One-step generation of hybrid micro-optics with high-frequency diffractive structures on infrared materials by ultra-precision side milling

Recent Developments in Mechanical Ultraprecision Machining for Nano/Micro Device Manufacturing

The production of many components used in MEMS or NEMS devices, especially those with com-plex shapes, requires machining as the best option among manufacturing techniques. Ultraprecision machining is normally employed to achieve the required shapes, dimensional accuracy, or improved surface quality in most of these devices and other areas of application. Compared to conventional machining, ultraprecision machining involves complex phenomenal processes that require extensive investigations for a better understanding of the material removal mechanism. Materials such as semiconductors, composites, steels, ceramics, and polymers are commonly used, particularly in devices designed for harsh environments or applications where alloyed metals may not be suitable. However, unlike alloyed metals, materials like semiconductors (e.g., silicon), ceramics (e.g., silicon carbide), and polymers, which are typically brittle and/or hard, present significant challenges. These challenges include achieving precise surface integrity without post-processing, managing the ductile-brittle transition, and addressing low material removal rates, among others. This review paper examines current research trends in mechanical ultraprecision machining and sustainable ultraprecision machining, along with the adoption of molecular dynamics simulation at the micro and nano scales. The identified challenges are discussed, and potential solutions for addressing these challenges are proposed.

Three-level nanogrooves by vibration-assisted fly-cutting for diffraction regulation and array output

Integrating geometric and diffractive optics functions is urgently needed to develop compact equipment for integrating diffraction manipulation and arrayed outputs. In this Letter, a superimposed three-level-grooved surface is proposed to manipulate the diffraction of visible light and provide an array output. Structure design, vibration-assisted fly-cutting, finite-difference time-domain calculations, and diffraction tests are conducted to fabricate the three-level grooves and explore the diffraction mechanism. Nanogrooves with a period close to the middle wavelength of the spectrum primarily enhances the diffraction at low diffraction orders and angles because of resonance. Optical tests prove that these superimposed three-level nanogrooves have a large bandwidth when providing the array output and serving to control and transmit diffracted light. They also show stronger performance for manipulating low diffraction orders.

Fabrication of a Chalcogenide Glass Microlens Array for Infrared Laser Beam Homogenization

Infrared (IR) microlens arrays (MLA) have attracted increasing interest for use in infrared micro-optical devices and systems. However, the beam homogenization of IR laser light is relatively difficult to achieve because most materials absorb strongly in the IR wavelength band. In this paper, we present a new method for the application of double-sided quasi-periodic chalcogenide glass (ChG) MLAs to infrared laser homogenization systems. These are non-regular arrays of closely spaced MLAs. The double-sided MLAs were successfully prepared on the ChG surface using a single-pulse femtosecond laser-assisted chemical etching technique and a precision glass molding technique. More than two million close-packed microlenses on the ChG surface were successfully fabricated within 200 min. By taking advantage of ChG’s good optical performance and transmittance (60%) in the infrared wavelength band (1~11 μm), the homogenization of the IR beam was successfully achieved using the ChG quasi-periodic MLA.

Development of a two-degree-of-freedom vibration generator for fabricating optical microstructure arrays

Optical microstructure arrays on metallic surfaces are drawing ever-increasing attention due to the increasing requirements in optical systems. Although vibration generators are developed for generating optical microarrays with the ultra-precision diamond cutting process, the systematic research works on its mechanical design, working performance simulation, and numerical simulation of microstructure arrays has received less attention. In this study, a novel two-degree-of-freedom vibration generator (2DOF-VG) is designed based on the triangular amplification mechanism. To precisely simulate the working performance of this designed 2DOF-VG, the detailed multi-physics finite element method is proposed. Considering the three-dimensional geometric shape of the cutting tool, the cutting motion trajectory, and the elastic recovery of the workpiece material, the numerical simulation algorithm of the microstructure arrays generation is then established and used to precisely predict the surface topography of microstructure arrays. Finally, two types of unique microstructure arrays are fabricated, which demonstrates the feasibility and flexibility of the 2DOF-VG.

Rapid Fabrication of Large-Area Concave Microlens Array on ZnSe

A rapid and single-step method for the fabrication of a zinc selenide (ZnSe) concave microlens array through the high-speed line-scanning of a femtosecond laser pulse is presented. Approximately 1.1 million microlenses, with minimized volume and high transparency at wavelengths between approximately 0.76–20 μm were fabricated within 36 min. More importantly, the size of the microlenses can be controlled by adjusting the laser power. Their high-quality infrared optical performance was also demonstrated. This method holds great promise for the development of ZnSe-based micro-optical devices.

