Accurate surface profilometry using differential optical sectioning microscopy with structured illumination

Motionless Polarizing Structured Illumination Microscopy

In this investigation, we propose a motionless polarizing structured illumination microscopy as an axially sectioning and reflective-type device to measure the 3D surface profiles of specimens. Based on the spatial phase-shifting technique to obtain the visibility of the illumination pattern. Instead of using a grid, a Wollaston prism is used to generate the light pattern by the stable interference of two beams. As the polarization states of two beams are orthogonal with each other, a polarization pixelated CMOS camera can simultaneously obtain four phase-shifted patterns with the beams after passing through a quarter wave plate based on the spatial phase-shifting technique with polarization. In addition, a focus tunable lens is used to eliminate a mechanical moving part for the axial scanning of the specimen. In the experimental result, a step height sample and a concave mirror were measured with 0.05 µm and 0.2 mm repeatabilities of step height and the radius of curvature, respectively.

Angle-resolved spectral reflectometry with a digital light processing projector

We describe a novel approach for angle-resolved spectral reflectometry using a digital light processing (DLP) projector. Here, the DLP generates ring patterned images which are projected on the back focal plane of an objective lens. This way, the proposed method quickly changes the angle of incidence with ease based on the relation between the radius of the back focal plane and the angle of incidence. As a result, a detector captures the intensity of the image plane based on the angular and spectral axis. As the proposed method detects the interesting spot of a sample image, it can easily locate the measurement spot with viewing the full field of view, and the spot size is reduced by adopting the fiber. This method is verified by comparing the measurement output of the thin-film samples with a commercial ellipsometer. The result shows that our the proposed method enables the high accuracy of the thin-film inspection.

Fast structured illumination microscopy with reflectance disturbance resistibility and improved accuracy

The conventional fast structured illumination microscopy (FSIM) without vertical scanning has been proposed by Lee for fast surface profiling. Nevertheless, this method is vulnerable to nonuniform surface reflectivity which is generally caused by the different reflection characteristic of hybrid materials and the environmental fluctuations. Consequently, traditional IFSIM cannot be used in the profile measurement for the samples with surface heterogeneity. In this paper, an improved FSIM configuration (IFSIM) is explored for improving the axial accuracy and suppressing the disturbance of the reflectivity. With this technique, a sinusoidal pattern produced by the digital micro-mirror device (DMD) is illuminated onto the sample. The reflected patterns are captured by two charge-coupled devices (CCDs) that are separately placed in and behind or before the focal plane. The subtraction and sum values of the two axial modulation response curves (AMRs) are divided as the new response function, which effectively suppresses the influence of the inhomogeneous reflectivity. Both wide dynamic range and enhanced axial accuracy can be selectively obtained by controlling the defocusing amount of the two differential detectors. The theoretical analysis and experiments are conducted to verify the feasibility of this method.