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Du Z, Liao K, Dai T, Wang Y, Gao J, Huang H, Qi H, Li Y, Wang X, Su X, Wang X, Yang Y, Lu C, Hu X, Gong Q. Ultracompact and multifunctional integrated photonic platform. SCIENCE ADVANCES 2024; 10:eadm7569. [PMID: 38896615 PMCID: PMC11186496 DOI: 10.1126/sciadv.adm7569] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 11/05/2023] [Accepted: 05/13/2024] [Indexed: 06/21/2024]
Abstract
Realizing a multifunctional integrated photonic platform is one of the goals for future optical information processing, which usually requires large size to realize due to multiple integration challenges. Here, we realize a multifunctional integrated photonic platform with ultracompact footprint based on inverse design. The photonic platform is compact with 86 inverse designed-fixed couplers and 91 phase shifters. The footprint of each coupler is 4 μm by 2 μm, while the whole photonic platform is 3 mm by 0.2 mm-one order of magnitude smaller than previous designs. One-dimensional Floquet Su-Schrieffer-Heeger model and Aubry-André-Harper model are performed with measured fidelities of 97.90 (±0.52) % and 99.34 (±0.44) %, respectively. We also demonstrate a handwritten digits classification task with the test accuracy of 87% using on-chip training. Moreover, the scalability of this platform has been proved by demonstrating more complex computing tasks. This work provides an effective method to realize an ultrasmall integrated photonic platform.
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Affiliation(s)
- Zhuochen Du
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
| | - Kun Liao
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
| | - Tianxiang Dai
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
| | - Yufei Wang
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
| | - Jinze Gao
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
| | - Haiqi Huang
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
| | - Huixin Qi
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
| | - Yandong Li
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
| | - Xiaoxiao Wang
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
| | - Xinran Su
- School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing 100191, China
| | - Xingyuan Wang
- College of Mathematics and Physics, Beijing University of Chemical Technology, Beijing 100029, China
| | - Yan Yang
- Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
| | - Cuicui Lu
- Key Laboratory of Advanced Optoelectronic Quantum Architecture and Measurements of Ministry of Education, Beijing Key Laboratory of Nanophotonics and Ultrafine Optoelectronic Systems, School of Physics, Beijing Institute of Technology, Beijing 100081, China
| | - Xiaoyong Hu
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
- Peking University Yangtze Delta Institute of Optoelectronics, Nantong, Jiangsu 226010, China
- Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, Shanxi 030006, China
- Hefei National Laboratory, Hefei 230088, China
| | - Qihuang Gong
- State Key Laboratory for Mesoscopic Physics & Department of Physics, Collaborative Innovation Center of Quantum Matter, Beijing Academy of Quantum Information Sciences, Nano-optoelectronics Frontier Center of Ministry of Education, Peking University, Beijing 100871, China
- Peking University Yangtze Delta Institute of Optoelectronics, Nantong, Jiangsu 226010, China
- Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan, Shanxi 030006, China
- Hefei National Laboratory, Hefei 230088, China
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Mendoza-Castro JH, Vorobev AS, Iadanza S, Lendl B, O'Faolain L, Grande M. Enhanced Fano resonances in a silicon nitride photonic crystal nanobeam-assisted micro ring resonator for dual telecom band operation. OPTICS EXPRESS 2024; 32:13197-13207. [PMID: 38859296 DOI: 10.1364/oe.504912] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/01/2023] [Accepted: 11/14/2023] [Indexed: 06/12/2024]
Abstract
Silicon-based Micro Ring Resonators (MRR) are a powerful tool for the realization of label free optical biosensors. The sharp edge of a Fano resonance in a Silicon Nitride (Si3N4) platform can boost photonic sensing applications based on MRRs. In this work, we demonstrate enhanced Fano resonance features for a Si3N4 Micro Ring Resonator assisted by a Photonic Crystal Nanobeam (PhCN-MRR) operating in the TM-like mode at the O-band wavelengths. Our findings show that the fabricated PhCN-MRR results in increased asymmetric resonances for TM-like mode compared with TE-like mode operation in the C-band. As a result, a versatile and flexible design to realize Fano resonance with polarization dependent asymmetry in the C and O telecom bands is presented.
