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Durbach S, Krauss FT, Hoffmann M, Lehmann V, Reinhardt H, Sundermeyer J, Hampp N. Laser-Driven One- and Two-Dimensional Subwavelength Periodic Patterning of Thin Films Made of a Metal-Organic MoS 2 Precursor. ACS NANO 2022; 16:10412-10421. [PMID: 35608356 DOI: 10.1021/acsnano.2c00671] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 06/15/2023]
Abstract
Laser-based surface processing is an established way for the maskless generation of surface structures and functionalities on a large variety of materials. Laser-driven periodic surface texturing and structuring of thin films is reported for metallic-, semiconductive-, and polymeric films. Here, we introduce subwavelength surface patterning of metal-organic thin films of [Mo2S4(S2CNnBu2)2], a MoS2 precursor. Accurate control of one- and two-dimensional (1D and 2D) periodic patterns is achieved on silicon wafers with a pulsed 532 nm ns laser. With suitable combinations of laser polarization, laser pulse energy, the thickness of the SiO2 passivation layer, and the MoS2 precursor's thin film thickness, high-quality 1D and 2D self-organized periodic structures are obtained in virtually unlimited areas. The material redistribution related to the pattern formation is thermally driven at low laser energies. Increasing pulse energies beyond a threshold level, in our experiments a factor of 2, fully converts the precursor to MoS2.
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Affiliation(s)
- Sebastien Durbach
- Department of Chemistry, University of Marburg, Hans-Meerwein Strasse 4, 35032 Marburg, Germany
| | - Falk T Krauss
- Department of Chemistry, University of Marburg, Hans-Meerwein Strasse 4, 35032 Marburg, Germany
| | - Marius Hoffmann
- Department of Chemistry, University of Marburg, Hans-Meerwein Strasse 4, 35032 Marburg, Germany
| | - Viktor Lehmann
- Department of Chemistry, University of Marburg, Hans-Meerwein Strasse 4, 35032 Marburg, Germany
| | - Hendrik Reinhardt
- Department of Chemistry, University of Marburg, Hans-Meerwein Strasse 4, 35032 Marburg, Germany
| | - Jörg Sundermeyer
- Department of Chemistry, University of Marburg, Hans-Meerwein Strasse 4, 35032 Marburg, Germany
| | - Norbert Hampp
- Department of Chemistry, University of Marburg, Hans-Meerwein Strasse 4, 35032 Marburg, Germany
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He W, Zhao B, Yang J, Wen J, Wu H, Guo S, Bai L. Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations. NANOMATERIALS 2022; 12:nano12050796. [PMID: 35269288 PMCID: PMC8912547 DOI: 10.3390/nano12050796] [Citation(s) in RCA: 1] [Impact Index Per Article: 0.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 01/28/2022] [Revised: 02/21/2022] [Accepted: 02/23/2022] [Indexed: 02/01/2023]
Abstract
Controlling laser-induced periodic surface structures on semiconductor materials is of significant importance for micro/nanophotonics. We here demonstrate a new approach to form the unusual structures on 4H-SiC crystal surface under irradiation of three collinear temporally delayed femtosecond laser beams (800 nm wavelength, 50 fs duration, 1 kHz repetition), with orthogonal linear polarizations. Different types of surface structures, two-dimensional arrays of square islands (670 nm periodicity) and one-dimensional ripple structures (678 nm periodicity) are found to uniformly distribute over the laser-exposed areas, both of which are remarkably featured by the low spatial frequency. By altering the time delay among three laser beams, we can flexibly control the transition between the two surface structures. The experimental results are well explained by a physical model of the thermally correlated actions among three laser-material interaction processes. This investigation provides a simple, flexible, and controllable processing approach for the large-scale assembly of complex functional nanostructures on bulk semiconductor materials.
