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Liu H, Li H, Tao J, Liu J, Yang J, Li J, Song J, Ren J, Wang M, Yang S, Song X, Wang Y. Single Crystalline Transparent Conducting F, Al, and Ga Co-Doped ZnO Thin Films with High Photoelectrical Performance. ACS APPLIED MATERIALS & INTERFACES 2023; 15:22195-22203. [PMID: 37129068 DOI: 10.1021/acsami.2c22784] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/03/2023]
Abstract
Transparent conductive film (TCF) is a material that integrates electrical conductivity and optical transparency. It is widely used as an electrode material in thin-film solar cells. However, considerable progress is needed to facilitate its high performance and low-cost preparation. In this study, a preparation scheme for AlF3 and GaF3 co-doped ZnO (FAGZO) thin films was designed and implemented by magnetron sputtering (MS). The mutual restraint between the electrical properties and the wide-spectrum transmission performance of ZnO films was resolved. First-principles calculations showed that the doped ZnO system had n-type conductivity and that the most stable structure was the FO-AlZn-GaZn system. The experimental results verified the theoretical predictions. Single crystalline ZnO transparent conducting films (ZnO-TCFs) of high quality were achieved by MS. After rapid thermal annealing (RTA) treatment, the mobility reached 49.6 cm2/V s, and the resistivity decreased to 3.82 × 10-4 Ω cm. The AT was 90% between 380 and 1200 nm. Furthermore, the application of the prepared FAGZO film in perovskite solar cells (PSCs) has been verified. Compared to the reference indium tin oxide film, the PSCs using the FAGZO film showed higher JSC and power conversion efficiency. These results demonstrate that MS combined with anion and cation co-doping provides an effective means of exploring high-quality and high-performance ZnO-TCFs.
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Affiliation(s)
- Haixu Liu
- College of Science, Hebei North University, Zhangjiakou 075000, China
| | - Hui Li
- School of Information Science and Engineering, Hebei University of Science and Technology, Shijiazhuang 050018, China
| | - Junlei Tao
- Province-Ministry Co-Construction Collaborative Innovation Center of Photovoltaic Technology of Hebei Province, Hebei University, Baoding 071002, China
| | - Jia Liu
- School of Information Science and Engineering, Hebei University of Science and Technology, Shijiazhuang 050018, China
| | - Jinzheng Yang
- College of Science, Hebei North University, Zhangjiakou 075000, China
| | - Junjie Li
- College of Science, Hebei North University, Zhangjiakou 075000, China
- Province-Ministry Co-Construction Collaborative Innovation Center of Photovoltaic Technology of Hebei Province, Hebei University, Baoding 071002, China
| | - Jianmin Song
- College of Sciences, Hebei Agriculture University, Baoding 071001, China
| | - Jie Ren
- School of Science, Hebei University of Science and Technology, Shijiazhuang 050018, China
| | - Min Wang
- School of Information Science and Engineering, Hebei University of Science and Technology, Shijiazhuang 050018, China
| | - Shaopeng Yang
- Province-Ministry Co-Construction Collaborative Innovation Center of Photovoltaic Technology of Hebei Province, Hebei University, Baoding 071002, China
| | - Xin Song
- School of Materials Science and Engineering Jiangsu Engineering Laboratory of Light-Electricity-Heat Energy-Converting Materials and Applications Changzhou University, Changzhou 213164, China
| | - Yanfeng Wang
- College of Science, Hebei North University, Zhangjiakou 075000, China
- Province-Ministry Co-Construction Collaborative Innovation Center of Photovoltaic Technology of Hebei Province, Hebei University, Baoding 071002, China
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