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Wu Q. Tunable Fano resonance with an ultra-wide free spectral range from a photonic integrated circuit. APPLIED OPTICS 2023; 62:5342-5347. [PMID: 37707240 DOI: 10.1364/ao.495575] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/17/2023] [Accepted: 06/16/2023] [Indexed: 09/15/2023]
Abstract
In this paper, a reconfigurable photonic integrated circuit that can produce various resonances is proposed and demonstrated. Particularly, it can generate a high performance Fano resonance with an ultra-wide free-spectral range. Moreover, the extinction ratio, slope rate, and center wavelength of the Fano resonance are tunable using integrated phase shifters. This work paves the way towards a variety of new applications, including low threshold lasers, low power consumption modulators, and high sensitivity sensors.
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Cheng W, Lin D, Liu P, Yun B, Lu M, Shi S, Hu G, Cui Y. Achieving Fano resonance with an ultra-high slope rate by silicon nitride CROW embedded in a Mach-Zehnder interferometer. OPTICS EXPRESS 2022; 30:46147-46156. [PMID: 36558576 DOI: 10.1364/oe.477261] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/06/2022] [Accepted: 11/12/2022] [Indexed: 06/17/2023]
Abstract
Fano resonance with asymmetric line shape is very promising in many applications such as optical switching, sensing, slow light, laser. Fano resonances based on some integrated structures have been demonstrated on the silicon on insulator platform. However, the extinction ratios and slope rates of the most proposed integrated Fano resonances are relatively low, which limits their applications. In this paper, a tunable silicon nitride coupled resonator optical waveguide (CROW) embedded in a Mach-Zehnder interferometer (MZI) is proposed to achieve Fano resonance. Benefiting from fine tuning supported by the low thermo-optic coefficient of the silicon nitride optical waveguide, the optical amplitudes and phases in the two arms of the MZI were accurately adjusted to achieve destructive interference, which gives an ultra-high extinction ratio. Furthermore, high quality factor CROW, supported by the native low loss silicon nitride optical waveguide, greatly shrinks the resonance bandwidth. Combining the above two superiorities, a Fano resonance with a very high extinction ratio of up to 57 dB and slope rate as high as 8.1 × 104 dB/nm was obtained, which is an order of magnitude larger than the reported integrated Fano resonances. We believe that the proposed structure would be a promising candidate for high-performance switching and high-sensitivity sensing.
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Hwang H, Heo H, Ko K, Nurrahman MR, Moon K, Ju JJ, Han SW, Jung H, Lee H, Seo MK. Electro-optic control of the external coupling strength of a high-quality-factor lithium niobate micro-resonator. OPTICS LETTERS 2022; 47:6149-6152. [PMID: 37219194 DOI: 10.1364/ol.472956] [Citation(s) in RCA: 5] [Impact Index Per Article: 2.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/10/2022] [Accepted: 10/10/2022] [Indexed: 05/24/2023]
Abstract
Controlling the optical coupling between a micro-resonator and waveguide plays a key role in on-chip photonic circuits. Here, we demonstrate a two-point coupled lithium niobate (LN) racetrack micro-resonator that enables us to electro-optically traverse a full set of the zero-, under-, critical-, and over-coupling regimes with minimized disturbance of the intrinsic properties of the resonant mode. The modulation between the zero- and critical-coupling conditions cost a resonant frequency shift of only ∼344.2 MHz and rarely changed the intrinsic quality (Q) factor of 4.6 × 105. Our device is a promising element in on-chip coherent photon storage/retrieval and its applications.
