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Yu Q, Guo Z, Zhu J, Zhang L, Hao P, Xiao J, Feng T, Wu S. Ultra-compact and polarization-insensitive silicon waveguide 3 × 3 star-crossing based on composite subwavelength grating metamaterials. OPTICS LETTERS 2024; 49:4326-4329. [PMID: 39090927 DOI: 10.1364/ol.529947] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 05/13/2024] [Accepted: 07/14/2024] [Indexed: 08/04/2024]
Abstract
We present what we believe is the first report on a polarization-insensitive 3 × 3 silicon star-crossing utilizing a composite subwavelength metamaterial waveguide structure. Two different types of subwavelength grating metamaterials (nanohole grating and fan-shaped bent subwavelength grating) are respectively used to address diffraction issues in the crossing region and mode interference issues caused by a compact non-adiabatic design. This approach results in a device with an ultra-compact footprint of 12.68 × 10.98 µm2 on a standard 220 nm silicon-on-insulator (SOI) platform. Simulation results show low insertion loss (IL) values of <0.2 dB/0.3 dB and suppressed cross talk (CT) levels of <-27.2 dB/-23.6 dB for TE/TM polarizations across a wavelength range of 100 nm (1500-1600 nm). Experimental measurements of the fabricated devices confirm outstanding performance, with IL values of <0.35 dB/0.4 dB and CT levels of <-31.5 dB/-28.6 dB for TE/TM polarization in the C-band.
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Ni B, Luo C, Chen H, Wu S, Hou L, Liu H, Xiong J. Compact and broadband dual-polarization waveguide crossing utilizing subwavelength-hole-assisted MMI couplers. OPTICS LETTERS 2023; 48:6040-6043. [PMID: 37966784 DOI: 10.1364/ol.505887] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 09/21/2023] [Accepted: 10/22/2023] [Indexed: 11/16/2023]
Abstract
In this Letter, an ultracompact silicon-based waveguide crossing for dual polarizations is proposed and experimentally demonstrated using subwavelength-hole-assisted multimode interference couplers. Thanks to the flexible and easy dispersion engineering in the introduced subwavelength-hole-assisted multimode interference couplers, the reduced and equal beat lengths for dual polarizations are accessible via careful parametric optimization, consequently enabling a substantially reduced device size. Experimental results indicate that the proposed crossing (13.6 × 13.6 µm2 in size) features a low insertion loss of 1.03 dB (0.76 dB) and low crosstalk of -32.5 dB (-37.8 dB) at a central wavelength of 1550 nm for TE (TM) mode, with a broad bandwidth of ∼80 nm for crosstalk of <-18 dB.
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Ma H, Du T, Jiang X, Zhang Z, He X, Chen H, Yu Y, Zhang Z, Han Y, Yang J, Peng Y, Fang L. Inverse-designed ultra-compact multi-channel and multi-mode waveguide crossings. OPTICS EXPRESS 2023; 31:29235-29244. [PMID: 37710728 DOI: 10.1364/oe.500327] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/11/2023] [Accepted: 08/08/2023] [Indexed: 09/16/2023]
Abstract
In this work, we use the inverse design method to design three-channel and four-channel dual-mode waveguide crossings with the design regions of 4.32 µm-wide regular hexagon and 6.68 µm-wide regular octagon, respectively. Based on the highly-symmetric structures, the fundamental transverse electric (TE0) and TE1 modes propagate through the waveguide crossings efficiently. Moreover, the devices are practically fabricated and experimentally characterized. The measured insertion losses and crosstalks of the three-channel and dual-mode waveguide crossing for both the TE0 and TE1 modes are less than 1.8 dB and lower than -18.4 dB from 1540 nm to 1560 nm, respectively. The measured insertion losses of the four-channel and dual-mode waveguide crossing for the TE0 and TE1 modes are less than 1.8 dB and 2.5 dB from 1540 nm to 1560 nm, respectively, and the measured crosstalks are lower than -17.0 dB. In principle, our proposed scheme can be extended to waveguide crossing with more channels and modes.