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Affiliation(s)
- Wanlin He
- School of Science, Xi’an Shiyou University, Xi’an 710065, China; (W.H.); (J.W.); (H.W.); (S.G.); (L.B.)
| | - Bo Zhao
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
- Department of Electronic Information and Physics, Changzhi University, Changzhi 046011, China
| | - Jianjun Yang
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
- Correspondence:
| | - Junqing Wen
- School of Science, Xi’an Shiyou University, Xi’an 710065, China; (W.H.); (J.W.); (H.W.); (S.G.); (L.B.)
| | - Hua Wu
- School of Science, Xi’an Shiyou University, Xi’an 710065, China; (W.H.); (J.W.); (H.W.); (S.G.); (L.B.)
| | - Shaoli Guo
- School of Science, Xi’an Shiyou University, Xi’an 710065, China; (W.H.); (J.W.); (H.W.); (S.G.); (L.B.)
| | - Lihua Bai
- School of Science, Xi’an Shiyou University, Xi’an 710065, China; (W.H.); (J.W.); (H.W.); (S.G.); (L.B.)
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Zhang N, Chen SC. Formation of nanostructures and optical analogues of massless Dirac particles via femtosecond lasers. OPTICS EXPRESS 2020; 28:36109-36121. [PMID: 33379713 DOI: 10.1364/oe.403336] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/20/2020] [Accepted: 11/04/2020] [Indexed: 06/12/2023]
Abstract
Subwavelength-scale surface structures have many important engineering and nanotechnology applications, e.g., superhydrophobicity and light-trapping. However, an effective and economic nanofabrication solution for general engineering materials, e.g., metals or silicon, is still not available to date. In this paper, we present an experimental and theoretical study of the nanostructure formation mechanism based on double time-delayed femtosecond laser beams and the coupled mode theory (CMT), demonstrating the use of an optical analogue of massless Dirac particles for high-throughput nanofabrication for the first time. In the experiments, a variety of complex periodic structures, including hexagonally arranged nanoholes, nano-square array, and periodic ripples, have been fabricated. The formation mechanisms of these nanostructures are explained by the CMT, where a transient plasmonic waveguide array (TPWA) is formed by the interference between the preceding laser and the induced surface plasmon polaritons (SPPs). The SPPs induced by the subsequent laser propagates through the TPWA, resulting in conical diffraction. This result shows the first practical application of the massless Dirac dynamics in nanofabrication.
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Liu M, Li MT, Xu S, Yang H, Sun HB. Bioinspired Superhydrophobic Surfaces via Laser-Structuring. Front Chem 2020; 8:835. [PMID: 33195040 PMCID: PMC7596381 DOI: 10.3389/fchem.2020.00835] [Citation(s) in RCA: 12] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/03/2020] [Accepted: 08/10/2020] [Indexed: 01/01/2023] Open
Abstract
Bioinspired superhydrophobic surfaces are an artificial functional surface that mainly extracts morphological designs from natural organisms. In both laboratory research and industry, there is a need to develop ways of giving large-area surfaces water repellence. Currently, surface modification methods are subject to many challenging requirements such as a need for chemical-free treatment or high surface roughness. Laser micro-nanofabrications are a potential way of addressing these challenges, as they involve non-contact processing and outstanding patterning ability. This review briefly discusses multiple laser patterning methods, which could be used for surface structuring toward creating superhydrophobic surfaces.
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Affiliation(s)
- Monan Liu
- Department of Condensed Matter Physics, College of Physics, Jilin University, Changchun, China
| | - Mu-Tian Li
- State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China
| | - Shuai Xu
- State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China
| | - Han Yang
- State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China
| | - Hong-Bo Sun
- State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, China
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Fabricating Laser-Induced Periodic Surface Structures on Medical Grade Cobalt–Chrome–Molybdenum: Tribological, Wetting and Leaching Properties. LUBRICANTS 2019. [DOI: 10.3390/lubricants7080070] [Citation(s) in RCA: 12] [Impact Index Per Article: 2.4] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Indexed: 11/17/2022]
Abstract
Hip-implants structured with anti-bacterial textures should show a low-friction coefficient and should not leach hazardous substances into the human body. The surface of a typical material used for hip-implants, namely Cobalt–Chrome–Molybdenum (CoCrMo) was textured with different types of laser-induced periodic surface structures (LIPSS)—i.e., low spatial frequency LIPSS (LSFL), hierarchical structures consisting of grooves superimposed with high spatial frequency LIPSS (HSFL) and Triangular shaped Nanopillars (TNP)—using a picosecond pulsed laser source. The effect of LIPSS on the wettability, friction, as well as wear of the structures, when slid against a polyethylene (PE) counter surface and biocompatibility was analyzed. Surfaces covered with LSFL show superhydrophobicity and grooves with superimposed HSFL, as well as TNP, show hydrophobic behavior. The coefficient of friction (CoF) of LIPSS against a polyethylene (PE) counter surface was found to be higher (ranging from 0.40 to 0.66) than the CoF of (polished) CoCrMo, which was found to equal 0.22. It was found that the samples release cobalt within biocompatible limits. Compared to polished reference surfaces, LIPSS cause higher friction of CoCrMo against PE contact. However, the wear of the PE counter surface only increased significantly for the LSFL textures. For these reasons, it is concluded that LIPSS are not suitable for a heavily loaded metal-on-plastic bearing contact.
