High-performance silicon-on-insulator grating coupler with completely vertical emission

Design and demonstration of high efficiency perfectly vertical grating couplers with a random structure

Utilizing an automated optimization method, we propose a perfectly vertical grating coupler (PVGC) characterized by random structure, superior performance, simplified fabrication process, and increased minimum feature size (MFS). Within the range of MFS from 60 to 180 nm, the optimized PVGC exhibited a simulated coupling efficiency of approximately -2.0 dB at 1550 nm with a 34 nm 1-dB bandwidth. Experimental results for the PVGCs fabricated by electron beam lithography (EBL) demonstrated coupling efficiencies ranging from -2.5 to -2.8 dB with a 32 nm 1-dB bandwidth while maintaining high manufacturing tolerances. This represents the most outstanding experimental outcome to date regarding the coupling performance of a PVGC fabricated on a 220 nm silicon on insulator (SOI), without requiring any complex processes as reported in the existing literature.

Ultralow-loss optical interconnect enabled by topological unidirectional guided resonance

Grating couplers that interconnect photonic chips to off-chip components are crucial for various optoelectronics applications. Despite numerous efforts in past decades, the existing grating couplers are still far from optimal in energy efficiency and thus hinder photonic integration toward a larger scale. Here, we propose a strategy to achieve ultralow-loss grating couplers by using unidirectional guided resonances (UGRs), suppressing the useless downward radiation with no mirror on the bottom. By engineering the dispersion and apodizing the geometry of grating, we experimentally realize a grating coupler with a record-low loss of -0.34 dB and 1-dB bandwidth exceeding 30 nm at the telecom wavelength of 1550 nm and further demonstrate an optic via with a loss of only -0.94 dB. Given that UGRs ubiquitously exist in a variety of grating geometries, our work sheds light on a systematic method to achieve energy-efficient optical interconnect and paves the way to large-scale photonic integration.

Efficient and polarization insensitive edge coupler based on cascaded vertical waveguide tapers

We propose an efficient and polarization-insensitive edge coupler (EC) constructed principally with two cascaded vertical waveguide tapers. The proposed edge coupler only requires ordinary 365 nm (i-line) ultraviolet source for lithography process. We experimentally demonstrate the proposed EC on two kinds of photonic integrated circuit (PIC) platforms: silicon nitride (Si3N4) and lithium niobate thin film. Both achieve polarization-insensitive fiber chip coupling efficiency of >70% in the C-band. Our proposed EC have the advantages of efficient, cost-saving, and easy to implement and could serve as an effective solution to facilitate low-loss chip-fiber coupling.

Design of a Completely Vertical, Polarization-Independent Two-Dimensional Grating Coupler with High Coupling Efficiency

An efficient optical coupler to transfer the signal between an optical fiber and a silicon waveguide is essential for realizing the applications of silicon photonic integrated circuits such as optical communication and optical sensing. In this paper, we numerically demonstrate a two-dimensional grating coupler based on a silicon-on-insulator platform to obtain completely vertical and polarization-independent couplings, which potentially ease the difficulty of packaging and measurement of photonic integrated circuits. To mitigate the coupling loss induced by the second-order diffraction, two corner mirrors are respectively placed at the two orthogonal ends of the two-dimensional grating coupler to create appropriate interference conditions. Partial single-etch is assumed to form an asymmetric grating to obtain high directionalities without a bottom mirror. The two-dimensional grating coupler is optimized and verified with finite-difference time-domain simulations, achieving a high coupling efficiency of -1.53 dB and a low polarization-dependent loss of 0.015 dB when coupling to a standard single-mode fiber at approximately 1310 nm wavelength.

High-sensitivity waveguide-integrated bolometer based on free-carrier absorption for Si photonic sensors

Conventional photon detectors necessarily face critical challenges regarding strong wavelength-selective response and narrow spectral bandwidth, which are undesirable for spectroscopic applications requiring a wide spectral range. With this perspective, herein, we overcome these challenges through a free-carrier absorption-based waveguide-integrated bolometer for infrared spectroscopic sensors on a silicon-on-insulator (SOI) platform featuring a spectrally flat response at near-infrared (NIR) range (1520-1620 nm). An in-depth thermal analysis was conducted with a systematic investigation of geometry dependence on the detectors. We achieved great performances: temperature coefficient of resistance (TCR) of -3.786%/K and sensitivity of -26.75%/mW with a low wavelength dependency, which are record-high values among reported waveguide bolometers so far, to our knowledge. In addition, a clear on-off response with the rise/fall time of 24.2/29.2 µs and a 3-dB roll-off frequency of ∼22 kHz were obtained, sufficient for a wide range of sensing applications. Together with the possibility of expanding an operation range to the mid-infrared (MIR) band, as well as simplicity in the detector architecture, our work here presents a novel strategy for integrated photodetectors covering NIR to MIR at room temperature for the development of the future silicon photonic sensors with ultrawide spectral bandwidth.

