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Ossiander M, Meretska ML, Hampel HK, Lim SWD, Knefz N, Jauk T, Capasso F, Schultze M. Extreme ultraviolet metalens by vacuum guiding. Science 2023; 380:59-63. [PMID: 37023199 DOI: 10.1126/science.adg6881] [Citation(s) in RCA: 15] [Impact Index Per Article: 15.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Indexed: 04/08/2023]
Abstract
Extreme ultraviolet (EUV) radiation is a key technology for material science, attosecond metrology, and lithography. Here, we experimentally demonstrate metasurfaces as a superior way to focus EUV light. These devices exploit the fact that holes in a silicon membrane have a considerably larger refractive index than the surrounding material and efficiently vacuum-guide light with a wavelength of ~50 nanometers. This allows the transmission phase at the nanoscale to be controlled by the hole diameter. We fabricated an EUV metalens with a 10-millimeter focal length that supports numerical apertures of up to 0.05 and used it to focus ultrashort EUV light bursts generated by high-harmonic generation down to a 0.7-micrometer waist. Our approach introduces the vast light-shaping possibilities provided by dielectric metasurfaces to a spectral regime that lacks materials for transmissive optics.
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Affiliation(s)
- Marcus Ossiander
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
| | - Maryna Leonidivna Meretska
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
| | - Hana Kristin Hampel
- Institute of Experimental Physics, Graz University of Technology, 8010 Graz, Austria
| | - Soon Wei Daniel Lim
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
| | - Nico Knefz
- Institute of Experimental Physics, Graz University of Technology, 8010 Graz, Austria
| | - Thomas Jauk
- Institute of Experimental Physics, Graz University of Technology, 8010 Graz, Austria
| | - Federico Capasso
- John A. Paulson School of Engineering and Applied Sciences, Harvard University, Cambridge, MA 02138, USA
| | - Martin Schultze
- Institute of Experimental Physics, Graz University of Technology, 8010 Graz, Austria
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An Easy Technique for Focus Characterization and Optimization of XUV and Soft X-ray Pulses. APPLIED SCIENCES-BASEL 2022. [DOI: 10.3390/app12115652] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/04/2023]
Abstract
For many applications of extreme ultraviolet (XUV) and X-ray pulses, a small focus size is crucial to reach the required intensity or spatial resolution. In this article, we present a simple way to characterize an XUV focus with a resolution of 1.85 µm. Furthermore, this technique was applied for the measurement and optimization of the focus of an ellipsoidal mirror for photon energies ranging from 18 to 150 eV generated by high-order harmonics. We envisage a broad range of applications of this approach with sub-micrometer resolution from high-harmonic sources via synchrotrons to free-electron lasers.
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Jansen GSM, Liu X, Eikema KSE, Witte S. Broadband extreme ultraviolet dispersion measurements using a high-harmonic source. OPTICS LETTERS 2019; 44:3625-3628. [PMID: 31368928 DOI: 10.1364/ol.44.003625] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/22/2019] [Accepted: 06/21/2019] [Indexed: 06/10/2023]
Abstract
We demonstrate direct dispersion measurements of various thin films at extreme ultraviolet (EUV) wavelengths, using a table-top laser-driven high-harmonic generation (HHG) source. In this method, spatially separated identical EUV pulses are generated through HHG with a pair of phase-locked infrared pulses. The EUV pulses are re-imaged to a sample plane using a single toroidal mirror, such that one pulse illuminates the target thin film, while the other pulse passes through a reference aperture. By comparing the EUV interference with and without a sample, we are able to extract the dispersion properties of the sample, integrated over the full film thickness. We have measured thin films of titanium, nickel, copper, and silicon nitride, demonstrating that this technique can be applied to a wide range of materials, only requiring a film thin, enough for sufficient EUV transmission.
