In situ optical characterization and reengineering of interference coatings

Reverse engineering of e-beam deposited optical filters based on multi-sample photometric and ellipsometric data

A post-production characterization approach based on spectral photometric and ellipsometric data related to a specially prepared set of samples is proposed. Single-layer (SL) and multilayer (ML) sets of samples presenting building blocks of the final sample were measured ex-situ, and reliable thicknesses and refractive indices of the final ML were determined. Different characterization strategies based on ex-situ measurements of the final ML sample were tried, reliability of their results was compared, and the best characterization approach for practical use, when preparation of the mentioned set of samples would be a luxury, is proposed.

Noble Infrared Optical Thickness Monitoring System Based on the Algorithm of Phase-Locked Output Current–Reflectivity Coefficient

With the rapid development of modern science and technology, the application of infrared (IR) optical thin films is increasingly widespread, including in aerospace, autonomous driving, military development, and the fight against Coronavirus Disease 2019 (COVID-19), in which thin film devices play an important role. Similarly, with the improvement of user requirements, the precision requirements for the preparation of optical films are also developing and improving. In this paper, the IR optical thickness monitoring system is studied with the noble algorithm introducing the phase-locked amplifier current and single film reflectivity coefficient. An optical control system is developed to monitor the IR thin film accurately, which aids the IR narrow-band filter film research.

Modified sequential algorithm for the on-line characterization of optical coatings

We present a new algorithm for the on-line determination of thicknesses of deposited layers that can be used in the course of coating production with broadband optical monitoring. The proposed algorithm can be considered as a modification of the well-known sequential algorithm. The main idea of the new algorithm is to re-calculate thicknesses of some of the previously deposited layers along with the determination of the thickness of the last deposited layer. The algorithm implies analytical estimations that enable recalculating only those layer thicknesses that can be found with better accuracy than before. Simulation and computational manufacturing experiments confirm high accuracy of the proposed algorithm.

Automated construction of monochromatic monitoring strategies

We focus our efforts on development of an advanced monochromatic monitoring strategy to assist the optical coating engineer in finding a single wavelength or a sequence of monitoring wavelengths that meet simultaneously several practical demands, namely, specified input and output swing values, specified amplitude of a monitoring signal variation, and the distance between trigger point and the last signal extremum. Additionally, the most important demand is that the number of different monitoring wavelengths must be as small as possible. Manual construction of such a monitoring strategy is almost impossible because of a large number of conditions to be satisfied. We propose an algorithm that automatically generates a monitoring spreadsheet so that all demands can be satisfied as closely as possible. We consider six typical design problems and obtain a series of solutions for each of them. Then, we provide computational simulations of deposition processes assuming that they are controlled by monochromatic monitoring with the monitoring strategy generated by our algorithm, and we demonstrate how an optical coating engineer can select design solutions that exhibit the highest production yields.

Quality control of oblique incidence optical coatings based on normal incidence measurement data

We demonstrate selection of reliable approaches for post-production characterization of oblique incidence multilayer optical coatings. The approaches include choice of input information, selection of adequate coating model, corresponding numerical characterization algorithm, and verification of the results. Applications of the approaches are illustrated with post-production characterization of oblique incidence edge filter, oblique incidence beam splitter and oblique incidence 43-layer quarter-wave mirror.

Postanalyses of an optical multilayer interference filter using numerical reverse synthesis and Rutherford backscattering spectrometry

Post nondestructive analyses of an all-dielectric multilayer Fabry-Perot interference filter developed through a reactive electron beam deposition process have been carried out through numerical reverse engineering of transmission spectra, Rutherford backscattering spectroscopy and quartz crystal monitoring data to derive multilayer geometry, deposited layer thicknesses, densities, refractive indices, compositions, and stoichiometry. These techniques are collectively used to fulfill the missing links with complementary and some supplementary information to inverse synthesize the multilayer geometry. During this investigation it is distinctly understood that the factors associated with real-time deposition have significantly influenced the microscopic parameters, namely, the densities and refractive indices of TiO2 and SiO2 layers. This in turn influenced the layers' geometric (physical) thicknesses during automated quarter-wave optical layer monitoring and consequently affected the experimental spectral characteristics. The role of oxygen has been observed to be significant in controlling the mass densities of these refractory oxide layers. It is further noticed that the layer density values have been significantly perturbed whether the associated TiO2 or SiO2 oxide dielectric films are substoichiometric (oxygen-deficient), stoichiometric, or superstoichiometric (oxygen-enriched).

