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A Compact Two-Dimensional Varifocal Scanning Imaging Device Actuated by Artificial Muscle Material. Biomimetics (Basel) 2023; 8:biomimetics8010120. [PMID: 36975350 PMCID: PMC10046869 DOI: 10.3390/biomimetics8010120] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 01/28/2023] [Revised: 03/07/2023] [Accepted: 03/10/2023] [Indexed: 03/17/2023] Open
Abstract
This paper presents a compact two-dimensional varifocal-scanning imaging device, with the capability of continuously variable focal length and a large scanning range, actuated by artificial muscle material. The varifocal function is realized by the principle of laterally shifting cubic phase masks and the scanning function is achieved by the principle of the decentered lens. One remarkable feature of these two principles is that both are based on the lateral displacements perpendicular to the optical axis. Artificial muscle material is emerging as a good choice of soft actuators capable of high strain, high efficiency, fast response speed, and light weight. Inspired by the artificial muscle, the dielectric elastomer is used as an actuator and produces the lateral displacements of the Alvarez lenses and the decentered lenses. A two-dimensional varifocal scanning imaging device prototype was established and validated through experiments to verify the feasibility of the proposed varifocal-scanning device. The results showed that the focal length variation of the proposed varifocal scanning device is up to 4.65 times higher (31.6 mm/6.8 mm), and the maximum scanning angle was 26.4°. The rise and fall times were 110 ms and 185 ms, respectively. Such a varifocal scanning device studied here has the potential to be used in consumer electronics, endoscopy, and microscopy in the future.
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Ichii Y, Okada H, Nakamori H, Ueda A, Yamaguchi H, Matsuyama S, Yamauchi K. Development of a glue-free bimorph mirror for use in vacuum chambers. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2019; 90:021702. [PMID: 30831767 DOI: 10.1063/1.5066105] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/12/2018] [Accepted: 01/13/2019] [Indexed: 06/09/2023]
Abstract
PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard X-ray regimes; however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. In this study, we developed a glue-free bimorph deformable mirror, in which silver nano-particles were employed to bond PZT actuators to mirror substrates. Under an appropriate bonding condition, the bonding layer was confirmed to be uniform and the mirror's bending characteristics were demonstrated to be sufficiently stable; its gas emission rate was also shown to be acceptable. Piezo responses before and after additional heating at 200 °C showed the thermal stability of its bonding and bending properties.
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Affiliation(s)
- Yoshio Ichii
- JTEC Corporation, 2-4-35 Saito-Yamabuki, Ibaraki, Osaka 567-0086, Japan
| | - Hiromi Okada
- JTEC Corporation, 2-4-35 Saito-Yamabuki, Ibaraki, Osaka 567-0086, Japan
| | - Hiroki Nakamori
- JTEC Corporation, 2-4-35 Saito-Yamabuki, Ibaraki, Osaka 567-0086, Japan
| | - Akihiko Ueda
- JTEC Corporation, 2-4-35 Saito-Yamabuki, Ibaraki, Osaka 567-0086, Japan
| | - Hiroyuki Yamaguchi
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan
| | - Satoshi Matsuyama
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan
| | - Kazuto Yamauchi
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1, Yamadaoka, Suita, Osaka 565-0871, Japan
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Takeuchi A, Uesugi K, Suzuki Y, Itabashi S, Oda M. Fresnel zone plate with apodized aperture for hard X-ray Gaussian beam optics. JOURNAL OF SYNCHROTRON RADIATION 2017; 24:586-594. [PMID: 28452749 DOI: 10.1107/s1600577517003289] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/01/2016] [Accepted: 02/28/2017] [Indexed: 06/07/2023]
Abstract
Fresnel zone plates with apodized apertures [apodization FZPs (A-FZPs)] have been developed to realise Gaussian beam optics in the hard X-ray region. The designed zone depth of A-FZPs gradually decreases from the center to peripheral regions. Such a zone structure forms a Gaussian-like smooth-shouldered aperture function which optically behaves as an apodization filter and produces a Gaussian-like focusing spot profile. Optical properties of two types of A-FZP, i.e. a circular type and a one-dimensional type, have been evaluated by using a microbeam knife-edge scan test, and have been carefully compared with those of normal FZP optics. Advantages of using A-FZPs are introduced.
