In situ high-resolution thermal microscopy on integrated circuits

The Solution for the Thermographic Measurement of the Temperature of a Small Object

This article describes the measuring system and the influence of selected factors on the accuracy of thermographic temperature measurement using a macrolens. This method enables thermographic measurement of the temperature of a small object with an area of square millimeters as, e.g., electronic elements. Damage to electronic components is often preceded by a rise in temperature, and an effective way to diagnose such components is the use of a thermographic camera. The ability to diagnose a device under full load makes thermography a very practical method that allows us to assess the condition of the device during operation. The accuracy of such a measurement depends on the conditions in which it is carried out. The incorrect selection of at least one parameter compensating the influence of the factor occurring during the measurement may cause the indicated value to differ from the correct value. This paper presents the basic issues linked to thermographic measurements and highlights the sources of errors. A measuring stand which enables the assessment of the influence of selected factors on the accuracy of thermographic measurement of electronic elements with the use of a macrolens is presented.

Lack of Thermogram Sharpness as Component of Thermographic Temperature Measurement Uncertainty Budget

The number of components of a thermographic temperature measurement uncertainty budget and their ultimate contribution depend on the conditions in which the measurement is performed. The acquired data determine the accuracy with which the uncertainty component is estimated. Unfortunately, when some factors have to be taken into account, it is difficult to determine the value of the uncertainty component caused by the occurrence of this factor. In the case of a thermographic temperature measurement, such a factor is the lack of sharpness of the registered thermogram. This problem intensifies when an additional macro lens must be used. Therefore, it is decided to commence research to prepare an uncertainty budget of thermographic measurement with an additional macro lens based on the B method described in EA-4/02 (European Accreditation publications). As a result, the contribution of factors in the uncertainty budget of thermographic measurement with additional macro lens and the value of expanded uncertainty were obtained.

AFM-thermoreflectance for simultaneous measurements of the topography and temperature

To understand the thermal failure mechanisms of electronic devices, it is essential to measure the temperature and characterize the thermal properties of individual nanometer-scale transistors in electronic devices. Previously, scanning thermal microscopy (SThM) has been used to measure the local temperature with nanometer-scale spatial resolutions using a probe with a built-in temperature sensor. However, this type of temperature measurement requires additional equipment to process the temperature-sensing signals and expensive temperature-sensor-integrated probes fabricated by complicated MEMS processes. Here, we present a novel technique which enables the simultaneous measurement of the temperature and topography of nanostructures only with a conventional atomic force microscope (AFM) of the type commonly used for topography measurements and without any modifications of the probe and extra accessories for data acquisition. The underlying principle of the proposed technique is that the local temperature of a specimen is estimated quantitatively from the thermoreflectance of a bare silicon AFM probe that is in contact with a specimen. The temperature obtained by our technique is found to be consistent with a result obtained by SThM measurements.

We propose a novel form of AFM-based thermometry capable of sub-100 nm spatial resolution only with a conventional AFM setup by exploiting the thermoreflectance characteristic of the AFM Si probe.