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Luo L, Shan S, Li X. A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers. SENSORS (BASEL, SWITZERLAND) 2024; 24:6617. [PMID: 39460098 PMCID: PMC11510832 DOI: 10.3390/s24206617] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/06/2024] [Revised: 09/25/2024] [Accepted: 10/10/2024] [Indexed: 10/28/2024]
Abstract
The unique diffractive properties of gratings have made them essential in a wide range of applications, including spectral analysis, precision measurement, optical data storage, laser technology, and biomedical imaging. With advancements in micro- and nanotechnologies, the demand for more precise and efficient grating fabrication has increased. This review discusses the latest advancements in grating manufacturing techniques, particularly highlighting laser interference lithography, which excels in sub-beam generation through wavefront and amplitude division. Techniques such as Lloyd's mirror configurations produce stable interference fringe fields for grating patterning in a single exposure. Orthogonal and non-orthogonal, two-axis Lloyd's mirror interferometers have advanced the fabrication of two-dimensional gratings and large-area gratings, respectively, while laser interference combined with concave lenses enables the creation of concave gratings. Grating interferometry, utilizing optical interference principles, allows for highly precise measurements of minute displacements at the nanometer to sub-nanometer scale. This review also examines the application of grating interferometry in high-precision, absolute, and multi-degree-of-freedom measurement systems. Progress in grating fabrication has significantly advanced spectrometer technology, with integrated structures such as concave gratings, Fresnel gratings, and grating-microlens arrays driving the miniaturization of spectrometers and expanding their use in compact analytical instruments.
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Affiliation(s)
- Linbin Luo
- Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China; (L.L.); (S.S.)
| | - Shuonan Shan
- Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China; (L.L.); (S.S.)
| | - Xinghui Li
- Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China; (L.L.); (S.S.)
- Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, China
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Visschers JC, Wilson E, Conneely T, Mudrov A, Bougas L. Rapid parameter determination of discrete damped sinusoidal oscillations. OPTICS EXPRESS 2021; 29:6863-6878. [PMID: 33726198 DOI: 10.1364/oe.411972] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/14/2020] [Accepted: 01/25/2021] [Indexed: 06/12/2023]
Abstract
We present different computational approaches for the rapid extraction of the signal parameters of discretely sampled damped sinusoidal signals. We compare time- and frequency-domain-based computational approaches in terms of their accuracy and precision and computational time required in estimating the frequencies of such signals, and observe a general trade-off between precision and speed. Our motivation is precise and rapid analysis of damped sinusoidal signals as these become relevant in view of the recent experimental developments in cavity-enhanced polarimetry and ellipsometry, where the relevant time scales and frequencies are typically within the ∼1 - 10 µs and ∼1 - 100 MHz ranges, respectively. In such experimental efforts, single-shot analysis with high accuracy and precision becomes important when developing experiments that study dynamical effects and/or when developing portable instrumentations. Our results suggest that online, running-fashion, microsecond-resolved analysis of polarimetric/ellipsometric measurements with fractional uncertainties at the 10-6 levels, is possible, and using a proof-of-principle experimental demonstration we show that using a frequency-based analysis approach we can monitor and analyze signals at kHz rates and accurately detect signal changes at microsecond time-scales.
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Han Y, Ni K, Li X, Wu G, Yu K, Zhou Q, Wang X. An FPGA Platform for Next-Generation Grating Encoders. SENSORS 2020; 20:s20082266. [PMID: 32316231 PMCID: PMC7219053 DOI: 10.3390/s20082266] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/16/2020] [Revised: 04/11/2020] [Accepted: 04/12/2020] [Indexed: 11/26/2022]
Abstract
Among various nanometer-level displacement measurement methods, grating interferometry-based linear encoders are widely used due to their high robustness, relatively low cost, and compactness. One trend of grating encoders is multi-axis measurement capability for simultaneous precision positioning and small order error motion measurement. However, due to both lack of suitable hardware data processing platform and of a real-time displacement calculation system, meeting the requirements of real-time data processing while maintaining the nanometer order resolutions on all these axes is a challenge. To solve above-mentioned problem, in this paper we introduce a design and experimental validation of a field programmable gate array (FPGA)-cored real-time data processing platform for grating encoders. This platform includes the following functions. First, a front-end photodetector and I/V conversion analog circuit are used to realize basic analog signal filtering, while an eight-channel parallel, 16-bit precision, 200 kSPS maximum acquisition rate Analog-to-digital (ADC) is used to obtain digital signals that are easy to process. Then, an FPGA-based digital signal processing platform is implemented, which can calculate the displacement values corresponding to the phase subdivision signals in parallel and in real time at high speed. Finally, the displacement result is transferred by USB2.0 to the PC in real time through an Universal Asynchronous Receiver/Transmitter (UART) serial port to form a complete real-time displacement calculation system. The experimental results show that the system achieves real-time data processing and displacement result display while meeting the high accuracy of traditional offline data solution methods, which demonstrates the industrial potential and practicality of our absolute two-dimensional grating scale displacement measurement system.
