Microfabricated microfluidic platforms for creating microlens array

Optofluidic lenticular lens array for a 2D/3D switchable display

In this paper, we propose an optofluidic lenticular lens array (OLLA) for a two-dimensional/three-dimensional (2D/3D) switchable display. The OLLA includes a bottom substrate layer with lenticular lens structure, a microfluidic layer with microchannels, and a top substrate layer with inlets as well as outlets. A micro gap is formed between the lenticular lens of the bottom substrate layer and the top substrate layer. When air is in the micro gap, the OLLA behaves as a lenticular lens array, which can realize 3D display. When fluid is filled in the micro gap, because the refractive index of the fluid is the same with the lenticular lens structure, the OLLA equivalents to a transparent flat panel, which can realize a 2D display. Experiments verify that a switchable 2D/3D display prototype based on this OLLA and a smartphone achieves both high-resolution 2D display and high-quality 3D display.

Fabrication of Multifocal Microlens Array by One Step Exposure Process

Microlenses can be widely used in integrated micro-optical systems. However, in some special applications, such as light field imaging systems, multifocal microlens arrays (MLA) are expected to improve imaging resolution. For the fabrication of multifocal MLA, the traditional fabrication method is no longer applicable. To solve this problem, a fabrication method of multifocal MLA by a one step exposure process is proposed. Through the analyses and research of photoresist AZ9260, the nonlinear relationship between exposure dose and exposure depth is established. In the design of the mask, the mask pattern is corrected according to the nonlinear relationship to obtain the final mask. The continuous surface of the multifocal MLA is fabricated by the mask moving exposure. The experimental results show that the prepared multifocal MLA has high filling factor and surface fidelity. What is more, this method is simple and efficient to use in practical applications.

Light output enhancement of scintillators by using mixed-scale microstructures

Scintillators play an important role in the field of nuclear radiation detection. However, the light output of the scintillators is often limited by total internal reflection due to the high refractive indices of the scintillators. Furthermore, the light emission from scintillators typically has an approximately Lambertian profile, which is detrimental to the collection of the light. In this paper, we demonstrate a promising method to achieve enhancement of the light output from scintillators through use of mixed-scale microstructures that are composed of a photonic crystal slab and a microlens array. Simulations and experimental results both show significant improvements in the scintillator light output. The X-ray imaging characteristics of scintillators are improved by the application of the mixed-scale microstructures. The results presented here suggest that the application of the proposed mixed-scale microstructures to scintillators will be beneficial in the nuclear radiation detection field.

Fabrication of uniform-aperture multi-focus microlens array by curving microfluid in the microholes with inclined walls

A variety of techniques have been proposed for fabricating high-density, high-numerical-aperture microlens arrays. However, a microlens array with a uniform focal length has a narrow depth of field, limiting the ability of depth perception. In this paper, we report on a fabrication method of multi-focus microlens arrays. The method for the preparation of the mold of the microlens array is based on 3D printing and microfluidic manipulation techniques. In the preparation of the mold, curved surfaces of the photo-curable resin with different curvatures are formed in the 3D printed microholes whose walls are inclined with different angles. The replicated microlens array consists of hundreds of lenslets with a uniform diameter of 500 µm and different focal lengths ranging from 635 µm to 970 µm. The multi-focus microlens array is capable of extending the depth of field for capturing clear images of objects at different distances ranging from 14.3 mm to 45.5 mm. The multi-focus microlens array has the potential to be used in a diversity of large-depth-of-field imaging and large-range depth perception applications.

Tunable microlens array fabricated by a silicone oil-induced swelled polydimethylsiloxane (PDMS) membrane bonded to a micro-milled microfluidic chip

Microlens arrays (MLAs) nowadays are critical micro-optical components and they can be applied in many application fields, such as optical communication systems and flat panel display modules. This article describes a novel approach to the fabrication of tunable, highly reliable, and uniform polydimethylsiloxane (PDMS) MLAs. A polydimethylsiloxane (PDMS) membrane is bonded to a micro-milled poly(methyl methacrylate) (PMMA) microfluidic chip and exposed to silicone oil of a specific viscosity. Molecules in the oil insert themselves into the molecular structure of the PDMS membrane, causing it to swell and subsequently form dome-shaped MLAs. From our experiments, we derived the following conclusions. First, the homogeneous swelling of the PDMS resulted in MLAs with a high numerical aperture (0.5), high uniformity illumination (CV of the illumination intensity is between 2.5%∼5.1%), and high uniformity (CV of sag height of MLAs is less than 0.05). Second, the shorter molecular chains in low-viscosity oils diffused more readily into the PDMS membrane, which increased the effects on swelling, resulting in MLAs with higher sag height and higher numerical aperture. For example, the 5 cst silicone oil resulted in sag height of 191 µm with NA of 0.50, whereas the 100 cst silicone oil resulted in sag height of 86 µm with numerical aperture of 0.33. Finally, the integrated mixer module enabled the simultaneous tuning of the 7 × 7 MLAs simply by adjusting the injection flow rates of the constituent silicone oils.

