Structural color filters based on an all-dielectric metasurface exploiting silicon-rich silicon nitride nanodisks

Multiresonant all-dielectric metasurfaces based on high-order multipole coupling in the visible

In many cases, optical metasurfaces are studied in the single-resonant regime. However, a multiresonant behavior can enable multiband devices with reduced footprint, and is desired for applications such as display pixels, multispectral imaging and sensing. Multiresonances are typically achieved by engineering the array lattice (e.g., to obtain several surface lattice resonances), or by adopting a unit cell hosting one (or more than one) nanostructure with some optimized geometry to support multiple resonances. Here, we present a study on how to achieve multiresonant metasurfaces in the visible spectral range by exploiting high-order multipoles in dielectric (e.g., diamond or titanium dioxide) nanostructures. We show that in a simple metasurface (for a fixed particle and lattice geometry) one can achieve triple resonance occurring nearly at RGB (red, green, and blue) wavelengths. Based on analytical and numerical analysis, we demonstrate that the physical mechanism enabling the multiresonance behavior is the lattice induced coupling (energy exchange) between high-order Mie-type multipoles moments of the metasurface's particles. We discuss the influence on the resonances of the metasurface's finite size, surrounding material, polarization, and lattice shape, and suggest control strategies to enable the optical tunability of these resonances.

Sb2S3-Based Dynamically Tuned Color Filter Array via Genetic Algorithm

Color displays have become increasingly attractive, with dielectric optical nanoantennas demonstrating especially promising applications due to the high refractive index of the material, enabling devices to support geometry-dependent Mie resonance in the visible band. Although many structural color designs based on dielectric nanoantennas employ the method of artificial positive adjustment, the design cycle is too lengthy and the approach is non-intelligent. The commonly used phase change material Ge₂Sb₂Te₅ (GST) is characterized by high absorption and a small contrast to the real part of the refractive index in the visible light band, thereby restricting its application in this range. The Sb₂S₃ phase change material is endowed with a wide band gap of 1.7 to 2 eV, demonstrating two orders of magnitude lower propagation loss compared to GST, when integrated onto a silicon waveguide, and exhibiting a maximum refractive index contrast close to 1 at 614 nm. Thus, Sb₂S₃ is a more suitable phase change material than GST for tuning visible light. In this paper, genetic algorithms and finite-difference time-domain (FDTD) solutions are combined and introduced as Sb₂S₃ phase change material to design nanoantennas. Structural color is generated in the reflection mode through the Mie resonance inside the structure, and the properties of Sb₂S₃ in different phase states are utilized to achieve tunability. Compared to traditional methods, genetic algorithms are superior-optimization algorithms that require low computational effort and a high population performance. Furthermore, Sb₂S₃ material can be laser-induced to switch the transitions of the crystallized and amorphous states, achieving reversible color. The large chromatic aberration ∆E modulation of 64.8, 28.1, and 44.1 was, respectively, achieved by the Sb₂S₃ phase transition in this paper. Moreover, based on the sensitivity of the structure to the incident angle, it can also be used in fields such as angle-sensitive detectors.

Mie Resonances Enabled Subtractive Structural Colors with Low-Index-Contrast Silicon Metasurfaces

All-dielectric structural colors are attracting increasing attention due to their great potential for various applications in display devices, imaging security certification, optical data storage, and so on. However, it remains a great challenge to achieve vivid structural colors with low-aspect-ratio silicon nanostructures directly on a silicon substrate, which is highly desirable for future integrated optoelectronic devices. The main obstacle comes from the difficulty in achieving strong Mie resonances by Si nanostructures on low-index-contrast substrates. Here, we demonstrate a generic principle to create vivid bright field structural colors by using silicon nanopillars directly on top of the silicon substrate. Complementary colors across the full visible spectrum are achieved as a result of the enhanced absorption due to Mie resonances. It is shown that the color saturation increases with the increasing of the nanopillar height. Remarkably, blue and black colors are generated by trapezoid nanopillar arrays as a result of the absorption at long wavelengths or all visible wavelengths. Our strategy provides a powerful scheme for accelerating the integrated optoelectronic applications in nanoscale color printing, imaging, and displays.

