Silk fibroin diaphragm-based fiber-tip Fabry-Perot pressure sensor

High-sensitivity fiber-tip acoustic sensor with ultrathin gold diaphragm

Miniature acoustic sensors with high sensitivity are highly desired for applications in medical photoacoustic imaging, acoustic communications and industrial nondestructive testing. However, conventional acoustic sensors based on piezoelectric, piezoresistive and capacitive detectors usually require a large element size on a millimeter to centimeter scale to achieve a high sensitivity, greatly limiting their spatial resolution and the application in space-confined sensing scenarios. Herein, by using single-crystal two-dimensional gold flakes (2DGFs) as the sensing diaphragm of an extrinsic Fabry-Perot interferometer on a fiber tip, we demonstrate a miniature optical acoustic sensor with high sensitivity. Benefiting from the ultrathin thickness (∼8 nm) and high reflectivity of the 2DGF, the fiber-tip acoustic sensor gives an acoustic pressure sensitivity of ∼300 mV/Pa in the frequency range from 100 Hz to 20 kHz. The noise-equivalent pressure of the fiber-tip acoustic sensor at the frequency of 13 kHz is as low as 62.8 µPa/Hz1/2, which is one or two orders of magnitude lower than that of reported optical acoustic sensors with the same size.

High-sensitivity fiber optic Fabry-Perot ultrasonic sensor based on a grooved silicon diaphragm for partial discharge detection

An extrinsic fiber optic Fabry-Perot interferometric (EFPI) ultrasonic sensor based on a grooved silicon diaphragm for partial discharge (PD) detection has been proposed. The size of the groove is determined by finite element simulation, which allows the resonant frequency of the sensor to meet the requirements of PD ultrasonic detection and improves the sensitivity of the sensor by 5.07 times compared with that based on a traditional circular diaphragm. The microelectro-mechanical system process is used to fabricate the diaphragm on a silicon-on-insulator wafer, and the prepared diaphragm has a grooved section with a diameter of 829.34 µm and a thickness of only 2.09 µm. At its resonant frequency of 61.5 kHz, the acoustic pressure sensitivity of the sensor is 172.42 mV/Pa. The ultrasonic signal detection capability of the sensor is verified in the PD experiment. Furthermore, the characteristics of the corona discharge are successfully manifested based on the ultrasonic waves detected by the EFPI sensor. It is demonstrated that the proposed sensor is suitable for PD detection due to its high sensitivity, simple production process, and good resistance to environmental interference.

Atomically Smooth Gold Microflake-Enabled Fiber-Tip Fabry-Perot Interferometer for Temperature and Pressure Sensing

Fiber-tip sensors based on the Fabry-Perot interferometer (FPI) are one of the most widely used devices for temperature and pressure measurements in space-confined scenarios. However, the deposited metal films with a polycrystalline structure tend to form microcracks under strain, which can undermine the optical quality factor and thus sensing performance of these fiber-tip sensors. Here, we demonstrate an atomically smooth gold microflake (GMF)-enabled fiber-tip FPI sensor with a Q factor as high as 628. Benefiting from the high reflectivity and flexibility of GMFs and the elasticity of the PDMS spacer, the fiber-tip FPI can maintain stable sensing performance under large deformation. For temperature sensing, the fiber-tip sensor exhibits a linear response to the temperature in the range 28-40 °C with a sensitivity as high as 1.74 nm °C^-1. To realize linear and sensitive pressure sensing, we design and fabricate a PDMS clamped-beam structure on the fiber tip using a soft lithography technique, achieving a sensitivity of 11.48 nm kPa^-1. Moreover, simultaneous measurement of the temperature and pressure is also demonstrated using the wavelength demodulation method. The simple and cost-effective fabrication of the clamped beam and the transferable GMFs allow for the facile integration of high-quality FP cavities on fiber tips, opening new opportunities for developing optical sensors with miniaturized sizes.

High sensitivity gas pressure sensor based on different inner diameter quartz capillary cascading and Vernier effect

In this paper, a highly sensitive optical fiber gas pressure sensor is proposed and experimentally verified. The sensor is composed of two Fabry-Pérot (F-P) cavities, and two F-P cavities are fabricated by a single-mode fiber and two quartz capillaries with different inner diameters splicing. Among them, the small inner diameter capillary is used as a gas channel connecting the large inner diameter capillary and the external environment. The manufacturing process of the sensor only involves capillary cleaver and splicing and does not involve other complex manufacturing technologies. By correctly adjusting the length of the two quartz capillaries, when the free spectral range of the two F-P cavities is very close, the optical Vernier effect will be observed and used as a sensitive probe for detecting gas pressure. The experimental results show that, in the pressure range of 0-0.8 MPa, the gas pressure sensitivity of the sensor reaches -81.73 nm/MPa with a linearity of 99.7%, and the temperature cross-sensitivity is only 1.82 kPa/°C. Due to its easy manufacture, high sensitivity, compact structure, and small volume, the sensor has become one of the preferred structures for large-scale use in the field of gas sensing.

