and 3 microm were compared. The results indicate that an MLA with a smaller diameter has a larger diffusion effect.