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Dacasa H, Coudert-Alteirac H, Guo C, Kueny E, Campi F, Lahl J, Peschel J, Wikmark H, Major B, Malm E, Alj D, Varjú K, Arnold CL, Dovillaire G, Johnsson P, L'Huillier A, Maclot S, Rudawski P, Zeitoun P. Single-shot extreme-ultraviolet wavefront measurements of high-order harmonics. OPTICS EXPRESS 2019; 27:2656-2670. [PMID: 30732300 DOI: 10.1364/oe.27.002656] [Citation(s) in RCA: 4] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/02/2018] [Accepted: 12/19/2018] [Indexed: 06/09/2023]
Abstract
We perform wavefront measurements of high-order harmonics using an extreme-ultraviolet (XUV) Hartmann sensor and study how their spatial properties vary with different generation parameters, such as pressure in the nonlinear medium, fundamental pulse energy and duration as well as beam size. In some conditions, excellent wavefront quality (up to λ/11) was obtained. The high throughput of the intense XUV beamline at the Lund Laser Centre allows us to perform single-shot measurements of both the full harmonic beam generated in argon and individual harmonics selected by multilayer mirrors. We theoretically analyze the relationship between the spatial properties of the fundamental and those of the generated high-order harmonics, thus gaining insight into the fundamental mechanisms involved in high-order harmonic generation (HHG).
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Poletto L, Frassetto F. Cost-effective plane-grating monochromator design for extreme-ultraviolet application. APPLIED OPTICS 2018; 57:1202-1211. [PMID: 29469865 DOI: 10.1364/ao.57.001202] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/22/2017] [Accepted: 01/12/2018] [Indexed: 06/08/2023]
Abstract
The optical design of a plane-grating monochromator mainly intended for high resolution in the extreme ultraviolet and soft x-ray is presented. The configuration has three optical elements. It uses a uniform line-spaced plane grating illuminated in the converging light coming from a focusing concave mirror and an additional plane mirror that is needed to change the grating subtended angle to keep the system in focus on a fixed slit. The parameters of the focusing mirror are determined to introduce a coma that compensates for the coma given by the grating. A monochromator for the 12-50 eV region is designed for application to high-order laser harmonics.
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Micro-Focusing of Broadband High-Order Harmonic Radiation by a Double Toroidal Mirror. APPLIED SCIENCES-BASEL 2017. [DOI: 10.3390/app7111159] [Citation(s) in RCA: 15] [Impact Index Per Article: 2.1] [Reference Citation Analysis] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 01/10/2023]
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7
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Guo Y, Sun L. Biconic White multipass cell design based on a skew ray-tracing model. APPLIED OPTICS 2017; 56:7586-7595. [PMID: 29047736 DOI: 10.1364/ao.56.007586] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/22/2017] [Accepted: 08/17/2017] [Indexed: 06/07/2023]
Abstract
A biconic White multipass cell (bi-WMPC), designed as a compact, zero-geometrical-loss, anastigmatic optical system, capably used with an extended divergent source, is proposed. First, a skew ray-tracing model is developed for a conventional White-type multipass cell (WMPC), based on which the astigmatism is calculated, together with its sensitivity coefficients in relation to all-important optical structural parameters in various configurations. Next, a generalized bi-WMPC is designed to suppress the astigmatism, which leads to much smaller reflection spots on the field mirror compared to the conventional design. The demonstration of an optimized bi-WMPC initialized from a commercial WMPC (52 pass with a 0.8 m base length) suggests a 53 fold reduction of the wavefront error value from 79.187λ to 1.493λ, as well as the path-to-volume ratio (PVR) increase from 20.8 to 35.2 m/L. These improvements are critical for the design of a compact WMPC with a path length of tens to hundreds of meters. Presently developed skew ray-tracing models for a WMPC can also be applied to other freeform surfaces to further compensate the inherent aberrations induced by multiple off-axis reflections.
