Laser-fabricated axicons challenging the conventional optics in glass processing applications

Robust metallic micropatterns fabricated on quartz glass surfaces by femtosecond laser-induced selective metallization

Quartz glass has a wide range of application and commercial value due to its high light transmittance and stable chemical and physical properties. However, due to the difference in the characteristics of the material itself, the adhesion between the metal micropattern and the glass material is limited. This is one of the main things that affect the application of glass surface metallization in the industry. In this paper, micropatterns on the surface of quartz glass are fabricated by a femtosecond laser-induced backside dry etching (fs-LIBDE) method to generate the layered composite structure and the simultaneous seed layer in a single-step. This is achieved by using fs-LIBDE technology with metal base materials (Stainless steel, Al, Cu, Zr-based amorphous alloys, and W) with different ablation thresholds, where atomically dispersed high threshold non-precious metals ions are gathered across the microgrooves. On account of the strong anchor effect caused by the layered composite structures and the solid catalytic effect that is down to the seed layer, copper micropatterns with high bonding strength and high quality, can be directly prepared in these areas through a chemical plating process. After 20-min of sonication in water, no peeling is observed under repeated 3M scotch tape tests and the surface was polished with sandpapers. The prepared copper micropatterns are 18 µm wide and have a resistivity of 1.96 µΩ·cm (1.67 µΩ·cm for pure copper). These copper micropatterns with low resistivity has been proven to be used for the glass heating device and the transparent atomizing device, which could be potential options for various microsystems.

Femtosecond Laser Assisted 3D Etching Using Inorganic-Organic Etchant

Selective laser etching (SLE) is a technique that allows the fabrication of arbitrarily shaped glass micro-objects. In this work, we show how the capabilities of this technology can be improved in terms of selectivity and etch rate by applying an etchant solution based on a Potassium Hydroxide, water, and isopropanol mixture. By varying the concentrations of these constituents, the wetting properties, as well as the chemical reaction of fused silica etching, can be changed, allowing us to achieve etching rates in modified fused silica up to 820 μm/h and selectivity up to ∼3000. This is used to produce a high aspect ratio (up to 1:1000), straight and spiral microfluidic channels which are embedded inside a volume of glass. Complex 3D glass micro-structures are also demonstrated.

Formation of nanochannels in sapphire with ultrashort Bessel pulses

We explore, both by numerical simulations and experimentally, the flexibility in controlling Bessel beam parameters by re-imaging it into transparent material with a demagnifying collimator for the formation of high-aspect ratio nanochannels. Analysis of nanochannels produced by in-house precision-made axicon with 275 fs pulses in sapphire reveals the intensity threshold of ∼7.2 × 10¹³ W/cm² required to create the cylindrical microexplosion. We estimate that the maximum applied pressure during the process was 1.5 TPa and that the resulting density of compressed sapphire in the nanochannel's shells are ∼1.19 ± 0.02 times higher than the pristine crystal, and higher than what was achieved before in spherical microexplosion with Gaussian pulses.

High-fidelity glass micro-axicons fabricated by laser-assisted wet etching

We report on the fabrication of micro-axicons made of glass by laser-assisted wet etching (LAE) and laser polishing. The employed technique, relying on a direct-writing process using a femtosecond laser, allows revealing high fidelity profiles when the exposed glass samples are etched in a heated potassium hydroxide (KOH) solution. The remaining surface roughness is then decreased by carbon dioxide (CO₂) laser polishing. Such polishing is limited to the superficial layer of the component so that the tip is only slightly rounded, with a radius of curvature of nearly 200 µm. It is then shown with 500 µm-diameter axicons that a quasi-Bessel beam is generated closely after the tip and features a 5.3 µm diameter maintained over a propagation distance of almost 3.5 mm.

Transversal and axial modulation of axicon-generated Bessel beams using amplitude and phase masks for glass processing applications

The control of laser-induced microcracks in the volume of transparent materials is essential for scribing processes. In this paper, we investigate the effect of various amplitude and single-level phase masks on both transverse and axial intensity distribution of the conventional axicon-generated Bessel beams. Furthermore, we demonstrate the volumetric crack control induced by an asymmetrical central core with an appropriately selected intensity level to avoid the influence of peripheral intensity maxima. Proper alignment of cracks and intra-distance between the modifications results in the reduced separation stress of the scribed samples. Furthermore, the additional amplitude modulation of the incident Gaussian beam is introduced to flatten the axial intensity distribution of the axicon-generated Bessel beam.