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Affiliation(s)
- Akihisa Takeuchi
- Japan Synchrotron Radiation Research Institute/SPring-8, Sayo, Hyogo 679-5198, Japan
| | - Kentaro Uesugi
- Japan Synchrotron Radiation Research Institute/SPring-8, Sayo, Hyogo 679-5198, Japan
| | - Yoshio Suzuki
- Japan Synchrotron Radiation Research Institute/SPring-8, Sayo, Hyogo 679-5198, Japan
| | | | - Masatoshi Oda
- NTT Advanced Technology, Atsugi, Kanagawa 243-0124, Japan
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Khakurel KP, Kimura T, Nakamori H, Goto T, Matsuyama S, Sasaki T, Takei M, Kohmura Y, Ishikawa T, Yamauchi K, Nishino Y. Generation of apodized X-ray illumination and its application to scanning and diffraction microscopy. JOURNAL OF SYNCHROTRON RADIATION 2017; 24:142-149. [PMID: 28009553 DOI: 10.1107/s1600577516017677] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/07/2016] [Accepted: 11/05/2016] [Indexed: 06/06/2023]
Abstract
X-ray science has greatly benefited from the progress in X-ray optics. Advances in the design and the manufacturing techniques of X-ray optics are key to the success of various microscopic and spectroscopic techniques practiced today. Here the generation of apodized X-ray illumination using a two-stage deformable Kirkpatrick-Baez mirror system is presented. Such apodized illumination is marked by the suppression of the side-lobe intensities of the focused beam. Thus generated apodized illumination was employed to improve the image quality in scanning X-ray fluorescence microscopy. Imaging of a non-isolated object by coherent X-ray diffractive imaging with apodized illumination in a non-scanning mode is also presented.
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Affiliation(s)
- Krishna P Khakurel
- Research Institute for Electronic Science, Hokkaido University, Kita 21, Nishi 10, Kita-ku, Sapporo 001-0021, Japan
| | - Takashi Kimura
- Research Institute for Electronic Science, Hokkaido University, Kita 21, Nishi 10, Kita-ku, Sapporo 001-0021, Japan
| | - Hiroki Nakamori
- JTEC Corporation, Saito-Yamabuki, Ibaraki, Osaka 567-0086, Japan
| | - Takumi Goto
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
| | - Satoshi Matsuyama
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
| | - Tomoya Sasaki
- Research Institute for Electronic Science, Hokkaido University, Kita 21, Nishi 10, Kita-ku, Sapporo 001-0021, Japan
| | - Masashi Takei
- Research Institute for Electronic Science, Hokkaido University, Kita 21, Nishi 10, Kita-ku, Sapporo 001-0021, Japan
| | - Yoshiki Kohmura
- SPring-8/RIKEN, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan
| | - Tetsuya Ishikawa
- SPring-8/RIKEN, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan
| | - Kazuto Yamauchi
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamadaoka, Suita, Osaka 565-0871, Japan
| | - Yoshinori Nishino
- Research Institute for Electronic Science, Hokkaido University, Kita 21, Nishi 10, Kita-ku, Sapporo 001-0021, Japan
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Matsuyama S, Nakamori H, Goto T, Kimura T, Khakurel KP, Kohmura Y, Sano Y, Yabashi M, Ishikawa T, Nishino Y, Yamauchi K. Nearly diffraction-limited X-ray focusing with variable-numerical-aperture focusing optical system based on four deformable mirrors. Sci Rep 2016; 6:24801. [PMID: 27097853 PMCID: PMC4838839 DOI: 10.1038/srep24801] [Citation(s) in RCA: 31] [Impact Index Per Article: 3.9] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/05/2016] [Accepted: 04/04/2016] [Indexed: 11/16/2022] Open
Abstract
Unlike the electrostatic and electromagnetic lenses used in electron microscopy, most X-ray focusing optical systems have fixed optical parameters with constant numerical apertures (NAs). This lack of adaptability has significantly limited application targets. In the research described herein, we developed a variable-NA X-ray focusing system based on four deformable mirrors, two sets of Kirkpatrick–Baez-type focusing mirrors, in order to control the focusing size while keeping the position of the focus unchanged. We applied a mirror deformation procedure using optical/X-ray metrology for offline/online adjustments. We performed a focusing test at a SPring-8 beamline and confirmed that the beam size varied from 108 nm to 560 nm (165 nm to 1434 nm) in the horizontal (vertical) direction by controlling the NA while maintaining diffraction-limited conditions.