Computational manufacturing as a tool for the selection of the most manufacturable design

Applications of computational manufacturing experiments (CMEs) for selection of the most manufacturable designs among a variety of different design solutions are demonstrated. We compare design solutions with respect to estimations of their production yields. Computational experiments are performed using two simulation software tools. In the course of CMEs, we take into account all major factors causing errors in our deposition process. Real deposition experiments are in agreement with CMEs; the most manufacturable design exhibits better target performances compared to other designs.

On the reliability of reverse engineering results

Determination of actual parameters of manufactured optical coatings (reverse engineering of optical coatings) provides feedback to the design-production chain and thus plays an important role in raising the quality of optical coatings production. In this paper, the reliability of reverse engineering results obtained using different types of experimental data is investigated. Considered experimental data include offline normal incidence transmittance data, offline ellipsometric data, and online transmittance monitoring data recorded during depositions of all coating layers. Experimental data are obtained for special test quarter-wave mirrors with intentional errors in some layers. These mirrors were produced by a well-calibrated magnetron-sputtering process. The intentional errors are several times higher than estimated errors of layer thickness monitoring, and the reliability of their detection is used as a measure of reliability of reverse engineering results. It is demonstrated that the most reliable results are provided by online transmittance data.

Estimations of production yields for selection of a practical optimal optical coating design

Modern design approaches enable one to construct a series of theoretical designs with excellent spectral properties for almost all optical coating design problems. Selection of a practical optimal design among a variety of possible theoretical designs becomes a key issue. We demonstrate how preproduction estimations of expected production yields can be used for selection of a practical optimal design. The question of reliability of such estimations is also addressed.

All-oxide broadband antireflection coatings by plasma ion assisted deposition: design, simulation, manufacturing and re-optimization

A new all-oxide design for broadband antireflection coatings with significantly reduced impact of deposition errors to the final reflectance is presented. Computational manufacturing including re-optimization during deposition has been used in the design work to account for maximum insensibility of the design with respect to deposition errors typical for plasma ion assisted deposition PIAD. Repeated deposition runs with the deducted monitoring and re-optimization strategy verify the validity of the simulations and the stability of the derived design solution.

Computational manufacturing of optical interference coatings: method, simulation results, and comparison with experiment

Virtual deposition runs have been performed to estimate the production yield of selected oxide optical interference coatings when plasma ion-assisted deposition with an advanced plasma source is applied. Thereby, deposition of each layer can be terminated either by broadband optical monitoring or quartz crystal monitoring. Numerous deposition runs of single-layer coatings have been performed to investigate the reproducibility of coating properties and to quantify deposition errors for the simulation. Variations of the following parameters are considered in the simulation: refractive index, extinction coefficient, and film thickness. The refractive index and the extinction coefficient are simulated in terms of the oscillator model. The parameters are varied using an apodized normal distribution with known mean value and standard deviation. Simulation of variations in the film thickness is performed specific to the selected monitoring strategy. Several deposition runs of the selected oxide interference coatings have been performed to verify the simulation results by experimental data.

Wideband antireflection coatings by combining interference multilayers with structured top layers

The residual reflectance obtained for a broad wavelength range depends mainly on the refractive index of the last layer. Using interference layer stacks composed of naturally available low- and high-index materials, the residual reflection for a broad range cannot be adjusted below a certain limit. However, nanostructured (gradient) and porous layers are effective media with a refractive index lower than that of natural materials. Results demonstrate that an interference layer stack combined with a structured layer as the last layer yields better antireflection properties owing to the low effective index of the structure.