Cai Y, Zhou S, Ma X, Liu D. Fabrication of short-wavelength infrared dual-band-pass filter based on combination of Fabry-Perot filters.
APPLIED OPTICS 2016;
55:9412-9416. [PMID:
27869842 DOI:
10.1364/ao.55.009412]
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Abstract
Dual-band-pass filters are key optical components in dual-spectral detection applications; it is imperative to fabricate them in a relatively simple way for practical use. In this paper, a dual-band-pass filter working in short-wavelength infrared is developed by the combination of two Fabry-Perot (F-P) filters, each having a transparent band. These two filters are designed separately, and deposited at different sides of a substrate. The total layers' number of the dual-band-pass filter is limited to 34; these layers are monitored by the method of direct transmittance level cut monitoring with a single monitor wavelength. The percent of optical extrema monitoring strategy is adopted in the deposition. The spectra of the F-P filters and the dual-band-pass filter are tested. The shorter pass-band's average transmittance is above 84%, the longer one is above 88%, and four of the pass-bands' edge steepness values are 1.4%,2.8%,1.9%, and 1.7%.
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