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Zhang R, Sun S, Zhang F, Chen K, Liu L, Zhu N. Four-mode parallel silicon multimode waveguide crossing scheme based on the asymmetric directional couplers. OPTICS EXPRESS 2022; 30:22442-22451. [PMID: 36224942 DOI: 10.1364/oe.459968] [Citation(s) in RCA: 2] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/31/2022] [Accepted: 05/25/2022] [Indexed: 06/16/2023]
Abstract
We theoretically propose and experimentally demonstrate a novel ultra-compact four-mode silicon waveguide crossing device based on the asymmetric directional couplers for densely integrated on-chip mode division multiplexing systems. The crossing is based on the parallel crossing scheme where the two access waveguides are parallel to each other to have minimal area. The device utilizes an idle high order mode inside one bus waveguide to drop subsequently all the guided modes inside another bus waveguide, with the help of the asymmetric directional couplers (ADCs). We also optimize the structural parameters of these ADCs by using the particle swarm optimization method to obtain higher conversion efficiency and smaller coupling length. The simulation results show that the insertion losses of the input 1-8 ports are no more than 0.5 dB at the central wavelength of 1550 nm. And the crosstalks are less than -20 dB in the broadband from 1530 nm to 1580 nm with a footprint of only 25 × 70 µm2. Furthermore, our scheme can be easily extended to accommodate more modes by cascading more ADCs for mode dropping and crossing, without obviously deteriorating the performance and greatly increasing the overall footprint.
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Lees H, Gao W, Withayachumnankul W. All-silicon, low-cross-talk terahertz waveguide crossing based on effective medium. OPTICS LETTERS 2021; 46:5469-5472. [PMID: 34724503 DOI: 10.1364/ol.436039] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 07/07/2021] [Accepted: 09/28/2021] [Indexed: 06/13/2023]
Abstract
All-silicon effective-medium-clad waveguides are a promising candidate for an integrated terahertz platform with high efficiency and broad bandwidth. Waveguide crossings are essential circuit components, allowing for wave routing over shorter paths to increase circuit density. However, the simple intersection of two orthogonal effective-medium-clad waveguides results in terahertz wave scattering, leading to relatively high cross talk. In this work, a low-loss, 40% fractional bandwidth crossing utilizing Maxwell-Garnet effective-medium theory and wavefront planarization techniques is proposed. This monolithic structure is fabricated on a single high-resistivity float-zone silicon wafer using a deep reactive ion etching process with a modest 4.4 mm diameter (4.03λ0) structure footprint. Experimentally verified results show low insertion loss, less than 1 dB, and average cross talk level of -39dB for both E11x and E11y operating modes, over 220-330 GHz with a 40% fractional bandwidth. This waveguide crossing can be foreseen as a useful routing component for terahertz all-silicon integrated circuits. The proposed techniques are applicable to other dielectric waveguide platforms at infrared and optical frequencies.
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Dong Z, Qiu J, Chen Y, Liu C, Guo H, Zhang W, He Z, Wu J. Ultra-compact X-shaped waveguide crossings with flexible angles based on inverse design. OPTICS EXPRESS 2021; 29:19715-19726. [PMID: 34266076 DOI: 10.1364/oe.426733] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/01/2021] [Accepted: 05/29/2021] [Indexed: 06/13/2023]
Abstract
When photonics integrated circuits (PICs) become more massive in scale, the area of chip can't be taken full advantage of with 2×2 waveguide crossings with a 90° intersection angle. Crossings with small angles would be a better idea to further improve the area utilization, but few works have researched 2×2 crossings with different angles. In this paper, in order to have an ultra-compact footprint and a flexible intersection angle while keeping a high performance, we report a series of compact X-shaped waveguide crossings in silicon-on-insulator (SOI) waveguides for fundamental transverse electric (TE0) mode, designed by using finite-difference frequency-domain (FDFD) numerical analysis method and a global optimization method. Thanks to inverse design, a compact footprint as small as 4.5 µm2 and various angles between two input/output waveguides of 30°, 45°, 60°, 80° and 90° are achieved. Simulation results show that all crossings have good performance of insertion losses (ILs) within 0.1∼0.3 dB and crosstalks (CTs) within -20∼-50 dB in the wavelength range of 1525∼1582 nm. Moreover, the designed crossings were fabricated on a commercially available 220-nm SOI platform. The measured results show that the ILs of all crossings are around 0.2∼0.4 dB and the CTs are around -20 dB∼-32 dB; especially for the 30° intersection angle, the crossing has IL around 0.2 dB and CT around -31 dB in C band. Besides, we theoretically propose an approach of a primary structure processing technique to enhance the device performance with a more compact footprint. This technique is to remove the redundant structures in conjunction with the electric field distribution during the optimization procedure of inverse design. For the new 90° crossing structure produced by it, simulation results show that ILs of 0.29 ± 0.03 dB and CTs of -37 ± 2.5 dB in the wavelength range of 1500∼1600 nm are achieved and the footprint is shrunk by 25.5%.
