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Zhang J, Bogaert L, Krückel C, Soltanian E, Deng H, Haq B, Rimböck J, Van Kerrebrouck J, Lepage G, Verheyen P, Van Campenhout J, Ossieur P, Van Thourhout D, Morthier G, Bogaerts W, Roelkens G. Micro-transfer printing InP C-band SOAs on advanced silicon photonics platform for lossless MZI switch fabrics and high-speed integrated transmitters. OPTICS EXPRESS 2023; 31:42807-42821. [PMID: 38178391 DOI: 10.1364/oe.505112] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/07/2023] [Accepted: 10/16/2023] [Indexed: 01/06/2024]
Abstract
We present an approach for the heterogeneous integration of InP semiconductor optical amplifiers (SOAs) and lasers on an advanced silicon photonics (SiPh) platform by using micro-transfer-printing (µTP). After the introduction of the µTP concept, the focus of this paper shifts to the demonstration of two C-band III-V/Si photonic integrated circuits (PICs) that are important in data-communication networks: an optical switch and a high-speed optical transmitter. First, a C-band lossless and high-speed Si Mach-Zehnder interferometer (MZI) switch is demonstrated by co-integrating a set of InP SOAs with the Si MZI switch. The micro-transfer-printed SOAs provide 10 dB small-signal gain around 1560 nm with a 3 dB bandwidth of 30 nm. Secondly, an integrated transmitter combining an on-chip widely tunable laser and a doped-Si Mach-Zehnder modulator (MZM) is demonstrated. The laser has a continuous tuning range over 40 nm and the transmitter is capable of 40 Gbps non-return-to-zero (NRZ) back-to-back transmission at wavelengths ranging from 1539 to 1573 nm. These demonstrations pave the way for the realization of complex and fully integrated photonic systems-on-chip with integrated III-V-on-Si components, and this technique is transferable to other material films and devices that can be released from their native substrate.
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Research on Silicon-Substrate-Integrated Widely Tunable, Narrow Linewidth External Cavity Lasers. CRYSTALS 2022. [DOI: 10.3390/cryst12050674] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 02/04/2023]
Abstract
Widely tunable, narrow linewidth external cavity lasers on silicon substrates have many important applications, such as white-light interferometry, wavelength division multiplexing systems, coherent optical communication, and optical fiber sensor technology. Wide tuning range, high laser output power, single mode, stable spectral output, and high side-mode suppression ratio external cavity lasers have attracted much attention for their merits. In this paper, two main device-integrated structures for achieving widely tunable, narrow linewidth external cavity lasers on silicon substrates are reviewed and compared in detail, such as MRR-integrated structure and MRR-and-MZI-integrated structure of external cavity semiconductor lasers. Then, the chip-integrated structures are briefly introduced from the integration mode, such as monolithic integrated, heterogeneous integrated, and hybrid integrated. Results show that the silicon-substrate-integrated external cavity lasers are a potential way to realize a wide tuning range, high power, single mode, stable spectral output, and high side-mode suppression ratio laser output.
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La X, Zhu X, Guo J, Zhao L, Wang W, Liang S. 1.3 µm InGaAlAs/InP laser integrated with laterally tapered SSC in a reverse mesa shape. OPTICS EXPRESS 2021; 29:37653-37660. [PMID: 34808833 DOI: 10.1364/oe.438449] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/27/2021] [Accepted: 10/18/2021] [Indexed: 06/13/2023]
Abstract
We report 1.3 µm InGaAlAs/InP lasers integrated with laterally tapered spot size converter (SSC) in reverse mesa shape. Because the top width is significantly larger than the bottom width for the reverse mesa ridge, high quality SSCs having narrow tip width can be fabricated through conventional photolithography with a high reproductivity. The Threshold current of the fabricated 1000 µm long SSC integrated device is 25 mA and 44 mW single facet optical power can be obtained at 300 mA current. The lateral and vertical divergence angles are as low as 8 ° and 11°, respectively.
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Xu Y, Maier P, Blaicher M, Dietrich PI, Marin-Palomo P, Hartmann W, Bao Y, Peng H, Billah MR, Singer S, Troppenz U, Moehrle M, Randel S, Freude W, Koos C. Hybrid external-cavity lasers (ECL) using photonic wire bonds as coupling elements. Sci Rep 2021; 11:16426. [PMID: 34385575 PMCID: PMC8361180 DOI: 10.1038/s41598-021-95981-w] [Citation(s) in RCA: 2] [Impact Index Per Article: 0.7] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 04/12/2021] [Accepted: 07/28/2021] [Indexed: 11/23/2022] Open
Abstract
Combining semiconductor optical amplifiers (SOA) on direct-bandgap III–V substrates with low-loss silicon or silicon-nitride photonic integrated circuits (PIC) has been key to chip-scale external-cavity lasers (ECL) that offer wideband tunability along with small optical linewidths. However, fabrication of such devices still relies on technologically demanding monolithic integration of heterogeneous material systems or requires costly high-precision package-level assembly, often based on active alignment, to achieve low-loss coupling between the SOA and the external feedback circuits. In this paper, we demonstrate a novel class of hybrid ECL that overcome these limitations by exploiting 3D-printed photonic wire bonds as intra-cavity coupling elements. Photonic wire bonds can be written in-situ in a fully automated process with shapes adapted to the mode-field sizes and the positions of the chips at both ends, thereby providing low-loss coupling even in presence of limited placement accuracy. In a proof-of-concept experiment, we use an InP-based reflective SOA (RSOA) along with a silicon photonic external feedback circuit and demonstrate a single-mode tuning range from 1515 to 1565 nm along with side mode suppression ratios above 40 dB and intrinsic linewidths down to 105 kHz. Our approach combines the scalability advantages of monolithic integration with the performance and flexibility of hybrid multi-chip assemblies and may thus open a path towards integrated ECL on a wide variety of integration platforms.