3D Manufacturing of Glass Microstructures Using Femtosecond Laser

The rapid expansion of femtosecond (fs) laser technology brought previously unavailable capabilities to laser material processing. One of the areas which benefited the most due to these advances was the 3D processing of transparent dielectrics, namely glasses and crystals. This review is dedicated to overviewing the significant advances in the field. First, the underlying physical mechanism of material interaction with ultrashort pulses is discussed, highlighting how it can be exploited for volumetric, high-precision 3D processing. Next, three distinct transparent material modification types are introduced, fundamental differences between them are explained, possible applications are highlighted. It is shown that, due to the flexibility of fs pulse fabrication, an array of structures can be produced, starting with nanophotonic elements like integrated waveguides and photonic crystals, ending with a cm-scale microfluidic system with micro-precision integrated elements. Possible limitations to each processing regime as well as how these could be overcome are discussed. Further directions for the field development are highlighted, taking into account how it could synergize with other fs-laser-based manufacturing techniques.

In-depth comparison of conventional glass cutting technologies with laser-based methods by volumetric scribing using Bessel beam and rear-side machining

With the development of industrial lasers and novel glass processing techniques, which offer high speed, quality and precision, this becomes an attractive alternative to conventional methods, such as mechanical scribing and cleaving, diamond saw and waterjet cutting, commonly used in the industry. However, the emerging techniques lack thorough validation with respect to well-established methods. To this end, we present a detailed comparison of different glass cutting methods, taking into account surface quality, side-wall roughness, residual stresses and flexural strength. In addition, samples were examined after fracture, and the flexural strength was estimated according to the quarter elliptical corner flaws, which were the main reason of glass failure. Two laser glass processing techniques were investigated - the rear-side glass processing with tightly focused nanosecond laser pulses and sub-nanosecond laser volumetric scribing with asymmetrical Bessel beam. Results were compared to mechanical scribing and breaking, diamond saw and waterjet cutting.

Fabrication and evaluation of negative axicons for ultrashort pulsed laser applications

We report on the fabrication and evaluation of a sharp tip negative axicon paving the way for applications in high-power ultrashort pulsed laser systems. The negative axicon is manufactured by applying a two-step all laser-based process chain consisting of ultrashort pulsed laser ablation and CO₂ laser polishing finishing the component in less than 5 minutes. The finalized negative axicon reveals a surface roughness of 18 nm, fulfilling optical quality. Two measurement setups, including the ultrashort pulsed laser itself, are used to evaluate the formation of Bessel beams in detail. By applying a focusing lens behind the negative axicon, well-developed Bessel beams are generated while their lengths depend on the distance between the negative axicon and the lens. Furthermore, the diameter of the Bessel beams increase strongly with the propagation distance. By adding a second focusing lens, Bessel beams are generated at its focal position, being almost invariant of its position. Hence, the typical Bessel beam intensity distribution is observed over an entire moving range of this second lens of 300 mm. While these Bessel beams show superior quality in terms of sharp peaks with homogeneous concentric rings, only minor deviations in intensity and diameter are observed over the moving range.

Multifunctional light beam control device by stimuli-responsive liquid crystal micro-grating structures

There is an increasing need to control light phase with tailored precision via simple means in both fundamental science and industry. One of the best candidates to achieve this goal are electro-optical materials. In this work, a novel technique to modulate the spatial phase profile of a propagating light beam by means of liquid crystals (LC), electro-optically addressed by indium-tin oxide (ITO) grating microstructures, is proposed and experimentally demonstrated. A planar LC cell is assembled between two perpendicularly placed ITO gratings based on microstructured electrodes. By properly selecting only four voltage sources, we modulate the LC-induced phase profile such that non-diffractive Bessel beams, laser stretching, beam steering, and 2D tunable diffraction gratings are generated. In such a way, the proposed LC-tunable component performs as an all-in-one device with unprecedented characteristics and multiple functionalities. The operation voltages are very low and the aperture is large. Moreover, the device operates with a very simple voltage control scheme and it is lightweight and compact. Apart from the demonstrated functionalities, the proposed technique could open further venues of research in optical phase spatial modulation formats based on electro-optical materials.