Xiong L, Qi ZM. A Grating Interferometric Acoustic Sensor Based on a Flexible Polymer Diaphragm.
SENSORS (BASEL, SWITZERLAND) 2023;
23:9912. [PMID:
38139757 PMCID:
PMC10747048 DOI:
10.3390/s23249912]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/21/2023] [Revised: 12/12/2023] [Accepted: 12/15/2023] [Indexed: 12/24/2023]
Abstract
This study presents a grating interferometric acoustic sensor based on a flexible polymer diaphragm. A flexible-diaphragm acoustic sensor based on grating interferometry (GI) is proposed through design, fabrication and experimental demonstration. A gold-coated polyethylene terephthalate diaphragm was used for the sensor prototype. The vibration of the diaphragm induces a change in GI cavity length, which is converted into an electrical signal by the photodetector. The experimental results show that the sensor prototype has a flat frequency response in the voice frequency band and the minimum detectable sound pressure can reach 164.8 µPa/√Hz. The sensor prototype has potential applications in speech acquisition and the measurement of water content in oil. This study provides a reference for the design of optical interferometric acoustic sensor with high performance.
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