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Affiliation(s)
- Yilin Xu
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany.,Institute of Microstructure Technology (IMT), KIT, Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany
| | - Pascal Maier
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany.,Institute of Microstructure Technology (IMT), KIT, Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany
| | - Matthias Blaicher
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany.,Institute of Microstructure Technology (IMT), KIT, Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany
| | - Philipp-Immanuel Dietrich
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany.,Institute of Microstructure Technology (IMT), KIT, Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany.,Vanguard Automation GmbH, Gablonzer Strasse 10, 76185, Karlsruhe, Germany
| | - Pablo Marin-Palomo
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany
| | - Wladislaw Hartmann
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany
| | - Yiyang Bao
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany
| | - Huanfa Peng
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany
| | - Muhammad Rodlin Billah
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany.,Institute of Microstructure Technology (IMT), KIT, Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany.,Vanguard Automation GmbH, Gablonzer Strasse 10, 76185, Karlsruhe, Germany
| | - Stefan Singer
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany
| | - Ute Troppenz
- Fraunhofer Institute for Telecommunications, Heinrich Hertz Institute (HHI), Einsteinufer 37, 10587, Berlin, Germany
| | - Martin Moehrle
- Fraunhofer Institute for Telecommunications, Heinrich Hertz Institute (HHI), Einsteinufer 37, 10587, Berlin, Germany
| | - Sebastian Randel
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany
| | - Wolfgang Freude
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany
| | - Christian Koos
- Institute of Photonics and Quantum Electronics (IPQ), Karlsruhe Institute of Technology (KIT), Engesserstrasse 5, 76131, Karlsruhe, Germany. .,Institute of Microstructure Technology (IMT), KIT, Hermann-von-Helmholtz-Platz 1, 76344, Eggenstein-Leopoldshafen, Germany. .,Vanguard Automation GmbH, Gablonzer Strasse 10, 76185, Karlsruhe, Germany.
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Brian Sia JX, Li X, Wang W, Qiao Z, Guo X, Zhou J, Littlejohns CG, Liu C, Reed GT, Wang H. Sub-kHz linewidth, hybrid III-V/silicon wavelength-tunable laser diode operating at the application-rich 1647-1690 nm. OPTICS EXPRESS 2020; 28:25215-25224. [PMID: 32907047 DOI: 10.1364/oe.400666] [Citation(s) in RCA: 3] [Impact Index Per Article: 0.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 06/25/2020] [Accepted: 07/30/2020] [Indexed: 06/11/2023]
Abstract
The wavelength region about of 1650 nm enables pervasive applications. Some instances include methane spectroscopy, free-space/fiber communications, LIDAR, gas sensing (i.e. C2H2, C2H4, C3H8), surgery and medical diagnostics. In this work, through the hybrid integration between an III-V optical amplifier and an extended, low-loss wavelength tunable silicon Vernier cavity, we report for the first time, a III-V/silicon hybrid wavelength-tunable laser covering the application-rich wavelength region of 1647-1690 nm. Room-temperature continuous wave operation is achieved with an output power of up to 31.1 mW, corresponding to a maximum side-mode suppression ratio of 46.01 dB. The laser is ultra-coherent, with an estimated linewidth of 0.7 kHz, characterized by integrating a 35 km-long recirculating fiber loop into the delayed self-heterodyne interferometer setup. The laser linewidth is amongst the lowest in hybrid/heterogeneous III-V/silicon lasers.
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Zhang J, Haq B, O'Callaghan J, Gocalinska A, Pelucchi E, Trindade AJ, Corbett B, Morthier G, Roelkens G. Transfer-printing-based integration of a III-V-on-silicon distributed feedback laser. OPTICS EXPRESS 2018; 26:8821-8830. [PMID: 29715844 DOI: 10.1364/oe.26.008821] [Citation(s) in RCA: 25] [Impact Index Per Article: 4.2] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 01/09/2018] [Accepted: 03/07/2018] [Indexed: 06/08/2023]
Abstract
An electrically pumped DFB laser integrated on and coupled to a silicon waveguide circuit is demonstrated by transfer printing a 40 × 970 μm2 III-V coupon, defined on a III-V epitaxial wafer. A second-order grating defined in the silicon device layer with a period of 477 nm and a duty cycle of 75% was used for realizing single mode emission, while an adiabatic taper structure is used for coupling to the silicon waveguide layer. 18 mA threshold current and a maximum single-sided waveguide-coupled output power above 2 mW is obtained at 20°C. Single mode operation around 1550 nm with > 40 dB side mode suppression ratio (SMSR) is realized. This new integration approach allows for the very efficient use of the III-V material and the massively parallel integration of these coupons on a silicon photonic integrated circuit wafer. It also allows for the intimate integration of III-V opto-electronic components based on different epitaxial layer structures.
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