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Han D, Ma S, Jia Z, Liu P, Jia W, Shang L, Zhai G, Xu B. Morphologies and optical and electrical properties of InGaN/GaN micro-square array light-emitting diode chips. APPLIED OPTICS 2018; 57:2835-2840. [PMID: 29714286 DOI: 10.1364/ao.57.002835] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 12/22/2017] [Accepted: 03/06/2018] [Indexed: 06/08/2023]
Abstract
InGaN/GaN micro-square array light-emitting diode (LED) chips (micro-chips) have been prepared via the focused ion beam (FIB) etching technique, which can not only reduce ohmic contact degradation but also control the aspect ratio precisely in three-dimensional (3D) structure LED (3D-LED) device fabrication. The effects of FIB beam current and micro-square array depth on morphologies and optical and electrical properties of the micro-chips have been studied. Our results show that sidewall surface morphology and optical and electrical properties of the micro-chips degrade with increased beam current. After potassium hydroxide etching with different times, an optimal current-voltage and luminescence performance can be obtained. Combining the results of cathodoluminescence mappings and light output-current characteristics, the light extraction efficiency of the micro-chips is reduced as FIB etch depth increases. The mechanisms of micro-square depth on light extraction have been revealed by 3D finite difference time domain.
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Jiang S, Feng Y, Chen Z, Zhang L, Jiang X, Jiao Q, Li J, Chen Y, Li D, Liu L, Yu T, Shen B, Zhang G. Study on Light Extraction from GaN-based Green Light-Emitting Diodes Using Anodic Aluminum Oxide Pattern and Nanoimprint Lithography. Sci Rep 2016; 6:21573. [PMID: 26902178 PMCID: PMC4763243 DOI: 10.1038/srep21573] [Citation(s) in RCA: 19] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 09/08/2015] [Accepted: 01/27/2016] [Indexed: 11/09/2022] Open
Abstract
An anodic aluminum oxide (AAO) patterned sapphire substrate, with the lattice constant of 520 ± 40 nm, pore dimension of 375 ± 50 nm, and height of 450 ± 25 nm was firstly used as a nanoimprint lithography (NIL) stamp and imprinted onto the surface of the green light-emitting diode (LED). A significant light extraction efficiency (LEE) was improved by 116% in comparison to that of the planar LED. A uniform broad protrusion in the central area and some sharp lobes were also obtained in the angular resolution photoluminescence (ARPL) for the AAO patterned LED. The mechanism of the enhancement was correlated to the fluctuations of the lattice constant and domain orientation of the AAO-pattern, which enabled the extraction of more guided modes from the LED device.
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Affiliation(s)
- Shengxiang Jiang
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
| | - Yulong Feng
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
| | - Zhizhong Chen
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
| | - Lisheng Zhang
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
| | - Xianzhe Jiang
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
| | - Qianqian Jiao
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
| | - Junze Li
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
| | - Yifan Chen
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
| | - Dongsan Li
- Beijing North Microelectronics Co., Ltd., Beijing 100176, China
| | - Lijian Liu
- Beijing North Microelectronics Co., Ltd., Beijing 100176, China
| | - Tongjun Yu
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
| | - Bo Shen
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China
| | - Guoyi Zhang
- State Key Laboratory of Artificial Microstructure and Mesoscopic Physics, School of Physics, Peking University, Beijing 100871, China.,Sino Nitride Semiconductor Co., Ltd., Dongguan 523500, Guangdong, China
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Nie B, Zhou Q, Fu W. Reagent-free photochemical silver dendrite synthesis on a gallium nitride thin film as a SERS-active substrate and catalytic cluster. RSC Adv 2015. [DOI: 10.1039/c4ra16302h] [Citation(s) in RCA: 7] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 11/21/2022] Open
Abstract
A photochemical approach for dendrite synthesis on a GaN substrate is presented.