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Fraggelakis F, Giannuzzi G, Gaudiuso C, Manek-Hönninger I, Mincuzzi G, Ancona A, Kling R. Double- and Multi-Femtosecond Pulses Produced by Birefringent Crystals for the Generation of 2D Laser-Induced Structures on a Stainless Steel Surface. MATERIALS (BASEL, SWITZERLAND) 2019; 12:E1257. [PMID: 30999570 PMCID: PMC6514971 DOI: 10.3390/ma12081257] [Citation(s) in RCA: 15] [Impact Index Per Article: 3.0] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/14/2019] [Revised: 04/14/2019] [Accepted: 04/15/2019] [Indexed: 11/16/2022]
Abstract
Laser-induced textures have been proven to be excellent solutions for modifying wetting, friction, biocompatibility, and optical properties of solids. The possibility to generate 2D-submicron morphologies by laser processing has been demonstrated recently. Employing double-pulse irradiation, it is possible to control the induced structures and to fabricate novel and more complex 2D-textures. Nevertheless, double-pulse irradiation often implies the use of sophisticated setups for modifying the pulse polarization and temporal profile. Here, we show the generation of homogeneous 2D-LIPSS (laser-induced periodic surface structures) over large areas utilizing a simple array of birefringent crystals. Linearly and circularly polarized pulses were applied, and the optimum process window was defined for both. The results are compared to previous studies, which include a delay line, and the reproducibility between the two techniques is validated. As a result of a systematic study of the process parameters, the obtained morphology was found to depend both on the interplay between fluence and inter-pulse delay, as well as on the number of incident pulses. The obtained structures were characterized via SEM (scanning electron microscopy) and atomic force microscopy. We believe that our results represent a novel approach to surface structuring, primed for introduction in an industrial environment.
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Affiliation(s)
- Fotis Fraggelakis
- ALPhANOV, Technological Centre for Optics and Lasers, Optic Institute of Aquitaine, rue F. Mitterrand, 33400 Talence, France.
- CELIA, University of Bordeaux-CNRS-CEA UMR5107, 33405 Talence, France.
| | - Giuseppe Giannuzzi
- Istituto di Fotonica e Nanotecnologie (INF)-CNR U.O.S. Bari, via Amendola 173, I-70126 Bari, Italy.
- Dipartimento Interuniversitario di Fisica, Università degli Studi di Bari, via Amendola 173, I-70126 Bari, Italy.
| | - Caterina Gaudiuso
- Istituto di Fotonica e Nanotecnologie (INF)-CNR U.O.S. Bari, via Amendola 173, I-70126 Bari, Italy.
- Dipartimento Interuniversitario di Fisica, Università degli Studi di Bari, via Amendola 173, I-70126 Bari, Italy.
| | | | - Girolamo Mincuzzi
- ALPhANOV, Technological Centre for Optics and Lasers, Optic Institute of Aquitaine, rue F. Mitterrand, 33400 Talence, France.
| | - Antonio Ancona
- Istituto di Fotonica e Nanotecnologie (INF)-CNR U.O.S. Bari, via Amendola 173, I-70126 Bari, Italy.
| | - Rainer Kling
- ALPhANOV, Technological Centre for Optics and Lasers, Optic Institute of Aquitaine, rue F. Mitterrand, 33400 Talence, France.
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