Grating Couplers on Silicon Photonics: Design Principles, Emerging Trends and Practical Issues

Silicon photonics is an enabling technology that provides integrated photonic devices and systems with low-cost mass manufacturing capability. It has attracted increasing attention in both academia and industry in recent years, not only for its applications in communications, but also in sensing. One important issue of silicon photonics that comes with its high integration density is an interface between its high-performance integrated waveguide devices and optical fibers or free-space optics. Surface grating coupler is a preferred candidate that provides flexibility for circuit design and reduces effort for both fabrication and alignment. In the past decades, considerable research efforts have been made on in-plane grating couplers to address their insufficiency in coupling efficiency, wavelength sensitivity and polarization sensitivity compared with out-of-plane edge-coupling. Apart from improved performances, new functionalities are also on the horizon for grating couplers. In this paper, we review the current research progresses made on grating couplers, starting from their fundamental theories and concepts. Then, we conclude various methods to improve their performance, including coupling efficiency, polarization and wavelength sensitivity. Finally, we discuss some emerging research topics on grating couplers, as well as practical issues such as testing, packaging and promising applications.

S-matrix absolute optimization method for a perfect vertical waveguide grating coupler

Vertical coupling using a diffraction grating is a convenient way to couple light into an optical waveguide. Several optimization approaches have been suggested in order to design such a coupler; however, most of them are implemented using algorithm-based modelling. In this paper, we suggest an intuitive method based on S-matrix formalism for analytically optimize 3-port vertical grating coupler devices. The suggested method is general and can be applied to any 3-port coupler device in order to achieve an optimal design based on user constrains. The simplicity of the model allows reduction of the optimization to two variables and the location of an absolute optimal operation point in a 2D contour map. Accordingly, in an ideal device near 100% coupling efficiency and insignificant return loss could be achieved. Our model results show good agreement with numerical finite difference time domain (FDTD) simulations and can predict the general tendencies and sensitivities of the device's behavior to changes in design parameters. We further apply our model to a previously reported high contrast uni-directional grating coupler device and show that additional improvement in the coupling efficiency is achievable for that layout.

Grating-assisted-cylindrical-resonant-cavities interlayer coupler

A grating-assisted-cylindrical-resonant-cavities (GARC) interlayer coupler made of Si/SiO₂ is designed and simulated to achieve efficient and broadband interlayer coupling. This coupler consists of three cylindrical resonant cavities: two waveguide cavities in the horizontal direction and one cylindrical via cavity in the vertical direction. The resonant strengths of the two cylindrical waveguide cavities are enhanced by circular Bessel-function-defined gratings and distributed Bragg reflectors. The interlayer coupling efficiency of this Si/SiO₂ GARC coupler is simulated as η_c=68%(-1.7 dB) for transverse electric polarization at 1.55 μm wavelength, which is generally higher than those of conventional rectangular silicon-on-insulator gratings with additional features such as reflectors, overlayers, chirped periods, dual gratings, etc. The GARC couplers are predicted to have favorable attributes compared to previous couplers, including wider operational bandwidth (δ_λ,1 dB=270  nm), larger tolerance to inplane misalignment (±2  μm for 1 dB extra loss), easier grating patterning (wider grating ridges), smaller footprint (20 μm in diameter), and more flexible choices of interlayer distances (2-5 μm). A sensitivity analysis is also provided as a guide in fabrication. In general, it is found that the vertical dimensions of the GARC couplers need to be carefully controlled while the horizontal dimensions are less critical.

Inverse design of near unity efficiency perfectly vertical grating couplers

Efficient coupling between integrated optical waveguides and optical fibers is essential to the success of silicon photonics. While many solutions exist, perfectly vertical grating couplers that scatter light out of a waveguide in the direction normal to the waveguide's top surface are an ideal candidate due to their potential to reduce packaging complexity. Designing such couplers with high efficiencies, however, has proven difficult. In this paper, we use inverse electromagnetic design techniques to optimize a high efficiency two-layer perfectly vertical silicon grating coupler. Our base design achieves a chip-to-fiber coupling efficiency of 99.2% (-0.035 dB) at 1550 nm. Using this base design as a starting point, we run subsequent constrained optimizations to realize vertical couplers with coupling efficiencies over 96% and back reflections of less than -40 dB which can be fabricated using 65 nm-resolution lithography. These results demonstrate a new path forward for designing fabrication-tolerant ultra high efficiency grating couplers.

Hybrid unidirectional meta-coupler for vertical incidence to a high-refractive-index waveguide in telecom wavelength

Unidirectional optical manipulation, especially the coupling from a vertical light beam to a waveguide unidirectionally, is desirable in photonic integration. We first propose a hybrid unidirectional meta-coupler for vertical incidence to a high-refractive-index waveguide in telecom wavelength, a periodic plasmonic metasurface composed of metal-insulator-metal unit cells is used for phase matching. Three designs are given for devices working around wavelengths 0.85, 1.31, and 1.55 μm. The simulated coupling efficiencies are all around 70%, and the 1 dB coupling bandwidths are 29, 82, and 105 nm, respectively. Our approach paves the way for the applications of optical metasurfaces to planar lightwave circuits.

Silicon waveguide grating coupler for perfectly vertical fiber based on a tilted membrane structure

A grating coupler for interfacing between a silicon-on-insulator waveguide and a single-mode fiber located at a perfectly vertical direction is demonstrated based on a tilted membrane structure. The proposed design is compatible with that of conventional grating couplers for oblique fibers and facilitates mass production. A peak coupling efficiency of 28.5% and 1 dB bandwidth of 38 nm are obtained experimentally for transverse-electrics polarized light. Back reflection in the SOI waveguide is also estimated to be 1.4%. The present grating coupler for perfectly vertical fiber exhibits similar performances to the conventional grating coupler for oblique fiber concerning coupling efficiency, bandwidth, and back reflections.