Using Micromachined Molds, Partial-curing PDMS Bonding Technique, and Multiple Casting to Create Hybrid Microfluidic Chip for Microlens Array

In a previous study, we presented a novel manufacturing process for the creation of 6 × 6 and 8 × 8 microlens arrays (MLAs) comprising lenses with diameters of 1000 μm, 500 μm, and 200 μm within an area that covers 10 mm × 10 mm. In the current study, we revised the manufacturing process to allow for the fabrication of MLAs of far higher density (15 × 15 and 29 × 29 within the same area). In this paper, we detail the revised manufacturing scheme, including the micromachining of molds, the partial-curing polydimethylsiloxane (PDMS) bonding used to fuse the glass substrate and PDMS, and the multi-step casting process. The primary challenges that are involved in creating MLAs of this density were ensuring uniform membrane thickness and preventing leakage between the PDMS and glass substrate. The experiment results demonstrated that the revised fabrication process is capable of producing high density arrays: Design I produced 15 × 15 MLAs with lens diameter of 0.5 mm and fill factor of 47.94%, while Design II produced 29 × 29 MLAs with lens diameter of 0.25 mm and fill factor of 40.87%. The partial-curing PDMS bonding system also proved to be effective in fusing PDMS with glass (maximum bonding strength of approximately six bars). Finally, the redesigned mold was used to create PDMS membranes of high thickness uniformity (coefficient of variance <0.07) and microlenses of high lens height uniformity (coefficient of variance <0.15).

Simple and low-cost production of hybrid 3D-printed microfluidic devices

The use of three-dimensional (3D) printing for the fabrication of microfluidic chips has attracted considerable attention among researchers. This low-cost fabrication method allows for rapid prototyping and the creation of complex structures; however, these devices lack optical transparency, which greatly hinders the characterization and quantification of experiment results. To address this problem, integrating a transparent substrate with a 3D-printed chip is an effective approach. In this study, we present a solvent bonding method of poly(methyl methacrylate) (PMMA) and acrylonitrile butadiene styrene (ABS) thermoplastic materials for the creation of optically detectable 3D-printed microfluidic devices. To achieve an excellent bonding between PMMA and ABS substrates, we used spray coating as a method for the distribution of ethanol solution followed by UV exposure and post-annealing step to improve the bonding strength. We fabricated a microfluidic chip with S-microchannel to characterize the bonding protocol, and other two application-oriented microfluidic chips, including a 3D split-and-recombine-based passive micromixer, and an integrated microchip for the mixing of two streams of liquid prior to the formation of double-emulsion droplets, to evaluate the efficacy of the proposed scheme. As a result, at least eight bars of the bonding strength between PMMA/ABS substrates was achieved, and the ability of producing optically detectable 3D-printed microfluidic devices based on this bonding method was confirmed.

Microfabrication of Nonplanar Polymeric Microfluidics

For four decades, microfluidics technology has been used in exciting, state-of-the-art applications. This paper reports on a novel fabrication approach in which micromachining is used to create nonplanar, three-dimensional microfluidic chips for experiments. Several parameters of micromachining were examined to enhance the smoothness and definition of surface contours in the nonplanar poly(methyl methacrylate) (PMMA) mold inserts. A nonplanar PMMA/PMMA chip and a nonplanar polydimethylsiloxane (PDMS)/PMMA chip were fabricated to demonstrate the efficacy of the proposed approach. In the first case, a S-shape microchannel was fabricated on the nonplanar PMMA substrate and sealed with another nonplanar PMMA via solvent bonding. In the second case, a PDMS membrane was casted from two nonplanar PMMA substrates and bonded on hemispherical PMMA substrate via solvent bonding for use as a microlens array (MLAs). These examples demonstrate the effectiveness of micromachining in the fabrication of nonplanar microfluidic chips directly on a polymeric substrate, as well as in the manufacture of nonplanar mold inserts for use in creating PDMS/PMMA microfluidic chips. This technique facilitates the creation of nonplanar microfluidic chips for applications requiring a three-dimensional space for in vitro characterization.

Fabrication of polymer microlens array with controllable focal length by modifying surface wettability

A straightforward technique for fabricating low-cost microlens arrays with controllable focal length is developed. By harnessing and manipulating the interfacial energy between the liquid-state acrylate resin and the solidified polydimethylsiloxane (PDMS), the surface of the acrylate resin in the PDMS microhole presents a spherical shape and the curvature can be flexibly controlled. With the change of the processing time for the surface modification of the PDMS microholes, the focal length of the concave microlenses varies from -296.3 μm to -67.4 μm. The numerical aperture of 0.45 is realized. The focal length and the aperture of the microlenses are also affected by the diameter of the microholes. The fabricated concave microlens array can be employed as a master to further duplicate convex microlens array. A good image quality can be achieved by using the convex microlens arrays.