All-dielectric high saturation structural colors enhanced by multipolar modulated metasurfaces

A visible light depth modulation based on a metasurface consisting of TiO₂ nanorings and SiO₂ substrate is proposed to significantly enhance the saturation and structural colors' gamut. Compared with the nanostructure of the TiO₂ nanodisks, the developed TiO₂ nanorings can enhance monochromatic excitation by inhibiting the multipole mode, particularly electric quadrupole (EQ) mode at a shorter wavelength. Furthermore, when TiO₂ nanorings are combined with a refractive index matching layer - water, reflection bandwidth, and background reflection are reduced, and the brightness and color purity are significantly enhanced. The novel and unique nanostructures developed can generate a significant gamut of 140% sRGB and 103% Adobe RGB. Additionally, the color structure based on the TiO₂ nanoring metasurface is sensitive to the surrounding medium's refractive index and can be employed in sensor display and other fields, as well as to amplify color information in high resolution display and imaging applications.

Ultra-Thin and Lithography-Free Transmissive Color Filter Based on Doped Indium Gallium Zinc Oxide with High Performance

A kind of ultra-thin transmissive color filter based on a metal-semiconductor-metal (MSM) structure is proposed. The displayed color can cover the entire visible range and switches after H₂ treatment. An indium gallium zinc oxide (IGZO) semiconductor was employed, as the concentration of charge carriers can be controlled to adjust the refractive index and achieve certain colors. The color modulation in the designed structure was verified using the rigorous coupled wave analysis (RCWA) method. The angular independence of the relative transmission could reach up to 60°, and polarization-insensitive performance could also be maintained. Numerical results demonstrated that the thickness of IGZO was the key parameter to concentrate the incident light. The overall structure is planar and lithography-free and can be produced with simple preparation steps. The obtained results can also be extended to other similar resonators where a proper cavity allows dynamical functionality.

Multi-layered all-dielectric grating visible color filter with a narrow band and high-quality factor

In this paper, we proposed a double-layer all-dielectric grating. Under the premise of ensuring the strength of the resonance peak, the upper SiO₂ grating layer suppresses the tendency of high-order dipole resonance excitation and improves the transmittance at the non-resonant position (T > 99%). The distribution of chromaticity coordinates on the CIE 1931 chromaticity diagram also proves that suppressing side peaks can effectively increase the saturation of structural colors, which is essential for a high precision imaging system. The cyclic displacement current excites the magnetic dipole resonance, which causes the magnetic field to be confined in the high refractive index material HfO₂ grating layer. By adjusting the duty cycle of the grating structure, a reflection spectrum with low full width half maximum (FWHM) (∼2 nm) and high-quality factor Q (∼424.5 nm) can be obtained. And the spectral intensity is more sensitive to the polarization angle. This work is of great significance to the development of sensors, display imaging and other fields. At the same time, the material of the grating filter meets the requirements of high damage threshold of the high-power laser system, and its high-power laser application potential is inestimable.

Manipulation of resonance orders and absorbing materials for structural colors in transmission with improved color purity

We present an improved color purity of additive transmissive structural color filters by controlling a resonance order and by inserting a highly absorbing material. The proposed structure consists of a single metal sandwiched by two transparent dielectric media serving as a cavity to minimize the ohmic loss in the metal mirrors, which is distinctly different from a conventional Fabry-Perot (FP) cavity that is in general designed to have two metal mirrors. Low reflections at an air-dielectric interface cause a quality-factor of a resonance to be reduced, causing a degraded color purity, which can be improved by employing a 1st order resonance that exhibits a narrower bandwidth than a fundamental FP resonant mode (0th order). For a red color with the improved purity, introducing an ultrathin absorbing layer in the middle of a top cavity enables the 1st resonance to be trivially influenced while selectively suppressing a 2nd order resonance appearing at the shorter wavelength region. Moreover, angle-insensitive performances up to 60° are attained by utilizing a cavity material with high index of refraction. Besides, the fabrication of the structural coloring devices involves a few deposition steps, thus rendering the approach suitable for applications over the large area. The described concept could be applied to diverse applications, such as colored solar panels, sensors, imaging devices, and decorations.