Fabrication of Chalcogenide Glass Based Hexagonal Gapless Microlens Arrays via Combining Femtosecond Laser Assist Chemical Etching and Precision Glass Molding Processes

Chalcogenide glasses (ChGs) are emerging as critical infrared (IR)-enabled materials in advanced IR optical systems by the wealth of their transparency in the key wide infrared (IR) transmission window. However, fabrication of ChG-based integrated micro-optical components in an efficient and economical way remains a huge challenge. In this paper, a 3D close-packed hexagonal microlens array (MLA) possessing over 6000 convex hexagonal micro-lenslets with the size of tens of micrometers within a footprint of 10 mm × 10 mm on a Ge₂₀Sb₁₅Se₆₅ ChG surface was successfully fabricated via a precise thermal-mechanical molding process. The master mold of ChG MLA was firstly fabricated by a femtosecond laser-assisted chemical etching process and then transferred on to the surface of the ChG via a precision thermo-mechanical molding process, which resulted in a convex MLA. The morphology, imaging and focusing performances of the as-prepared ChG MLA were investigated and demonstrated the advancement of the method. Meanwhile, the IR transmittance and x-ray diffraction image of the ChG MLAs were measured to verify the structural and compositional stability of the ChG under the given molding conditions. The combined results proved a new route to mass production of miniaturized gapless ChG MLAs for advanced infrared micro-optics.

Development of self-tuned diamond milling system for fabricating infrared micro-optics arrays with enhanced surface uniformity and machining efficiency

Infrared micro-optics arrays (MOAs) featuring large numbers of micro-freeform lenslet are required increasingly in advanced infrared optical systems. Ultra-precision diamond cutting technologies have been widely used to fabricate MOAs with high form accuracy. However, the existing technologies can easily cause the non-uniformly fractured surface of infrared MOAs, due to the inherent low fracture toughness and high anisotropy of infrared materials as well as the time-varying chip thickness induced by ever-changing height and slope of the desired MOAs. In this study, a novel self-tuned diamond milling (STDM) system is proposed to achieve the ductile cutting of infrared MOAs with enhanced the surface uniformity and machining efficiency, and the corresponding toolpath planning algorithm is developed. In STDM system, a dual-axial fast servo motion platform is integrated into a raster milling system to self-adaptively match the maximum chip thickness for each tool rotational cycle with the critical depth of cut of the infrared material according to the local surface topography, thereby obtaining crack-free lenslet with high surface uniformity. Practically, micro-aspheric MOAs free from fractures are successfully machined on single-crystal silicon, a typical infrared material, to validate the proposed cutting concept. Compared with the conventional diamond milling, the proposed STDM is demonstrated to be able to avoid the non-uniform fractures without needing to reduce feed rate, and a smaller surface roughness of 4 nm and nearly double machining efficiency are achieved.

Flexible fabrication of micro-optics arrays with high-aspect-ratio by an offset-tool-servo diamond machining system

Micro-optics arrays (MOAs) with high aspect ratio (AR) have unique advantages in realizing the minimization of optical systems by reducing the focal distance. Fast or slow tool servo (F/STS) is widely regarded as an outperforming technique for the fabrication of MOAs featuring high form accuracy. However, in the machining of MOAs with high AR, the non-smooth cutting trajectory of F/STS inevitably leads to intensive tool vibrations and the interference between the tool flank face and the finished surface, thereby deteriorating surface roughness. In this study, a novel offset-tool-servo (OTS) diamond machining technology and the corresponding toolpath generation algorithm are proposed to achieve the flexible fabrication of micro-freeform lens arrays with high AR. In OTS, with the assistance of four-axis servo motions, a spiral toolpath is generated for each single lenslet, which effectively avoids the tool interference induced by the steep descending movement of the tool in F/STS. Besides, the proposed machining strategy well ensures the smoothness of the generated toolpath for each lenslet, thereby effectively avoiding the destruction of the surface quality induced by the tool vibrations. In practice, this method is validated by fabricating different MOAs with aspheric and freeform structures. Compared with F/STS, the OTS method is demonstrated to be able to achieve two times larger AR values, and smoother and more uniform surface quality are simultaneously achieved.

Low-cost high integration IR polymer microlens array

In this Letter, a low-cost refractive convex microlens array device based on infrared a polymer is fabricated by a nanoimprinting technique. The device integrates more than 4000 microlenslets within a footprint of 10  mm×10  mm. The surface quality, spectral transmittance, imaging resolution, and surface damage threshold of the device have been fully characterized. The IR imaging and parallel laser inscription experiments confirm the remarkable optical performance of the fabricated device. Owing to the merits of high optical quality, low fluence lose, and simple fabrication, this device is promising in cutting-edge IR applications, such as IR imaging, laser fabrication, and so on.