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Affiliation(s)
- Satoshi Matsuyama
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
| | - Hiroki Nakamori
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.,JTEC Corporation, 2-4-35, Saito-Yamabuki, Ibaraki, Osaka 567-0086, Japan
| | - Takumi Goto
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
| | - Takashi Kimura
- Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021, Japan
| | - Krishna P Khakurel
- Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021, Japan
| | | | - Yasuhisa Sano
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
| | - Makina Yabashi
- SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5148, Japan
| | | | - Yoshinori Nishino
- Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021, Japan
| | - Kazuto Yamauchi
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan.,Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
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Khakurel KP, Kimura T, Joti Y, Matsuyama S, Yamauchi K, Nishino Y. Coherent diffraction imaging of non-isolated object with apodized illumination. OPTICS EXPRESS 2015; 23:28182-28190. [PMID: 26561089 DOI: 10.1364/oe.23.028182] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/05/2023]
Abstract
Coherent diffraction imaging (CDI) is an established lensless imaging method widely used at the x-ray regime applicable to the imaging of non-periodic materials. Conventional CDI can practically image isolated objects only, which hinders the broader application of the method. We present the imaging of non-isolated objects by employing recently proposed "non-scanning" apodized-illumination CDI at an optical wavelength. We realized isolated apodized illumination with a specially designed optical configuration and succeeded in imaging phase objects as well as amplitude objects. The non-scanning nature of the method is important particularly in imaging live cells and tissues, where fast imaging is required for non-isolated objects, and is an advantage over ptychography. We believe that our result of phase contrast imaging at an optical wavelength can be extended to the quantitative phase imaging of cells and tissues. The method also provides the feasibility of the lensless single-shot imaging of extended objects with x-ray free-electron lasers.
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Goto T, Nakamori H, Kimura T, Sano Y, Kohmura Y, Tamasaku K, Yabashi M, Ishikawa T, Yamauchi K, Matsuyama S. Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2015; 86:043102. [PMID: 25933836 DOI: 10.1063/1.4916617] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
An adaptive Kirkpatrick-Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.
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Affiliation(s)
- Takumi Goto
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
| | - Hiroki Nakamori
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
| | - Takashi Kimura
- Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021, Japan
| | - Yasuhisa Sano
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
| | | | - Kenji Tamasaku
- SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
| | - Makina Yabashi
- SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198, Japan
| | | | - Kazuto Yamauchi
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
| | - Satoshi Matsuyama
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
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Webb KF. Condenser-free contrast methods for transmitted-light microscopy. J Microsc 2014; 257:8-22. [PMID: 25226859 PMCID: PMC4277858 DOI: 10.1111/jmi.12181] [Citation(s) in RCA: 12] [Impact Index Per Article: 1.2] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/27/2013] [Accepted: 08/14/2014] [Indexed: 11/28/2022]
Abstract
Phase contrast microscopy allows the study of highly transparent yet detail-rich specimens by producing intensity contrast from phase objects within the sample. Presented here is a generalized phase contrast illumination schema in which condenser optics are entirely abrogated, yielding a condenser-free yet highly effective method of obtaining phase contrast in transmitted-light microscopy. A ring of light emitting diodes (LEDs) is positioned within the light-path such that observation of the objective back focal plane places the illuminating ring in appropriate conjunction with the phase ring. It is demonstrated that true Zernike phase contrast is obtained, whose geometry can be flexibly manipulated to provide an arbitrary working distance between illuminator and sample. Condenser-free phase contrast is demonstrated across a range of magnifications (4–100×), numerical apertures (0.13–1.65NA) and conventional phase positions. Also demonstrated is condenser-free darkfield microscopy as well as combinatorial contrast including Rheinberg illumination and simultaneous, colour-contrasted, brightfield, darkfield and Zernike phase contrast. By providing enhanced and arbitrary working space above the preparation, a range of concurrent imaging and electrophysiological techniques will be technically facilitated. Condenser-free phase contrast is demonstrated in conjunction with scanning ion conductance microscopy (SICM), using a notched ring to admit the scanned probe. The compact, versatile LED illumination schema will further lend itself to novel next-generation transmitted-light microscopy designs. The condenser-free illumination method, using rings of independent or radially-scanned emitters, may be exploited in future in other electromagnetic wavebands, including X-rays or the infrared.