Perfectly-reflecting guided-mode-resonant photonic lattices possessing Mie modal memory

Resonant periodic nanostructures provide perfect reflection across small or large spectral bandwidths depending on the choice of materials and design parameters. This effect has been known for decades, observed theoretically and experimentally via one-dimensional and two-dimensional structures commonly known as resonant gratings, metamaterials, and metasurfaces. The physical cause of this extraordinary phenomenon is guided-mode resonance mediated by lateral Bloch modes excited by evanescent diffraction orders in the subwavelength regime. In recent years, hundreds of papers have declared Fabry-Perot or Mie resonance to be the basis of the perfect reflection possessed by periodic metasurfaces. Treating a simple one-dimensional cylindrical-rod lattice, here we show clearly and unambiguously that Mie resonance does not cause perfect reflection. In fact, the spectral placement of the Bloch-mode-mediated zero-order reflectance is primarily controlled by the lattice period by way of its direct effect on the homogenized effective-medium refractive index of the lattice. In general, perfect reflection appears away from Mie resonance. However, when the lateral leaky-mode field profiles approach the isolated-particle Mie field profiles, the resonance locus tends towards the Mie resonance wavelength. The fact that the lattice fields "remember" the isolated particle fields is referred here as "Mie modal memory." On erasure of the Mie memory by an index-matched sublayer, we show that perfect reflection survives with the resonance locus approaching the homogenized effective-medium waveguide locus. The results presented here will aid in clarifying the physical basis of general resonant photonic lattices.

Generation of additive colors with near unity amplitude using a multilayer tandem Fabry-Perot cavity

In this paper, the generation of additive red-green-blue (RGB) colors in reflectance mode with near unity amplitude is demonstrated. For this purpose, a multilayer structure made of metal-insulator-metal-semiconductor-insulator stacks is designed to achieve >0.9 reflection peaks with full-width-at-half-maximum values <0.3λ_peak. The proposed design also shows near zero reflection in off-resonance spectral ranges, and this, in turn, leads to high color purity. The optimized designs are fabricated, and simulation and theoretical results are verified with characterization findings. This work demonstrates the potential of multilayer tandem cavity designs in the realization of lithography-free large-scale compatible functional optical coatings.

Nearly Perfect Transmissive Subtractive Coloration through the Spectral Amplification of Mie Scattering and Lattice Resonance

Silicon has been utilized in metasurfaces to produce structural color filters due to its compatibility with mature and cost-effective methods for complementary metal oxide semiconductor devices. In this work, we propose and demonstrate efficiency- and scattering-enhanced structural color filters using all-dielectric metasurfaces made up of engineered hydrogenated amorphous silicon (a-Si:H) nanoblocks. Wavelength-dependent filtering is achieved by Mie scattering as each structure individually supports the electric dipole (ED) and magnetic dipole (MD) resonances. The ED and MD resonances are identified by observing the field profiles of the resonance calculated by finite element method (FEM) simulations. To enhance the efficiency and scattering response of the all-dielectric metasurfaces, the proposed structural color filters are designed with consideration of the lattice resonances and scattering directivity. The spectral positions of the transmission dips and peaks are rigorously analyzed in accordance with the Mie theory and multipole expansion. The transmission spectra exhibit 100% transmission where Kerker's first condition is satisfied, while the lattice resonances amplify the ED and MD scattering responses throughout the entire visible regime. Various colors are generated by varying the resonance peak, which is controlled by varying the geometric parameters of a-Si:H nanoblocks. The proposed structural color printing devices are expected to have applications in dynamic color displays, imaging devices, and photorealistic color printing.