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Coherent diffractive imaging of single helium nanodroplets with a high harmonic generation source. Nat Commun 2017; 8:493. [PMID: 28887513 PMCID: PMC5591197 DOI: 10.1038/s41467-017-00287-z] [Citation(s) in RCA: 58] [Impact Index Per Article: 8.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 10/05/2016] [Accepted: 06/19/2017] [Indexed: 11/17/2022] Open
Abstract
Coherent diffractive imaging of individual free nanoparticles has opened routes for the in situ analysis of their transient structural, optical, and electronic properties. So far, single-shot single-particle diffraction was assumed to be feasible only at extreme ultraviolet and X-ray free-electron lasers, restricting this research field to large-scale facilities. Here we demonstrate single-shot imaging of isolated helium nanodroplets using extreme ultraviolet pulses from a femtosecond-laser-driven high harmonic source. We obtain bright wide-angle scattering patterns, that allow us to uniquely identify hitherto unresolved prolate shapes of superfluid helium droplets. Our results mark the advent of single-shot gas-phase nanoscopy with lab-based short-wavelength pulses and pave the way to ultrafast coherent diffractive imaging with phase-controlled multicolor fields and attosecond pulses. Diffraction imaging studies of free individual nanoparticles have so far been restricted to XUV and X-ray free - electron laser facilities. Here the authors demonstrate the possibility of using table-top XUV laser sources to image prolate shapes of superfluid helium droplets.
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Pan H, Späth C, Guggenmos A, Chew SH, Schmidt J, Zhao QZ, Kleineberg U. Low chromatic Fresnel lens for broadband attosecond XUV pulse applications. OPTICS EXPRESS 2016; 24:16788-16798. [PMID: 27464132 DOI: 10.1364/oe.24.016788] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.1] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/06/2023]
Abstract
Fresnel zone plates show a great potential in achieving high spatial resolution imaging or focusing for XUV and soft/hard X-ray radiation, however they are usually strictly monochromatic due to strong chromatic dispersion and thus do not support broad radiation spectra, preventing their application to attosecond XUV pulses. Here we report on the design and theoretical simulations based on the design of an achromatic hybrid optics combining both, a refractive and diffractive lens in one optical element. We are able to show by calculation that the chromatic dispersion along the optical axis can be greatly reduced compared to a standard Fresnel zone plate while preserving the temporal structure of the attosecond XUV pulses at focus.
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Frassetto F, Trabattoni A, Anumula S, Sansone G, Calegari F, Nisoli M, Poletto L. High-throughput beamline for attosecond pulses based on toroidal mirrors with microfocusing capabilities. THE REVIEW OF SCIENTIFIC INSTRUMENTS 2014; 85:103115. [PMID: 25362379 DOI: 10.1063/1.4898671] [Citation(s) in RCA: 6] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/04/2023]
Abstract
We have developed a novel attosecond beamline designed for attosecond-pump/attosecond probe experiments. Microfocusing of the Extreme-ultraviolet (XUV) radiation is obtained by using a coma-compensated optical configuration based on the use of three toroidal mirrors controlled by a genetic algorithm. Trains of attosecond pulses are generated with a measured peak intensity of about 3 × 10(11) W/cm(2).
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Affiliation(s)
- F Frassetto
- National Research Council, Institute of Photonics and Nanotechnologies, via Trasea 7, 35131 Padova, Italy
| | - A Trabattoni
- Department of Physics, Politecnico di Milano, Piazza L. Da Vinci 32, 20133 Milano, Italy
| | - S Anumula
- Department of Physics, Politecnico di Milano, Piazza L. Da Vinci 32, 20133 Milano, Italy
| | - G Sansone
- Department of Physics, Politecnico di Milano, Piazza L. Da Vinci 32, 20133 Milano, Italy
| | - F Calegari
- National Research Council, Institute of Photonics and Nanotechnologies, Piazza L. da Vinci 32, 20133 Milano, Italy
| | - M Nisoli
- Department of Physics, Politecnico di Milano, Piazza L. Da Vinci 32, 20133 Milano, Italy
| | - L Poletto
- National Research Council, Institute of Photonics and Nanotechnologies, via Trasea 7, 35131 Padova, Italy
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