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Affiliation(s)
- Bei Nie
- Chongqing Institute of Green and Intelligent Technology
- Chinese Academy of Science
- P. R. China
- Department of Clinical Diagnostics and Therapeutics
- Xinan Hospital
| | - Qiuhong Zhou
- Chongqing Institute of Green and Intelligent Technology
- Chinese Academy of Science
- P. R. China
| | - Weiling Fu
- Department of Clinical Diagnostics and Therapeutics
- Xinan Hospital
- Third Military Medical University
- Chongqing
- P. R. China
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Lai CF, Chang CC, Wang MJ, Wu MK. CCT- and CRI-tuning of white light-emitting diodes using three-dimensional non-close-packed colloidal photonic crystals with photonic stop-bands. OPTICS EXPRESS 2013; 21 Suppl 4:A687-A694. [PMID: 24104495 DOI: 10.1364/oe.21.00a687] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/02/2023]
Abstract
This study exhibited the correlated color temperature (CCT)- and color-rendering index (CRI)-tuning behavior of light emission from white light-emitting diodes (WLEDs) using three-dimensional non-close-packed (3D NCP) colloidal photonic crystals (CPhCs). The CCT of approximately 5300 K (characteristic of cold WLEDs) of white light propagated through the NCP CPhCs dropped to 3000 K (characteristic of warm WLEDs) because of the photonic stop-bands based on the photonic band structures of NCP CPhCs. This study successfully developed a novel technique that introduces lower-cost CCT- and CRI-tuning cold WLEDs with a CRI of over 90 that of warm WLEDs by using 3D NCP CPhCs.
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D'Antonio P, Inchingolo AV, Perna G, Capozzi V, Stomeo T, De Vittorio M, Magno G, Grande M, Petruzzelli V, D'Orazio A. Localized surface plasmon resonances in gold nano-patches on a gallium nitride substrate. NANOTECHNOLOGY 2012; 23:455709. [PMID: 23089681 DOI: 10.1088/0957-4484/23/45/455709] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/01/2023]
Abstract
In this paper we describe the design, fabrication and characterization of gold nano-patches, deposited on gallium nitride substrate, acting as optical nanoantennas able to efficiently localize the electric field at the metal-dielectric interface. We analyse the performance of the proposed device, evaluating the transmission and the electric field localization by means of a three-dimensional finite difference time domain (FDTD) method. We detail the fabrication protocol and show the morphological characterization. We also investigate the near-field optical transmission by means of scanning near-field optical microscope measurements, which reveal the excitation of a localized surface plasmon resonance at a wavelength of 633 nm, as expected by the FDTD calculations. Such results highlight how the final device can pave the way for the realization of a single optical platform where the active material and the metal nanostructures are integrated together on the same chip.
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Affiliation(s)
- Palma D'Antonio
- Dipartimento di Medicina Clinica e Sperimentale, Università di Foggia, Foggia, Italy
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Kim SK, Lee JW, Ee HS, Moon YT, Kwon SH, Kwon H, Park HG. High-efficiency vertical GaN slab light-emitting diodes using self-coherent directional emitters. OPTICS EXPRESS 2010; 18:11025-11032. [PMID: 20588958 DOI: 10.1364/oe.18.011025] [Citation(s) in RCA: 5] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/29/2023]
Abstract
We demonstrate a highly-efficient, large-area (1x1 mm2) GaN slab light-emitting diode using a vertically directional emitter produced from constructive interference. The vertical radiation can be coupled effectively into leaky modes from the beginning and thus a high-extraction efficiency can be expected with reduced material absorption. The far-field measurements show that the desired vertical emission profiles are obtained by varying the thickness of the dielectric layer between the emitter and bottom silver mirror. With the combination of a light extractor of a randomly textured surface, the output power was increased approximately 1.4 fold compared to a non-patterned device at a standard current of 350 mA without electrical degradation.
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Affiliation(s)
- Sun-Kyung Kim
- Advanced Technology Lab, LED Division, LG Innotek, Seoul 137-724, Korea.
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