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Dvoretckaia L, Gridchin V, Mozharov A, Maksimova A, Dragunova A, Melnichenko I, Mitin D, Vinogradov A, Mukhin I, Cirlin G. Light-Emitting Diodes Based on InGaN/GaN Nanowires on Microsphere-Lithography-Patterned Si Substrates. NANOMATERIALS 2022; 12:nano12121993. [PMID: 35745332 PMCID: PMC9230727 DOI: 10.3390/nano12121993] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 05/10/2022] [Revised: 06/06/2022] [Accepted: 06/07/2022] [Indexed: 12/19/2022]
Abstract
The direct integration of epitaxial III-V and III-N heterostructures on Si substrates is a promising platform for the development of optoelectronic devices. Nanowires, due to their unique geometry, allow for the direct synthesis of semiconductor light-emitting diodes (LED) on crystalline lattice-mismatched Si wafers. Here, we present molecular beam epitaxy of regular arrays n-GaN/i-InGaN/p-GaN heterostructured nanowires and tripods on Si/SiO2 substrates prepatterned with the use of cost-effective and rapid microsphere optical lithography. This approach provides the selective-area synthesis of the ordered nanowire arrays on large-area Si substrates. We experimentally show that the n-GaN NWs/n-Si interface demonstrates rectifying behavior and the fabricated n-GaN/i-InGaN/p-GaN NWs-based LEDs have electroluminescence in the broad spectral range, with a maximum near 500 nm, which can be employed for multicolor or white light screen development.
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Affiliation(s)
- Liliia Dvoretckaia
- Department of Physics, Alferov University, Khlopina 8/3, 194021 St. Petersburg, Russia; (L.D.); (V.G.); (A.M.); (G.C.)
| | - Vladislav Gridchin
- Department of Physics, Alferov University, Khlopina 8/3, 194021 St. Petersburg, Russia; (L.D.); (V.G.); (A.M.); (G.C.)
- Institute of Physics, Saint Petersburg State University, Universitetskaya Emb. 7/9, 199034 St. Petersburg, Russia;
| | - Alexey Mozharov
- Institute of Physics, Saint Petersburg State University, Universitetskaya Emb. 7/9, 199034 St. Petersburg, Russia;
| | - Alina Maksimova
- Department of Physics, Alferov University, Khlopina 8/3, 194021 St. Petersburg, Russia; (L.D.); (V.G.); (A.M.); (G.C.)
| | - Anna Dragunova
- Department of Physics, National Research University Higher School of Economics, Kantemirovskaya 3/1 A, 194100 St. Petersburg, Russia; (A.D.); (I.M.)
| | - Ivan Melnichenko
- Department of Physics, National Research University Higher School of Economics, Kantemirovskaya 3/1 A, 194100 St. Petersburg, Russia; (A.D.); (I.M.)
| | - Dmitry Mitin
- Department of Chemistry, ITMO University, Lomonosova 9, 197101 St. Petersburg, Russia; (D.M.); (A.V.)
| | - Alexandr Vinogradov
- Department of Chemistry, ITMO University, Lomonosova 9, 197101 St. Petersburg, Russia; (D.M.); (A.V.)
| | - Ivan Mukhin
- Department of Physics, Alferov University, Khlopina 8/3, 194021 St. Petersburg, Russia; (L.D.); (V.G.); (A.M.); (G.C.)
- Department of Chemistry, ITMO University, Lomonosova 9, 197101 St. Petersburg, Russia; (D.M.); (A.V.)
- Higher School of Engineering Physics, Peter the Great St. Petersburg Polytechnic University, Polytechnicheskaya 29, 195251 St. Petersburg, Russia
- Correspondence:
| | - Georgy Cirlin
- Department of Physics, Alferov University, Khlopina 8/3, 194021 St. Petersburg, Russia; (L.D.); (V.G.); (A.M.); (G.C.)
- Institute of Physics, Saint Petersburg State University, Universitetskaya Emb. 7/9, 199034 St. Petersburg, Russia;
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5
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Ocier CR, Richards CA, Bacon-Brown DA, Ding Q, Kumar R, Garcia TJ, van de Groep J, Song JH, Cyphersmith AJ, Rhode A, Perry AN, Littlefield AJ, Zhu J, Xie D, Gao H, Messinger JF, Brongersma ML, Toussaint KC, Goddard LL, Braun PV. Direct laser writing of volumetric gradient index lenses and waveguides. LIGHT, SCIENCE & APPLICATIONS 2020; 9:196. [PMID: 33298832 PMCID: PMC7713360 DOI: 10.1038/s41377-020-00431-3] [Citation(s) in RCA: 25] [Impact Index Per Article: 6.3] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 08/02/2020] [Revised: 10/27/2020] [Accepted: 11/10/2020] [Indexed: 05/12/2023]
Abstract
Direct laser writing (DLW) has been shown to render 3D polymeric optical components, including lenses, beam expanders, and mirrors, with submicrometer precision. However, these printed structures are limited to the refractive index and dispersive properties of the photopolymer. Here, we present the subsurface controllable refractive index via beam exposure (SCRIBE) method, a lithographic approach that enables the tuning of the refractive index over a range of greater than 0.3 by performing DLW inside photoresist-filled nanoporous silicon and silica scaffolds. Adjusting the laser exposure during printing enables 3D submicron control of the polymer infilling and thus the refractive index and chromatic dispersion. Combining SCRIBE's unprecedented index range and 3D writing accuracy has realized the world's smallest (15 µm diameter) spherical Luneburg lens operating at visible wavelengths. SCRIBE's ability to tune the chromatic dispersion alongside the refractive index was leveraged to render achromatic doublets in a single printing step, eliminating the need for multiple photoresins and writing sequences. SCRIBE also has the potential to form multicomponent optics by cascading optical elements within a scaffold. As a demonstration, stacked focusing structures that generate photonic nanojets were fabricated inside porous silicon. Finally, an all-pass ring resonator was coupled to a subsurface 3D waveguide. The measured quality factor of 4600 at 1550 nm suggests the possibility of compact photonic systems with optical interconnects that traverse multiple planes. SCRIBE is uniquely suited for constructing such photonic integrated circuits due to its ability to integrate multiple optical components, including lenses and waveguides, without additional printed supports.