Internal nanocavity based high-resolution and stable structural colours fabricated by laser printing

Bioinspired structural colors are attracting increasing attention in photonics, display, labeling and so forth. High-resolution and stable coloration is significant but is challenging to be fabricated in a facile and low-cost way. Herein, multilayer architecture containing an internal nanocavity as the structural color unit is obtained conveniently by direct nanosecond laser printing in atmosphere condition. Arbitrary colorful patterns with submicron accuracy can be realized only by a single step. And such structural colors induced by inner structures in the interlayer are antipollutive, antioxidative and easy to clean.

Focusing and imaging of a polarization-controlled bifocal metalens

Metalenses are a kind of flat optical device, which consist of an array of nanoantennas with subwavelength thickness that manipulates the incoming light wavefront in a precisely tailorable manner. In this work, we proposed a bifocal metalens that can realize switchable multiplane imaging, controlled by changing the polarization state of an incident light. The polarization-dependent metalens was designed and fabricated by arranging polysilicon nanobeam unit elements. We simulated and experimentally characterized the focus performance of the bifocal metalens. Under the light incidence with left-handed circular polarization, the focal length is 250 µm. By changing the polarization state to right-handed circular polarization, the focal length is tuned to 200 µm. Experimental results and numerical simulations are in good agreement. Moreover, when a linear polarization light is used, two focal spots will appear at the same time. Such a bifocal metalens is suitable for multiplane imaging applications.

Bright Field Structural Colors in Silicon-on-Insulator Nanostructures

Structural coloration with artificially nanostructured materials is emerging as a prospective alternative to traditional pigments for the high resolution, sustainable recycling, and long-time durability. However, achieving bright field structural colors with dielectric nanostructures remains a great challenge due to the weak scattering in an asymmetric environment. Here, we demonstrate all-dielectric bright field structural colors with diffraction-limited resolution on the silicon-on-insulator platform. The backscattering is strongly enhanced from the constructive interference between Mie resonances of individual Si antennas and Fabry-Perot resonances supported by the SiO₂ layer. The fabricated colors with varying hues and saturations show strong insensitivity with respect to the interparticle spacing and, remarkably, the viewing angle under resonant conditions. Compared with creating a quasi-homogeneous environment, our strategy is solid and complementary metal-oxide semiconductor integrable, paving the way for practical applications of structural colors in nanoscale color printing, microdisplays, and imaging.

Suppressing material loss in the visible and near-infrared range for functional nanophotonics using bandgap engineering

All-dielectric nanostructures have recently opened exciting opportunities for functional nanophotonics, owing to their strong optical resonances along with low material loss in the near-infrared range. Pushing these concepts to the visible range is hindered by their larger absorption coefficient, thus encouraging the search for alternative dielectrics for nanophotonics. Here, we employ bandgap engineering to synthesize hydrogenated amorphous Si nanoparticles (a-Si:H NPs) offering ideal features for functional nanophotonics. We observe significant material loss suppression in a-Si:H NPs in the visible range caused by hydrogenation-induced bandgap renormalization, producing strong higher-order resonant modes in single NPs with Q factors up to ~100 in the visible and near-IR range. We also realize highly tunable all-dielectric meta-atoms by coupling a-Si:H NPs to photochromic spiropyran molecules. ~70% reversible all-optical tuning of light scattering at the higher-order resonant mode under a low incident light intensity is demonstrated. Our results promote the development of high-efficiency visible nanophotonic devices.

Large absorption of high-index semiconductors has hindered the application of all dielectric nanostructures in the visible range. Here, the authors present bandgap-engineered hydrogenated amorphous Si nanoparticles with Q-factors up to 100 and their integration with photochromic molecules as tunable meta-atoms.