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Ou X, Tang B, Sun F, Zhang P, Li B, Huang K, Liu R, Xie L, Li Z, Yang Y. Thermo-optically tunable slot waveguide-based dual mode-splitting resonators with enhanced sharp lineshapes. OPTICS EXPRESS 2022; 30:16374-16383. [PMID: 36221481 DOI: 10.1364/oe.456802] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/21/2022] [Accepted: 04/07/2022] [Indexed: 06/16/2023]
Abstract
Slot waveguide plays an essential role in achieving high-performance on-chip photonic sensors and nonlinear devices. Ideally, slot waveguide features a large evanescent field ratio and strong electric field intensity in the slot, leading to a high waveguide sensitivity. Unfortunately, the microring resonator (MRR) based on the slot waveguide suffers the less steep spectral slope due to the low quality factor induced by the huge optical propagation loss of the slot waveguide. In this work, a novel dual mode-splitting resonator based on the slot waveguide is proposed and demonstrated to steepen the slope of lineshapes. The device is implemented by two racetrack resonators based on a slot waveguide and a feedback waveguide to introduce coherent optical mode interference, which could induce mode-splitting resonance (MR) with sharp asymmetry line shape and large extinction ratio (ER). The proposed device is fabricated by the standard complementary metal-oxide-semiconductor (CMOS) technologies on silicon-on-insulator (SOI) platform, and the characterization results show dual MRs with an ER of 45.0 dB and a slope rate (SR) of 58.3 dB/nm, exhibiting a much steeper lineshape than that of the conventional MRR with slot waveguide. And the resonance can be tuned efficiently by applying various voltages of the TiN microheater. Investigations in dual MRs devices promote many potential applications in the field of optical switching, optical modulating, and on-chip optical sensing.
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Fano Resonance Hybrid Waveguide-Coupled Plasmonic Sensor Using Transparent Conductive Oxide in the Near-Infrared Range. PHOTONICS 2022. [DOI: 10.3390/photonics9030189] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
We proposed an ultra-sensitive refractive index sensor by using indium-doped cadmium oxide as a plasmonic material operating in near-infrared based on Fano resonance. The proposed sensor has a hybrid multilayer waveguide structure that supports both a long-range surface plasmon polariton (LRSPP) mode and a dielectric waveguide (DWG) mode. The design strategy of the structure parameters of the inner layers is elaborated in detail through the numerical analysis of the two modes. By suitably tailoring the thickness of the coupling layer, a strong mode coupling between the two modes could be achieved, leading to a sharp asymmetric Fano resonance. With the designed optimal physical parameters, our proposed sensor could achieve a maximum intensity sensitivity of 19,909 RIU−1, a 193-fold enhancement than that of a conventional long-range SPR (LRSPR) based scheme. The proposed design can be a promising platform for biochemical sensing in the near-infrared region.
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Xu Z, Zhou Y, Chen S, Lu L, Zhou G, Chen J, Zhou L. Optical generation of UWB pulses utilizing Fano resonance modulation. FRONTIERS OF OPTOELECTRONICS 2021; 14:426-437. [PMID: 36637755 PMCID: PMC9743855 DOI: 10.1007/s12200-020-1010-6] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/04/2020] [Accepted: 06/22/2020] [Indexed: 06/17/2023]
Abstract
In this paper, we reported an integrated method to generate ultra-wideband (UWB) pulses of different orders based on a reconfigurable silicon micro-ring resonator-coupled Mach-Zehnder interferometer. Under proper operating conditions, the device can produce Fano resonances with a peak-to-valley extinction ratio of above 20 dB. UWB monocycle and doublet signals with picosecond pulse widths are produced when the microring resonator is modulated by square and Gaussian electrical pulses, respectively. With our Fano resonance modulator on silicon photonics, it is promising to foresee versatile on-chip microwave signal generation.
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Affiliation(s)
- Zhe Xu
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory of Navigation and Location Services, Shanghai Institute for Advanced Communication and Data Science, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Yanyang Zhou
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory of Navigation and Location Services, Shanghai Institute for Advanced Communication and Data Science, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Shuhuang Chen
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory of Navigation and Location Services, Shanghai Institute for Advanced Communication and Data Science, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Liangjun Lu
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory of Navigation and Location Services, Shanghai Institute for Advanced Communication and Data Science, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Gangqiang Zhou
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory of Navigation and Location Services, Shanghai Institute for Advanced Communication and Data Science, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Jianping Chen
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory of Navigation and Location Services, Shanghai Institute for Advanced Communication and Data Science, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China
| | - Linjie Zhou
- State Key Laboratory of Advanced Optical Communication Systems and Networks, Shanghai Key Laboratory of Navigation and Location Services, Shanghai Institute for Advanced Communication and Data Science, Department of Electronic Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China.