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Affiliation(s)
- Christian R Ocier
- Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Corey A Richards
- Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Daniel A Bacon-Brown
- Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Qing Ding
- Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Raman Kumar
- Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Tanner J Garcia
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Jorik van de Groep
- Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
| | - Jung-Hwan Song
- Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
| | - Austin J Cyphersmith
- Carl R. Woese Institute for Genomic Biology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Andrew Rhode
- Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Andrea N Perry
- Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Alexander J Littlefield
- Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Jinlong Zhu
- Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Dajie Xie
- Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Haibo Gao
- Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Jonah F Messinger
- Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Mark L Brongersma
- Department of Materials Science and Engineering, Stanford University, Stanford, CA, USA
| | - Kimani C Toussaint
- Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA
| | - Lynford L Goddard
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA.
- Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA.
| | - Paul V Braun
- Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA.
- Materials Research Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL, USA.
- Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana-Champaign, Urbana, IL, USA.
- Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA.
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Zhu J, Goddard LL. All-dielectric concentration of electromagnetic fields at the nanoscale: the role of photonic nanojets. NANOSCALE ADVANCES 2019; 1:4615-4643. [PMID: 36133120 PMCID: PMC9419186 DOI: 10.1039/c9na00430k] [Citation(s) in RCA: 5] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/08/2019] [Accepted: 11/09/2019] [Indexed: 05/22/2023]
Abstract
The photonic nanojet (PNJ) is a narrow high-energy beam that was originally found on the back side of all-dielectric spherical structures. It is a unique type of energy concentration mode. The field of PNJs has experienced rapid growth in the past decade: nonspherical and even pixelized PNJ generators based on new physics and principles along with extended photonic applications from linear optics to nonlinear optics have driven the re-evaluation of the role of PNJs in optics and photonics. In this article, we give a comprehensive review for the emerging sub-topics in the past decade with a focus on two specific areas: (1) PNJ generators based on natural materials, artificial materials and nanostructures, and even programmable systems instead of conventional dielectric geometries such as microspheres, cubes, and trihedral prisms, and (2) the emerging novel applications in both linear and nonlinear optics that are built upon the specific features of PNJs. The extraordinary features of PNJs including subwavelength concentration of electromagnetic energy, high intensity focusing spot, and lower Joule heating as compared to plasmonic resonance systems, have made PNJs attractive to diverse fields spanning from optical imaging, nanofabrication, and integrated photonics to biosensing, optical tweezers, and disease diagnosis.
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Affiliation(s)
- Jinlong Zhu
- Photonic Systems Laboratory, Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign 208 N. Wright St., MNTL 2231 Urbana IL 61801 USA
| | - Lynford L Goddard
- Photonic Systems Laboratory, Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign 208 N. Wright St., MNTL 2231 Urbana IL 61801 USA
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Zhen Z, Huang Y, Feng Y, Shen Y, Li Z. An ultranarrow photonic nanojet formed by an engineered two-layer microcylinder of high refractive-index materials. OPTICS EXPRESS 2019; 27:9178-9188. [PMID: 31052726 DOI: 10.1364/oe.27.009178] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.6] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 05/03/2023]
Abstract
A photonic nanojet (PNJ) is a tightly focused beam that emerges from the shadow surface of microparticles. Due to its high peak intensity and subwavelength beam waist, the PNJ has increasingly attracted attention, with potential applications in optical imaging, nanolithography, and nanoparticle sensing. A variety of ways have been demonstrated to further shrink the beam waist of PNJs, such as engineering the microparticle geometry and optimizing a multilayer structure. In this simulation work, we report the realization of an ultranarrow PNJ, which is formed by an engineered two-layer microcylinder of high refractive-index materials. Finite element analysis shows that under 632.8 nm illumination, the full width at half maximum of the beam waist can reach 87 nm (~λ/7.3). As far as we know, this is the narrowest PNJ ever reported. Using the backscattering intensity as a contrast mechanism, we also demonstrated the imaging resolution and capability of the ultranarrow PNJ through numerical simulations. We anticipate that this ultranarrow PNJ will open new possibilities in a variety of research areas, including nanoparticle detection, biomedical imaging, and nanolithography.
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