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Benter S, Jönsson A, Johansson J, Zhu L, Golias E, Wernersson LE, Mikkelsen A. Geometric control of diffusing elements on InAs semiconductor surfaces via metal contacts. Nat Commun 2023; 14:4541. [PMID: 37500640 PMCID: PMC10374539 DOI: 10.1038/s41467-023-40157-5] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Grants] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 03/13/2023] [Accepted: 07/11/2023] [Indexed: 07/29/2023] Open
Abstract
Local geometric control of basic synthesis parameters, such as elemental composition, is important for bottom-up synthesis and top-down device definition on-chip but remains a significant challenge. Here, we propose to use lithographically defined metal stacks for regulating the surface concentrations of freely diffusing synthesis elements on compound semiconductors. This is demonstrated by geometric control of Indium droplet formation on Indium Arsenide surfaces, an important consequence of incongruent evaporation. Lithographic defined Aluminium/Palladium metal patterns induce well-defined droplet-free zones during annealing up to 600 °C, while the metal patterns retain their lateral geometry. Compositional and structural analysis is performed, as well as theoretical modelling. The Pd acts as a sink for free In atoms, lowering their surface concentration locally and inhibiting droplet formation. Al acts as a diffusion barrier altering Pd's efficiency. The behaviour depends only on a few basic assumptions and should be applicable to lithography-epitaxial manufacturing processes of compound semiconductors in general.
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Affiliation(s)
- Sandra Benter
- Department of Physics, Lund University, Box 118, Lund, 22100, Sweden.
- NanoLund Center for Nanoscience, Lund University, Box 118, Lund, 22100, Sweden.
| | - Adam Jönsson
- NanoLund Center for Nanoscience, Lund University, Box 118, Lund, 22100, Sweden
- Department of Electrical and Information Technology, LTH, Box 118, Lund, 22100, Sweden
| | - Jonas Johansson
- Department of Physics, Lund University, Box 118, Lund, 22100, Sweden
- NanoLund Center for Nanoscience, Lund University, Box 118, Lund, 22100, Sweden
| | - Lin Zhu
- MAX IV Laboratory, Lund University, Box 118, Lund, 22100, Sweden
| | - Evangelos Golias
- MAX IV Laboratory, Lund University, Box 118, Lund, 22100, Sweden
| | - Lars-Erik Wernersson
- NanoLund Center for Nanoscience, Lund University, Box 118, Lund, 22100, Sweden
- Department of Electrical and Information Technology, LTH, Box 118, Lund, 22100, Sweden
| | - Anders Mikkelsen
- Department of Physics, Lund University, Box 118, Lund, 22100, Sweden
- NanoLund Center for Nanoscience, Lund University, Box 118, Lund, 22100, Sweden
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On-chip generation and dynamic piezo-optomechanical rotation of single photons. Nat Commun 2022; 13:6998. [DOI: 10.1038/s41467-022-34372-9] [Citation(s) in RCA: 0] [Impact Index Per Article: 0] [Reference Citation Analysis] [Abstract] [Track Full Text] [Journal Information] [Subscribe] [Scholar Register] [Received: 02/18/2022] [Accepted: 10/24/2022] [Indexed: 11/17/2022] Open
Abstract
AbstractIntegrated photonic circuits are key components for photonic quantum technologies and for the implementation of chip-based quantum devices. Future applications demand flexible architectures to overcome common limitations of many current devices, for instance the lack of tuneabilty or built-in quantum light sources. Here, we report on a dynamically reconfigurable integrated photonic circuit comprising integrated quantum dots (QDs), a Mach-Zehnder interferometer (MZI) and surface acoustic wave (SAW) transducers directly fabricated on a monolithic semiconductor platform. We demonstrate on-chip single photon generation by the QD and its sub-nanosecond dynamic on-chip control. Two independently applied SAWs piezo-optomechanically rotate the single photon in the MZI or spectrally modulate the QD emission wavelength. In the MZI, SAWs imprint a time-dependent optical phase and modulate the qubit rotation to the output superposition state. This enables dynamic single photon routing with frequencies exceeding one gigahertz. Finally, the combination of the dynamic single photon control and spectral tuning of the QD realizes wavelength multiplexing of the input photon state and demultiplexing it at the output. Our approach is scalable to multi-component integrated quantum photonic circuits and is compatible with hybrid photonic architectures and other key components for instance photonic resonators or on-chip detectors.
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