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Samudrala SC, Das S, Lee KJ, Abdallah MG, Wenner BR, Allen JW, Allen MS, Magnusson R, Vasilyev M. Silicon-nitride microring resonators for nonlinear optical and biosensing applications. APPLIED OPTICS 2021; 60:G132-G138. [PMID: 34613202 DOI: 10.1364/ao.427731] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [MESH Headings] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/13/2021] [Accepted: 06/25/2021] [Indexed: 06/13/2023]
Abstract
We discuss the design, fabrication, and characterization of silicon-nitride microring resonators for nonlinear-photonic and biosensing device applications. The first part presents new theoretical and experimental results that overcome highly normal dispersion of silicon-nitride microresonators by adding a dispersive coupler. The latter parts review our work on highly efficient second-order nonlinear interaction in a hybrid silicon-nitride slot waveguide with nonlinear polymer cladding and silicon-nitride microring application as a biosensor for human stress indicator neuropeptide Y at the nanomolar level.
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Zarebidaki H, Fathipour M, Shahabadi M, Bogaerts W. Disk-loaded silicon micro-ring resonator for high-Q resonance. OPTICS EXPRESS 2021; 29:22688-22703. [PMID: 34266027 DOI: 10.1364/oe.430268] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/29/2021] [Accepted: 06/20/2021] [Indexed: 06/13/2023]
Abstract
By adding two disks to a standard silicon micro-ring resonator, a very high-quality factor (Q) asymmetric resonance with Q values as high as 7.773 × 105 and slope rates in excess of 880 dB/nm can be achieved. A circuit model has been proposed for this device based on which an analysis has been carried out that can predict the effect of reflections in the coupling components. Depending on the coupling coefficient between the disks and the micro-ring resonator (MRR), it is possible to use this design in three regimes, with different spectral features. Moreover, it is shown that the disks introduce a discontinuity in the transmission spectrum and the relative positioning of the disks in the ring provides a new degree of freedom in the design step. The proposed device features a high extinction ratio (ER) around 1550 nm and could be fabricated in any standard silicon photonics technology without requiring any extra materials or processing steps. The proposed resonator has a high sensitivity of ΔλRes (nm)/Δn > 299 nm/RIU, which makes it suitable for sensing applications and efficient modulators.
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Zhang C, Kang G, Xiong Y, Xu T, Gu L, Gan X, Pan Y, Qu J. Photonic thermometer with a sub-millikelvin resolution and broad temperature range by waveguide-microring Fano resonance. OPTICS EXPRESS 2020; 28:12599-12608. [PMID: 32403754 DOI: 10.1364/oe.390966] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 02/20/2020] [Accepted: 04/05/2020] [Indexed: 05/28/2023]
Abstract
Fano resonance theoretically is an effective approach for sensitivity enhancement in photonic sensing applications, but the reported methods suffer from complicated structure and fabrication, narrow dynamic range, etc. In this article, we propose a photonic thermometer with sub-millikelvin resolution and broad temperature measurement range implemented by a simple waveguide-microring Fano structure. An air hole is introduced at the center of the coupling region of the waveguide of an all-pass microring resonator. The effective refractive index theory is used to design its equivalent phase shift and therefore the lineshape of the Fano resonance. Experimental results showed that the quality factor and the Fano parameter of the structure were invariant in a broad temperature range. The wavelength-temperature sensitivity was 75.3 pm/℃, the intensity-temperature sensitivity at the Fano asymmetric edge was 7.49 dB/℃, and the temperature resolution was 0.25 mK within 10℃ to 90℃.
