Motionless Polarizing Structured Illumination Microscopy.
SENSORS 2021;
21:s21082837. [PMID:
33920615 PMCID:
PMC8073734 DOI:
10.3390/s21082837]
[Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Key Words] [Track Full Text] [Download PDF] [Figures] [Subscribe] [Scholar Register] [Received: 03/29/2021] [Revised: 04/14/2021] [Accepted: 04/16/2021] [Indexed: 11/17/2022]
Abstract
In this investigation, we propose a motionless polarizing structured illumination microscopy as an axially sectioning and reflective-type device to measure the 3D surface profiles of specimens. Based on the spatial phase-shifting technique to obtain the visibility of the illumination pattern. Instead of using a grid, a Wollaston prism is used to generate the light pattern by the stable interference of two beams. As the polarization states of two beams are orthogonal with each other, a polarization pixelated CMOS camera can simultaneously obtain four phase-shifted patterns with the beams after passing through a quarter wave plate based on the spatial phase-shifting technique with polarization. In addition, a focus tunable lens is used to eliminate a mechanical moving part for the axial scanning of the specimen. In the experimental result, a step height sample and a concave mirror were measured with 0.05 µm and 0.2 mm repeatabilities of step height and the radius of curvature, respectively.
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