Optical ultrasound sensors for photoacoustic imaging: a narrative review

Optical ultrasound sensors have been increasingly employed in biomedical diagnosis and photoacoustic imaging (PAI) due to high sensitivity and resolution. PAI could visualize the distribution of ultrasound excited by laser pulses in biological tissues. The information of tissues is detected by ultrasound sensors in order to reconstruct structural images. However, traditional ultrasound transducers are made of piezoelectric films that lose sensitivity quadratically with the size reduction. In addition, the influence of electromagnetic interference limits further applications of traditional ultrasound transducers. Therefore, optical ultrasound sensors are developed to overcome these shortcomings. In this review, optical ultrasound sensors are classified into resonant and non-resonant ones in view of physical principles. The principles and basic parameters of sensors are introduced in detail. Moreover, the state of the art of optical ultrasound sensors and applications in PAI are also presented. Furthermore, the merits and drawbacks of sensors based on resonance and non-resonance are discussed in perspectives. We believe this review could provide researchers with a better understanding of the current status of optical ultrasound sensors and biomedical applications.

Opto-Microfluidic Fabry-Perot Sensor with Extended Air Cavity and Enhanced Pressure Sensitivity

An opto-microfluidic static pressure sensor based on a fiber Fabry-Perot Interferometer (FPI) with extended air cavity for enhancing the measuring sensitivity is proposed. The FPI is constructed in a microfluidic channel by the combination of the fixed fiber-end reflection and floating liquid surface reflection faces. A change of the aquatic pressure will cause a drift of the liquid surface and the pressure can be measured by detecting the shift of the FPI spectrum. Sensitivity of the sensor structure can be enhanced significantly by extending the air region of the FPI. The structure is manufactured by using a common single-mode optical fiber, and a silica capillary with the inner wall coated with a hydrophobic film. A sample with 3500 μm air cavity length has demonstrated the pressure sensitivity of about 32.4 μm/kPa, and the temperature cross-sensitivity of about 0.33 kPa/K.

Temperature-Independent Gas Pressure Sensor with High Birefringence Photonic Crystal Fiber-Based Reflective Lyot Filter

A novel temperature-independent gas pressure sensor based on a reflective fiber Lyot filter is presented in this paper. The reflective fiber Lyot filter is simply consist of a fiber polarizer and a segment of hollow-core photonic bandgap fiber (HB-PCF). The HB-PCF plays the role of birefringent cavity in the reflective fiber Lyot filter and works as the sensor head in the gas pressure sensor. Experiment results show that the responses of the sensor to gas pressure and temperature are 3.94 nm/MPa and −0.009 nm/°C, indicating that the proposed gas pressure is sensitive to gas pressure rather than temperature. Coupled with the advantages of simple structure, easy manufacture, high sensitivity and temperature independent, the proposed reflective fiber Lyot filter-based gas pressure sensor holds great potential application in the field of gas pressure monitoring.

Simple fiber-optic sensor for simultaneous and sensitive measurement of high pressure and high temperature based on the silica capillary tube

A simple fiber-optic sensor for simultaneous measurement of high pressure and high temperature was proposed. The sensor was simply fabricated by splicing two sections of silica capillary tubes (SCTs) with different inner diameters to the single-mode fiber. The thick core SCT functions as a Fabry-Perot (FP) micro-cavity and an anti-resonant reflecting waveguide at the same time. The two different sensing mechanisms lead to the high contrast sensitivity values of pressure and temperature (‒3.76 nm/MPa, 27.7 pm/°C and 4.24 nm/MPa, 0.82 pm/°C). We also proposed a simple and effective method to evaluate the actual sensitivities of two-parameter sensors by using linear programming, which shows that our sensor is more sensitive than others in high pressure and high temperature simultaneous detection. Besides, low cost, good mechanical property and convenient reflective probe make the sensor more competitive in actual application.

Phase demodulation of interferometric fiber sensor based on fast Fourier analysis

A demodulation method for interferometric fiber sensors (IFSs) is proposed in this article. The phase variation induced by the measurands can be estimated by calculating the Fourier phase at the intrinsic spatial frequencies of the fiber sensor. Theoretical analysis of the demodulation method is discussed in detail. Numerical simulations are put forward to demonstrate the consistency of the demodulation results under different wavelength sampling interval and noise level, showing a better stability compared with the conventional peak wavelength tracking technique. The proposed method is also experimentally demonstrated by an inline multimode interferometer based on a single-mode fiber (SMF) offset-splicing structure. Experimental results indicate that the phase response of different cladding modes can be analyzed simultaneously. Simultaneous measurement of strain and temperature is realized in our confirmatory experiment by analyzing the phase sensitivities of two selected cladding modes.