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Zhao T, Xiao H, Li Y, Yang J, Jia H, Ren G, Mitchell A, Tian Y. Independently tunable double Fano resonances based on waveguide-coupled cavities. OPTICS LETTERS 2019; 44:3154-3157. [PMID: 31199404 DOI: 10.1364/ol.44.003154] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/22/2019] [Accepted: 05/26/2019] [Indexed: 06/09/2023]
Abstract
In this Letter, we first demonstrate periodically and independently tunable double Fano resonances (DFRs) using waveguide-coupled cavities consisting of two silicon microring resonators (MRRs) and a feedback-coupled waveguide. The proposed device is fabricated on the silicon-on-insulator substrate using the standard complementary metal-oxide-semiconductor fabrication process. The DFR can be tuned independently by changing the resonant wavelengths of two MRRs using the thermo-optic effect. The highest extinction ratio of the Fano resonances is measured to be as high as 29.20 dB, which enables this device to be a promising candidate for high-performance multi-wavelength optical switches and high-sensitivity biochemical sensors.
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Liu X, Yu Y, Zhang X. Tunable Fano resonance with a high slope rate in a microring-resonator-coupled Mach-Zehnder interferometer. OPTICS LETTERS 2019; 44:251-254. [PMID: 30644873 DOI: 10.1364/ol.44.000251] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/17/2018] [Accepted: 11/28/2018] [Indexed: 06/09/2023]
Abstract
Fano resonance has important applications in high-sensitivity sensing, optical switching, and modulating. A tunable Fano resonance with a high extinction ratio (ER) and slope rate (SR) is in great demand. Here we demonstrate Fano resonance in a microring-resonator-coupled Mach-Zehnder interferometer that is fabricated in silicon-on-insulator. The SR and resonant wavelength of the Fano resonance can be electrically and independently tuned. In the experiment, the Fano resonance shows a maximal ER of 56.8 dB and a maximal SR of 3388.1 dB/nm. The SR and resonant wavelength also can be tuned from 870.06 to 3388.1 dB/nm, and 1558.73 to 1559.96 nm, respectively.
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Zhai S, Feng J, Sun X, Akimoto R, Zeng H. Vertically integrated waveguide self-coupled resonator based tunable optical filter. OPTICS LETTERS 2018; 43:3766-3769. [PMID: 30067675 DOI: 10.1364/ol.43.003766] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/04/2018] [Accepted: 07/08/2018] [Indexed: 06/08/2023]
Abstract
A vertically integrated waveguide self-coupled resonator based tunable optical filter was demonstrated. Unlike the conventional U-bend self-coupled waveguide structure, a top-layer S-bend waveguide was cross-coupled with the racetrack resonator on a bottom layer. The different waveguide coupling effect was compared with the same resonance structure, which can realize the same free spectral range as well as a high quality factor. Spectrum response can be designed separately by varying the coupling coefficient between waveguide and resonator. A heater attached on the top of the resonator can be utilized for the resonance wavelength tuning, while a heater on the top of cross-coupled waveguide has little influence on the device performance, which can help to improve the stability. The presented device can also be applied as a tunable modulator/switch.
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Troia B, Penades JS, Qu Z, Khokhar AZ, Osman A, Wu Y, Stirling C, Nedeljkovic M, Passaro VMN, Mashanovich GZ. Silicon ring resonator-coupled Mach-Zehnder interferometers for the Fano resonance in the mid-IR. APPLIED OPTICS 2017; 56:8769-8776. [PMID: 29091691 DOI: 10.1364/ao.56.008769] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/24/2017] [Accepted: 10/04/2017] [Indexed: 06/07/2023]
Abstract
We present ring resonator (RR)-coupled Mach-Zehnder interferometers (MZIs) based on silicon-on-insulator rib waveguides, operating around the mid-IR wavelength of 3.8 μm. A number of different photonic integrated devices have been designed and fabricated experimentally to obtain the asymmetric Fano resonances in the mid-IR. We have investigated the influence of the coupling efficiency between the RR and the MZI as well as the phase shift between the two arms of the MZI on the Fano-type resonance spectral features, in agreement with theoretical predictions. Finally, wavelength-dependent Fano transmittances have been successfully measured with insertion losses up to ∼1 dB and extinction ratios of ∼20 dB. A slope of sharp Fano resonances as high as -574.6/μm has been achieved and estimated to be 35.5% higher than the slope of single RR Lorentzian-type resonances.
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