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On-chip silicon photonic controllable 2 × 2 four-mode waveguide switch. Sci Rep 2021; 11:897. [PMID: 33441726 PMCID: PMC7807047 DOI: 10.1038/s41598-020-80174-8] [Citation(s) in RCA: 3] [Impact Index Per Article: 1.0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 06/22/2020] [Accepted: 12/14/2020] [Indexed: 01/29/2023] Open
Abstract
Multimode optical switch is a key component of mode division multiplexing in modern high-speed optical signal processing. In this paper, we introduce for the first time a novel 2 × 2 multimode switch design and demonstrate in the proof-of-concept. The device composes of four Y-multijunctions and 2 × 2 multimode interference coupler using silicon-on-insulator material with four controllable phase shifters. The shifters operate using thermo-optic effects utilizing Ti heaters enabling simultaneous switching of the optical signal between the output ports on four quasi-transverse electric modes with the electric power consumption is in order of 22.5 mW and the switching time is 5.4 µs. The multimode switch exhibits a low insertion loss and a low crosstalk below - 3 dB and - 19 dB, respectively, in 50 nm bandwidth in the third telecom window from 1525 to 1575 nm. With a compact footprint of 10 µm × 960 µm, this device exhibits a relatively large width tolerance of ± 20 nm and a height tolerance of ± 10 nm. Furthermore, the conceptual principle of the proposed multimode switch can be reconfigurable and scalable in multifunctional on-chip mode-division multiplexing optical interconnects.
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Ultra-compact high efficiency and low crosstalk optical interconnection structures based on inverse designed nanophotonic elements. Sci Rep 2020; 10:11993. [PMID: 32686746 PMCID: PMC7371873 DOI: 10.1038/s41598-020-68936-w] [Citation(s) in RCA: 6] [Impact Index Per Article: 1.5] [Reference Citation Analysis] [Abstract] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/24/2020] [Accepted: 06/29/2020] [Indexed: 11/08/2022] Open
Abstract
In this paper, we combine inverse design concept and direct binary search algorithm to demonstrate three ultra-compact high efficiency and low crosstalk on-chip integrated optical interconnection basic devices in the entire wavelength range of 1,400-1600 nm based on silicon-on-insulator platform. A 90-degree waveguide bend with a footprint of only 2.4 × 2.4 μm2 is designed, whose transmission efficiency up to 0.18 dB. A waveguide crossing with a footprint of only 2.4 × 2.4 μm2 is designed, which can provide insertion loss of less than 0.5 dB and crosstalk (CL) of lower than - 19 dB. A same direction waveguide crossing with footprint of only 2.4 × 3.6 μm2 is designed, which can provide the insertion loss of less than 0.56 dB and the crosstalk of lower than - 21 dB. Then, we use them to form several ultra-compact optical interconnect basic structures and performed the simulation calculation. They overall achieve high performance. This will significantly improve the integration density.
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Badri SH, Gilarlue MM. Silicon nitride waveguide devices based on gradient-index lenses implemented by subwavelength silicon grating metamaterials. APPLIED OPTICS 2020; 59:5269-5275. [PMID: 32543549 DOI: 10.1364/ao.393501] [Citation(s) in RCA: 23] [Impact Index Per Article: 5.8] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 03/24/2020] [Accepted: 05/07/2020] [Indexed: 06/11/2023]
Abstract
The rapid development of photonic integrated circuits demands the design of efficient and compact waveguide devices such as waveguide tapers and crossings. Some components in the silicon nitride (SiN) waveguide platform are superior to their counterparts in the silicon waveguide platform. Designing a compact SiN waveguide taper and crossing is crucial to reduce the size of SiN photonic components. In this paper, we utilize the focusing property of the Luneburg lens to design an SiN taper connecting a 10-µm-wide waveguide to a 1-µm-wide waveguide. Three-dimensional full-wave simulations indicate that the designed 13-µm-long taper has an average transmission efficiency of 92% in the wavelength range of 1500-1600 nm. We also present an in-plane SiN waveguide crossing based on the imaging property of the square Maxwell's fisheye lens designed with quasi-conformal transformation optics. The designed waveguide crossing occupies a compact footprint of 5.65µm×5.65µm, while its average insertion loss is 0.46 dB in the bandwidth of 1500-1600 nm. To the best our knowledge, the designed SiN waveguide taper and crossing have the smallest footprints to date.
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Johnson M, Thompson MG, Sahin D. Low-loss, low-crosstalk waveguide crossing for scalable integrated silicon photonics applications. OPTICS EXPRESS 2020; 28:12498-12507. [PMID: 32403746 DOI: 10.1364/oe.381304] [Citation(s) in RCA: 9] [Impact Index Per Article: 2.3] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 10/24/2019] [Accepted: 02/19/2020] [Indexed: 06/11/2023]
Abstract
A waveguide crossing based on multi-mode interference is designed and experimentally characterized on the silicon platform. The insertion loss of the device is measured as 43 ± 4 mdB per crossing, with a crosstalk of < -50 dB between 1550 and 1560 nm, in good agreement with predictions from 3D finite-difference time-domain simulations. Furthermore, the device backscatter was investigated using white light reflectometry and no significant backscatter was observed from 160 waveguide crossings in the time domain. In the frequency domain, the backscatter of the waveguide crossing device was measured experimentally for the first time, achieving a backscatter of -55 dB. The crossing has a footprint of 14.3 x 14.3 µm2 and can be fabricated in a single step.