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Affiliation(s)
- K F Webb
- Royal Academy of Engineering Research Fellow, Institute of Biophysics, Imaging & Optical Science (IBIOS), School of Electrical and Electronic Engineering, The University of Nottingham, University Park, Nottingham, U.K
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Yabashi M, Tono K, Mimura H, Matsuyama S, Yamauchi K, Tanaka T, Tanaka H, Tamasaku K, Ohashi H, Goto S, Ishikawa T. Optics for coherent X-ray applications. JOURNAL OF SYNCHROTRON RADIATION 2014; 21:976-85. [PMID: 25177986 PMCID: PMC4151679 DOI: 10.1107/s1600577514016415] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.4] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/22/2014] [Accepted: 07/15/2014] [Indexed: 05/06/2023]
Abstract
Developments of X-ray optics for full utilization of diffraction-limited storage rings (DLSRs) are presented. The expected performance of DLSRs is introduced using the design parameters of SPring-8 II. To develop optical elements applicable to manipulation of coherent X-rays, advanced technologies on precise processing and metrology were invented. With propagation-based coherent X-rays at the 1 km beamline of SPring-8, a beryllium window fabricated with the physical-vapour-deposition method was found to have ideal speckle-free properties. The elastic emission machining method was utilized for developing reflective mirrors without distortion of the wavefronts. The method was further applied to production of diffraction-limited focusing mirrors generating the smallest spot size in the sub-10 nm regime. To enable production of ultra-intense nanobeams at DLSRs, a low-vibration cooling system for a high-heat-load monochromator and advanced diagnostic systems to characterize X-ray beam properties precisely were developed. Finally, new experimental schemes for combinative nano-analysis and spectroscopy realised with novel X-ray optics are discussed.
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Affiliation(s)
- Makina Yabashi
- RIKEN SPring-8 Center, Kouto 1-1-1, Sayo, Hyogo 679-5148, Japan
| | - Kensuke Tono
- Japan Synchrotron Radiation Research Institute (JASRI), Kouto 1-1-1, Sayo, Hyogo 679-5198, Japan
| | - Hidekazu Mimura
- Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, Hongo 7-3-1, Bunkyo-ku, Tokyo 113-8656, Japan
| | - Satoshi Matsuyama
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
| | - Kazuto Yamauchi
- Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan
| | - Takashi Tanaka
- RIKEN SPring-8 Center, Kouto 1-1-1, Sayo, Hyogo 679-5148, Japan
| | - Hitoshi Tanaka
- RIKEN SPring-8 Center, Kouto 1-1-1, Sayo, Hyogo 679-5148, Japan
| | - Kenji Tamasaku
- RIKEN SPring-8 Center, Kouto 1-1-1, Sayo, Hyogo 679-5148, Japan
| | - Haruhiko Ohashi
- Japan Synchrotron Radiation Research Institute (JASRI), Kouto 1-1-1, Sayo, Hyogo 679-5198, Japan
| | - Shunji Goto
- Japan Synchrotron Radiation Research Institute (JASRI), Kouto 1-1-1, Sayo, Hyogo 679-5198, Japan
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