Polarization tunable color filters based on all-dielectric metasurfaces on a flexible substrate

Structural color filters based on all-dielectric materials are considered to be promising alternatives to metal nanostructures due to significant advantages, such as high-quality resonance effects and low losses of Ohmic effects. We demonstrate a polarization tunable color filter based on all-dielectric metasurfaces, which is based on the arrays of asymmetric monocrystalline silicon nanoblocks on the flexible substrate. By adjusting the physical dimensions of nanoblocks, the filter can exhibit a variety of bright transmission colors. Furthermore, the designed dielectric metasurfaces are sensitive to the linear polarization direction of the incident light, thus a wide range of color images can be created by changing the polarization angles. All of the color filter including the dielectric silicon nanoblocks, the overcladding, and the flexible substrate can be delaminated from the handler substrates and the optical property is reconfigurable, which will find applications in the functional color display, polarization detection and imaging, and secured optical tag.

Spectrally sharp metasurfaces for wide-angle high extinction of green lasers

In optical nanostructures used as artificial resonance-based color filters, there is unfortunate universal trade-off between spectral sharpness and angular tolerance as well as maximum extinction. We rigorously derive the maximum performance bounds of wavelength-rejection filters realized by single-layer plasmonic metasurfaces with a dominant resonance and weak near-field coupling, and propose a multi-layer approach to overcome these single-layer limits and trade-offs. We also present a realistic example that has a narrow full-width-at-half-maximum bandwidth of 24 nm with 10 dB extinction at 532 nm with good angular tolerance up to 60°. The performance of the proposed metasurface is close to the general theoretical bound.

Structural Colors Enabled by Lattice Resonance on Silicon Nitride Metasurfaces

Artificial color pixels based on dielectric Mie resonators are appealing for scientific research as well as practical design. Vivid colors are imperative for displays and imaging. Dielectric metasurface-based artificial pixels are promising candidates for developing flat, flexible, and/or wearable displays. Considering the application feasibility of artificial color pixels, wide color gamuts are crucial for contemporary display technology. To achieve a wide color gamut, ensuring the purity and efficiency of nanostructure resonance peaks in the visible spectrum is necessary for structural color design. Low-loss dielectric materials are suitable for achieving vivid colors with structural color pixels. However, high-order Mie resonances prevent color pixels based on dielectric metasurfaces from efficiently generating highly saturated colors. In particular, fundamental Mie resonances (electric/magnetic dipole) for red can result in not only a strong resonance peak at 650 nm but also high-order Mie resonances at shorter wavelengths, which reduces the saturation of the target color. To address these problems, we fabricated silicon nitride metasurfaces on quartz substrates and applied Rayleigh anomalies at relatively short wavelengths to successfully suppress high-order Mie resonances, thus creating vivid color pixels. We performed numerical design, semianalytic considerations, and experimental proof-of-concept examinations to demonstrate the performance of the silicon nitride metasurfaces. Apart from traditional metasurface designs that involve transmission and reflection modes, we determined that lateral light incidence on silicon nitride metasurfaces can provide vivid colors through long-range dipole interactions; this can thus extend the applications of such surfaces to eyewear displays and guided-wave illumination techniques.

Mie Resonant Structural Colors

Structural colors refer to colors produced by the interference of light scattered by judiciously arranged nano- or microscopic structures. In this Forum Article, we discuss the use of Mie resonant scattering in structural colors with dielectric and metal-dielectric hybrid structures to achieve notable figures of merit in pixel size and gamut range. Compared with plasmonic structures, resonant dielectric and hybrid structures are subjected to less loss while providing strong field confinement and large scattering cross sections, making them appealing for realizing vibrant colors at ultrahigh resolutions. We outline the basic principles behind Mie resonances in analytically solvable structures and highlight the relation between these resonances and color with demonstrations in dielectric metasurfaces. Mie resonant colors occurring in nonplanar designs including disordered systems are also explored. We review recent advances in dynamic and reversibly tunable Mie resonant colors and conclude by providing an outlook for future research directions.