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Affiliation(s)
- Yaodong Han
- Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China; (Y.H.); (K.N.); (G.W.); (K.Y.); (Q.Z.); (X.W.)
| | - Kai Ni
- Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China; (Y.H.); (K.N.); (G.W.); (K.Y.); (Q.Z.); (X.W.)
| | - Xinghui Li
- Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China; (Y.H.); (K.N.); (G.W.); (K.Y.); (Q.Z.); (X.W.)
- Correspondence: ; Tel.: +86-26032544
| | - Guanhao Wu
- Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China; (Y.H.); (K.N.); (G.W.); (K.Y.); (Q.Z.); (X.W.)
- Department of Precision Instrument, Tsinghua University, Haidian District, Beijing 100084, China
| | - Kangning Yu
- Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China; (Y.H.); (K.N.); (G.W.); (K.Y.); (Q.Z.); (X.W.)
| | - Qian Zhou
- Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China; (Y.H.); (K.N.); (G.W.); (K.Y.); (Q.Z.); (X.W.)
| | - Xiaohao Wang
- Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China; (Y.H.); (K.N.); (G.W.); (K.Y.); (Q.Z.); (X.W.)
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Sofikitis D, Spiliotis AK, Stamataki K, Katsoprinakis GE, Bougas L, Samartzis PC, Loppinet B, Rakitzis TP, Surligas M, Papadakis S. Microsecond-resolved SDR-based cavity ring down ellipsometry. APPLIED OPTICS 2015; 54:5861-5865. [PMID: 26193040 DOI: 10.1364/ao.54.005861] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
We present an experimental apparatus that allows microsecond-resolved ellipsometric and absorption measurements. The apparatus is based on an optical cavity containing a Dove prism, in which light undergoes total internal reflection (TIR), while the data acquisition is based on software defined radio technology and custom-built drivers. We demonstrate the ability to sense rapid variations in the refractive index above the TIR interface for arbitrarily long times with a temporal resolution of at least 2 μs.
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Bostrom G, Atkinson D, Rice A. The discrete Fourier transform algorithm for determining decay constants—Implementation using a field programmable gate array. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2015; 86:043106. [PMID: 25933840 DOI: 10.1063/1.4916709] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
Cavity ringdown spectroscopy (CRDS) uses the exponential decay constant of light exiting a high-finesse resonance cavity to determine analyte concentration, typically via absorption. We present a high-throughput data acquisition system that determines the decay constant in near real time using the discrete Fourier transform algorithm on a field programmable gate array (FPGA). A commercially available, high-speed, high-resolution, analog-to-digital converter evaluation board system is used as the platform for the system, after minor hardware and software modifications. The system outputs decay constants at maximum rate of 4.4 kHz using an 8192-point fast Fourier transform by processing the intensity decay signal between ringdown events. We present the details of the system, including the modifications required to adapt the evaluation board to accurately process the exponential waveform. We also demonstrate the performance of the system, both stand-alone and incorporated into our existing CRDS system. Details of FPGA, microcontroller, and circuitry modifications are provided in the Appendix and computer code is available upon request from the authors.
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Affiliation(s)
- G Bostrom
- Physics Department, Portland State University, Portland, Oregon 97201, USA
| | - D Atkinson
- Chemistry Department, Portland State University, Portland, Oregon 97201, USA
| | - A Rice
- Physics Department, Portland State University, Portland, Oregon 97201, USA
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Bostrom G, Rice A, Atkinson D. Optical injection unlocking for cavity ringdown spectroscopy. OPTICS LETTERS 2014; 39:4227-4230. [PMID: 25121693 DOI: 10.1364/ol.39.004227] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
Continuous wave cavity ringdown spectroscopy requires a rapid termination of the injection of light into the cavity to initiate the decay (i.e., ringdown) event. We demonstrate a technique that accomplishes this through pulsed optical injection of a second laser into the main laser, resulting in 20-100 MHz frequency shifts in the otherwise cavity-locked main laser sufficient to create ringdown events at 3.5 kHz. Data on the frequency shift as a function of both main laser current and relative wavelength are presented, as well as a demonstration that single exponential decays are maintained in the process.
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Boyson TK, Rittman DR, Spence TG, Calzada ME, Kallapur AG, Petersen IR, Paul Kirkbride K, Moore DS, Harb CC. Pulsed quantum cascade laser based hypertemporal real-time headspace measurements. OPTICS EXPRESS 2014; 22:10519-10534. [PMID: 24921754 DOI: 10.1364/oe.22.010519] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/03/2023]
Abstract
Optical cavity enhancement is a highly desirable process to make sensitive direct-absorption spectroscopic measurements of unknown substances, such as explosives, illicit material, or other species of interest. This paper reports advancements in the development of real-time cavity ringdown spectroscopy over a wide-bandwidth, with the aim to make headspace measurements of molecules at trace levels. We report results of two pulsed quantum cascade systems operating between (1200 to 1320)cm(-1) and (1316 to 1613)cm(-1) that measure the headspace of nitromethane, acetonitrile, acetone, and nitroglycerin, where the spectra are obtained in less than four seconds and contain at least 150,000 spectral wavelength datapoints.
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