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Wu S, Mu X, Cheng L, Mao S, Fu H. State-of-the-Art and Perspectives on Silicon Waveguide Crossings: A Review. MICROMACHINES 2020; 11:mi11030326. [PMID: 32245136 PMCID: PMC7143419 DOI: 10.3390/mi11030326] [Citation(s) in RCA: 17] [Impact Index Per Article: 4.3] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 02/10/2020] [Revised: 03/15/2020] [Accepted: 03/19/2020] [Indexed: 02/06/2023]
Abstract
In the past few decades, silicon photonics has witnessed a ramp-up of investment in both research and industry. As a basic building block, silicon waveguide crossing is inevitable for dense silicon photonic integrated circuits and efficient crossing designs will greatly improve the performance of photonic devices with multiple crossings. In this paper, we focus on the state-of-the-art and perspectives on silicon waveguide crossings. It reviews several classical structures in silicon waveguide crossing design, such as shaped taper, multimode interference, subwavelength grating, holey subwavelength grating and vertical directional coupler by forward or inverse design method. In addition, we introduce some emerging research directions in crossing design including polarization-division-multiplexing and mode-division-multiplexing technologies.
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Affiliation(s)
| | | | | | | | - H.Y. Fu
- Correspondence: ; Tel.: +86-755-3688-1498
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Yang Y, Guo Y, Huang Y, Pu M, Wang Y, Ma X, Li X, Luo X. Crosstalk reduction of integrated optical waveguides with nonuniform subwavelength silicon strips. Sci Rep 2020; 10:4491. [PMID: 32161297 PMCID: PMC7066159 DOI: 10.1038/s41598-020-61149-1] [Citation(s) in RCA: 11] [Impact Index Per Article: 2.8] [Reference Citation Analysis] [Abstract] [Key Words] [Grants] [Track Full Text] [Download PDF] [Figures] [Journal Information] [Subscribe] [Scholar Register] [Received: 07/17/2019] [Accepted: 02/18/2020] [Indexed: 11/08/2022] Open
Abstract
Suppression of the crosstalk between adjacent waveguides is important yet challenging in the development of compact and dense photonic integrated circuits (PICs). During the past few years, a few of excellent approaches have been proposed to achieve this goal. Here, we propose a novel strategy by introducing nonuniform subwavelength strips between adjacent waveguides. In order to determine the widths and positions of nonuniform subwavelength strips, the particle swarm optimization (PSO) algorithm is utilized. Numerical results demonstrate that the coupling length between adjacent waveguides is increased by three (five) orders of magnitude in comparison with the case of uniform (no) subwavelength strips. Our method greatly reduces crosstalk and is expected to achieve a highly compact integrated density of PICs.
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Affiliation(s)
- Yang Yang
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China
- School of Optoelectronics, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Yinghui Guo
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China
- School of Optoelectronics, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Yijia Huang
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China
- School of Optoelectronics, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Mingbo Pu
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China
- School of Optoelectronics, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Yanqin Wang
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China
- School of Optoelectronics, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Xiaoliang Ma
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China
- School of Optoelectronics, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Xiong Li
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China
- School of Optoelectronics, University of Chinese Academy of Sciences, Beijing, 100049, China
| | - Xiangang Luo
- State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, 610209, China.
- School of Optoelectronics, University of Chinese Academy of Sciences, Beijing, 100049, China.
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Hoffman GB, Dallo C, Starbuck A, Hood D, Pomerene A, Trotter D, DeRose CT. Improved broadband performance of an adjoint shape optimized waveguide crossing using a Levenberg-Marquardt update. OPTICS EXPRESS 2019; 27:24765-24780. [PMID: 31510360 DOI: 10.1364/oe.27.024765] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Subscribe] [Scholar Register] [Received: 04/01/2019] [Accepted: 06/02/2019] [Indexed: 06/10/2023]
Abstract
We derive an adjoint shape optimization algorithm with a compound figure of merit and demonstrate its use with both gradient descent and Levenberg-Marquart updates for the case of SiO2-buried SOI coplanar waveguide crossings. We show that a smoothing parameter, basis function width, can be used to eliminate small feature sizes with a small cost to device performance. The Levenberg-Marquardt update produces devices with larger bandwidth. A waveguide crossing with simulated performance values of > 60 dB cross power extinction ratio and > -0.08 dB through power over the 1500-1600 nm band is presented. A fabricated device is measured to have a maximum of -0.06 dB through power and a 50 dB cross power extinction ratio.
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